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Microstructure of Cu2O/Si interfaces, made by epitaxial electrodeposition

  • Frank Ernst EMAIL logo and Jay A. Switzer
Published/Copyright: January 11, 2022
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 94 Issue 3

Abstract

Cu2O can be electrodeposited epitaxially onto Si (001) single-crystal substrates with an orientation relationship that can be described as a 45° rotation around the 〈001〉 direction that both crystals have in common along the growth direction. We show that this orientation relationship corresponds to maximum “reciprocal-space overlap”. In apparent contradiction to the unique orientation relationship, conventional, high-resolution, and high-resolution analytical transmission electron microscopy has revealed that an amorphous interlayer, which has a thickness of about 4 nm and mainly consists of SiO2, separates the Cu2O layer and the Si substrate. Potential micromechanisms for the evolution of this structure during early stages of growth are discussed.

Abstract

Elektrolytische Abscheidung von Cu2O auf Si-(001)-Einkristall-Substraten ermöglicht die Herstellung epitaktischer Schichten. Die Orientierungsbeziehung zwischen Cu2O und Si kann man als 45°-Drehung um die 〈001〉-Richtung beschreiben, welche den beiden Kristallgittern entlang der Wachstumsrichtung gemein ist. Wir zeigen, dass diese Orientierungsbeziehung maximalem „Überlapp im reziproken Raum“ entspricht. In scheinbarem Widerspruch zu der eindeutigen Orientierungsbeziehung zwischen Cu2O und Si, die wir beobachten, zeigen konventionelle, hochauflösende und hochauflösende analytische Transmissions-Elektronenmikroskope eine etwa 4 nm dicke amorphe Schicht zwischen der Cu2O-Schicht und dem Si-Substrat, welche vorwiegend aus SiO2 besteht. Mögliche Mikromechanismen für die Entstehung dieser Struktur werden diskutiert.

Keywords: Electrodeposition; Epitaxy; Interfaces; Electron microscopy
Department of Materials Science and Engineering Case Western Reserve University 10900 Euclid Avenue, Cleveland, Ohio 44106-7204, USA Tel.: +1 216 368 0611 Fax: +1 216 368 3209
Dedicated to Professor Dr. Dr. h. c. Manfred Rühle on the occasion of his 65th birthday

Funding statement: We thank N. Zheng for the specimen preparation and acknowledge financial support of the National Science Foundation under contract number DMR-0114134, the DARPA under contract number N00014-00-1-0881, and the Ohio Board of Regents (OBR).

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Received: 2002-07-29
Published Online: 2022-01-11

