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Analysis of the Isothermal Compression in Nanoimprint Lithography Assuming a Power-Law Fluid

  • I.-C. Hsin and W.-B. Young
Published/Copyright: April 6, 2013
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International Polymer Processing
From the journal International Polymer Processing Volume 23 Issue 1

Abstract

One of the choices for defining a nano pattern in micro fabrication is to use the nanoimprint lithography. This method is also known as a hot embossing lithography due to its inherited process technique from the compression process. It is important to determine the appropriate conditions of pressure, temperature, and time in the nanoimprint lithography process. To determine the right conditions for nanoimprint lithography, one has to understand the polymer flow behavior during the imprinting process. In this study, a simplified analytical model was developed based on a power-law fluid to predict the polymer flow during the imprinting process. Under a constant imprint force, the imprint depth on a polymer film can be predicted using this model. Experimental tests were also conducted to verify the results. It was demonstrated that the model can provide reasonable results on the imprint depth.

∗ Mail address: Wen-Bin Young, Department of Aeronautics and Astronautics, National Cheng Kung University, Tainan, Taiwan, R.O.C. E-mail:

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Received: 2006-9-4
Accepted: 2007-10-30
Published Online: 2013-04-06
Published in Print: 2008-03-01

© 2008, Carl Hanser Verlag, Munich

Articles in the same Issue

  1. Contents
  2. Contents
  3. Regular Contributed Articles
  4. The Dynamic Apparent Viscosity of Polymer Melts During Pulsatile Extrusion Flow with Vibration Force Field
  5. Generation of Microcellular Foams by Supercritical Carbon Dioxidein a PMMA Compound
  6. Influence of Uniaxial Extension on the Mechanical Properties of PET and PEN Films
  7. Analysis of the Isothermal Compression in Nanoimprint Lithography Assuming a Power-Law Fluid
  8. Non-Isothermal Simulation of the Film Blowing Process Using Multi-Mode Extended Pom-Pom Model
  9. Flow Analysis of Flat Spiral Dies and Comparison with Cylindrical Spiral Mandrel Dies
  10. Development of Polymer Blend Morphology along an Extruder with Different Screw Geometries
  11. A Mechanical Model for Stress Developmentin PA12 Tube Extrusion
  12. Shrinkage Analysis on Convex Shellby Injection Molding
  13. Melting Mechanism of Thermoplastic Elastomers and Comparison to Polyolefin Thermoplastic Melting Studies in a Single Screw Extruder
  14. Thermal Degradation of Meta- and Para-Aramid Fibers in Different Atmospheres
  15. Experimental Studies on Screw Characteristics in Closely Intermeshing Counter-rotating Twin Screw Extruder
  16. Experimental Analysis of Heat Transfer in Rotational Molding Process
  17. Polyetheretherketone Films with Low Thermal Expansion for Flexible Printed Circuit Boards
  18. Experimental Study and Modeling of Flow Behavior and Orientation Kinetics of Layered Silicate/Polypropylene Nanocomposites in Start-up of Shear Flows
  19. Polystyrene/Phosphonium Organoclay Nanocomposites by Melt Compounding
  20. PPS News
  21. PPS News
  22. Seikei-Kakou Abstracts
  23. Seikei-Kakou Abstracts
https://doi.org/10.3139/217.1008

Articles in the same Issue

  1. Contents
  2. Contents
  3. Regular Contributed Articles
  4. The Dynamic Apparent Viscosity of Polymer Melts During Pulsatile Extrusion Flow with Vibration Force Field
  5. Generation of Microcellular Foams by Supercritical Carbon Dioxidein a PMMA Compound
  6. Influence of Uniaxial Extension on the Mechanical Properties of PET and PEN Films
  7. Analysis of the Isothermal Compression in Nanoimprint Lithography Assuming a Power-Law Fluid
  8. Non-Isothermal Simulation of the Film Blowing Process Using Multi-Mode Extended Pom-Pom Model
  9. Flow Analysis of Flat Spiral Dies and Comparison with Cylindrical Spiral Mandrel Dies
  10. Development of Polymer Blend Morphology along an Extruder with Different Screw Geometries
  11. A Mechanical Model for Stress Developmentin PA12 Tube Extrusion
  12. Shrinkage Analysis on Convex Shellby Injection Molding
  13. Melting Mechanism of Thermoplastic Elastomers and Comparison to Polyolefin Thermoplastic Melting Studies in a Single Screw Extruder
  14. Thermal Degradation of Meta- and Para-Aramid Fibers in Different Atmospheres
  15. Experimental Studies on Screw Characteristics in Closely Intermeshing Counter-rotating Twin Screw Extruder
  16. Experimental Analysis of Heat Transfer in Rotational Molding Process
  17. Polyetheretherketone Films with Low Thermal Expansion for Flexible Printed Circuit Boards
  18. Experimental Study and Modeling of Flow Behavior and Orientation Kinetics of Layered Silicate/Polypropylene Nanocomposites in Start-up of Shear Flows
  19. Polystyrene/Phosphonium Organoclay Nanocomposites by Melt Compounding
  20. PPS News
  21. PPS News
  22. Seikei-Kakou Abstracts
  23. Seikei-Kakou Abstracts
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