© 2003 Carl Hanser Verlag, München

Articles in the same Issue

  1. Frontmatter
  2. Editorial
  3. Editorial
  4. Articles/Aufsätze
  5. The role of oxidation-induced cavities on the failure of the thermally grown oxide on binary β-NiAl alloys
  6. Phase stability of Y + Gd co-doped zirconia
  7. Mechanisms governing the distortion of alumina-forming alloys upon cyclic oxidation
  8. High-temperature oxidation of FeCrAl alloys: the effect of Mg incorporation into the alumina scale
  9. Nonlinear dielectric properties at oxide grain boundaries
  10. TEM observations of singular grain boundaries and their roughening transition in TiO2-excess BaTiO3
  11. Processing of dense MgO substrates for high-temperature superconductors
  12. Microwave-induced crystallization of polysilazane-derived silicon carbonitride
  13. Schottky barrier formation in liquid-phase-sintered silicon carbide
  14. SrTiO3: a model electroceramic
  15. Optical properties and electronic structure of oxidized and reduced single-crystal strontium titanate
  16. Spreading of liquid Ag and Ag–Mo alloys on molybdenum substrates
  17. Nanoalloying in mixed AgmAun nanowires
  18. Never ending saga of a simple boundary
  19. Comparison of interfacial chemistry at Cu/α-alumina and Cu/γ-alumina interfaces
  20. Microstructure of Cu2O/Si interfaces, made by epitaxial electrodeposition
  21. Metal/oxide interfaces and their reaction with hydrogen
  22. Amorphous films at metal/ceramic interfaces
  23. Some thoughts on source monochromation and the implications for electron energy loss spectroscopy
  24. Determination of the contrast transfer function by analysing diffractograms of thin amorphous foils
  25. Progress in the preparation of cross-sectional TEM specimens by ion-beam thinning
  26. Quantification of interfacial segregation by analytical electron microscopy
  27. Quantification of elemental segregation to lath and grain boundaries in low-alloy steel by STEM X-ray mapping combined with the ζ-factor method
  28. Microstructure of Al/Ti metallization layers
  29. Connectivity of CSL grain boundaries and the role of deviations from exact coincidence
  30. Effect of laser shock processing on the microstructure and mechanical properties of pure Cu
  31. Growth and microstructure of iron nitride layers and pore formation in ε-Fe3N
  32. Phase diagram of the Al–Cu–Fe quasicrystal-forming alloy system
  33. Notifications/Mitteilungen
  34. Personal/Personelles
  35. Gesellschaftsnachricht
  36. International Conferences
https://doi.org/10.3139/ijmr-2003-0049
Keywords for this article
Electrodeposition; Epitaxy; Interfaces; Electron microscopy

Articles in the same Issue

  1. Frontmatter
  2. Editorial
  3. Editorial
  4. Articles/Aufsätze
  5. The role of oxidation-induced cavities on the failure of the thermally grown oxide on binary β-NiAl alloys
  6. Phase stability of Y + Gd co-doped zirconia
  7. Mechanisms governing the distortion of alumina-forming alloys upon cyclic oxidation
  8. High-temperature oxidation of FeCrAl alloys: the effect of Mg incorporation into the alumina scale
  9. Nonlinear dielectric properties at oxide grain boundaries
  10. TEM observations of singular grain boundaries and their roughening transition in TiO2-excess BaTiO3
  11. Processing of dense MgO substrates for high-temperature superconductors
  12. Microwave-induced crystallization of polysilazane-derived silicon carbonitride
  13. Schottky barrier formation in liquid-phase-sintered silicon carbide
  14. SrTiO3: a model electroceramic
  15. Optical properties and electronic structure of oxidized and reduced single-crystal strontium titanate
  16. Spreading of liquid Ag and Ag–Mo alloys on molybdenum substrates
  17. Nanoalloying in mixed AgmAun nanowires
  18. Never ending saga of a simple boundary
  19. Comparison of interfacial chemistry at Cu/α-alumina and Cu/γ-alumina interfaces
  20. Microstructure of Cu2O/Si interfaces, made by epitaxial electrodeposition
  21. Metal/oxide interfaces and their reaction with hydrogen
  22. Amorphous films at metal/ceramic interfaces
  23. Some thoughts on source monochromation and the implications for electron energy loss spectroscopy
  24. Determination of the contrast transfer function by analysing diffractograms of thin amorphous foils
  25. Progress in the preparation of cross-sectional TEM specimens by ion-beam thinning
  26. Quantification of interfacial segregation by analytical electron microscopy
  27. Quantification of elemental segregation to lath and grain boundaries in low-alloy steel by STEM X-ray mapping combined with the ζ-factor method
  28. Microstructure of Al/Ti metallization layers
  29. Connectivity of CSL grain boundaries and the role of deviations from exact coincidence
  30. Effect of laser shock processing on the microstructure and mechanical properties of pure Cu
  31. Growth and microstructure of iron nitride layers and pore formation in ε-Fe3N
  32. Phase diagram of the Al–Cu–Fe quasicrystal-forming alloy system
  33. Notifications/Mitteilungen
  34. Personal/Personelles
  35. Gesellschaftsnachricht
  36. International Conferences
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