Home Preparation and characterization of silicon nanowires using SEM/FIB and TEM
Article
Licensed
Unlicensed Requires Authentication

Preparation and characterization of silicon nanowires using SEM/FIB and TEM

Paper presented at “XV International Conference on Electron Microscopy”, 15–18 September 2014, Cracow, Poland
  • Sayanti Banerjee , Uwe Muehle , Markus Löffler , Andre Heinzig , Jens Trommer and Ehrenfried Zschech
Published/Copyright: July 9, 2015
Become an author with De Gruyter Brill
Author Information
International Journal of Materials Research
From the journal International Journal of Materials Research Volume 106 Issue 7

Abstract

Due to the electronic and structural properties of silicon, silicon nanowires have a great potential in nanoscale electronic devices and sensors. Silicon nanowires used for reconfigurable field effect transistors are designed, synthesized and characterized after each step in order to ensure excellent electrical and physical properties of the end product and to study various process parameters. In this study, silicon nanowire based reconfigurable field effect transistors are studied as as-grown “forests”, individually, oxidized and after forming Schottky junctions. The analysis is performed using scanning electron microscopy and transmission electron microscopy. Focused ion beam based preparation was carried out in the case of samples with Schottky junctions. This paper provides a comprehensive description of sample preparation and characterization of the nanowires.

Keywords: Silicon nanowire; TEM; SEM/FIB; Liftout; Schottky junction
*Correspondence address, Sayanti Banerjee, MSc, Technische Universität Dresden, Dresden Center for Nanoanalysis, 01069 Dresden, Germany, Tel.: +49 351 463 35452, Fax: +49 351 463 31985, E-mail:

References

[1] A.Heinzig, S.Slesazeck, F.Kreupl, T.Mikolajick, W.M.Weber: Nano Lett. 12 (2011) 119–124. 10.1021/nl203094hSearch in Google Scholar PubMed

[2] T.Mikolajick, A.Heinzig, J.Trommer, S.Pregl, M.Grube, G.Cuniberti, W.M.Weber: Phys. Status Solidi RRL, 7 (2013) 793–799. 10.1002/pssr.201307247Search in Google Scholar

[3] W.M.Weber, G.S.Duesberg, A.P.Graham, M.Liebau, E.Unger, C.Cheze, L.Geelhaar, P.Lugli, H.Riechert, F.Kreupl: Phys. Status Solidi (b), 243 (2006) 3340–3345. 10.1002/pssb.200669138Search in Google Scholar

[4] W.M.Weber, L.Geelhaar, A.P.Graham, E.Unger, G.S.Duesberg, M.Liebau, W.Pamler, C.Chèze, H.Riechert, P.Lugli, F.Kreupl: Nano Lett. 6 (2006) 2660–2666. 10.1021/nl0613858Search in Google Scholar PubMed

[5] Y.Wu, Y.Cui, L.Huynh, C.J.Barrelet, D.C.Bell, C.M.Lieber: Nano Lett. 4 (2004) 433–436. 10.1021/nl035139xSearch in Google Scholar

[6] Y.Wu, J.Xiang, C.Yang, W.Lu, C.M.Lieber: Nature430 (2004) 61–65. 10.1038/nature02674Search in Google Scholar PubMed

[7] L.A.Giannuzzi, R.Geurts, J.Ringnalda: Microsc. Microanal.11 (2005) 828–829. 10.1017/S1431927605507797Search in Google Scholar

[8] J.Huang, W.Moeller (), (private communications).Search in Google Scholar

[9] A.Heinzig, T.Mikolajick, J.Trommer, D.Grimm, W.M.Weber: Nano Lett. 13 (2013) 4176–4181. 10.1021/nl401826uSearch in Google Scholar PubMed

[10] F.Tatsuya, N.Takahiro, S.Koichi, S.Sakakihara, S.Inoue: J. Eng. Mater. Technol.135 (2013) 041002. 10.1115/1.4024545Search in Google Scholar

[11] J.J.Ke, K.T.Tsai, Y.A.Dai, J.H.He: App. Phys. Lett.100 (2012) 053503. 10.1063/1.3678636Search in Google Scholar

Received: 2014-10-30
Accepted: 2015-03-16
Published Online: 2015-07-09
Published in Print: 2015-07-04

© 2015, Carl Hanser Verlag, München

Articles in the same Issue

  1. Contents
  2. Contents
  3. Original Contributions
  4. Phase transitions induced by severe plastic deformation: steady-state and equifinality
  5. Dynamic precipitation of nickel-based superalloys undergoing severe deformation below the solvus temperature
  6. The influence of ECAP on microstructure evolution of aluminium alloys during in-situ heating in TEM
  7. An investigation into the effect of isothermal annealing on the structure (XRD), microstructure (SEM, TEM) and magnetic properties of amorphous ribbons and bulk amorphous plates
  8. Analysis of the structure (XRD) and microstructure (TEM, SEM, AFM) of bulk amorphous and nanocrystalline alloys based on FeCoB
  9. Preparation and characterization of silicon nanowires using SEM/FIB and TEM
  10. In-situ TEM heating of Ni/Al multilayers
  11. Microstructure and martensitic transformation in Ni48Mn39.5Sn12.5–xSix metamagnetic Heusler alloy ribbons
  12. Evolution of Fe-rich compounds in a secondary Al–Si–Cu alloy: influence of cooling rate
  13. Microstructural evolution and grain refinement in an intermetallic titanium aluminide alloy with a high molybdenum content
  14. Microstructure and properties of thick nanocomposite TiN/Si3N4 coatings on Vanadis 23 HS steel
  15. Influence of casting procedure on microstructure and properties of Mg alloy–glassy carbon particle composite
  16. Microstructural characterization of nanostructured supersonic sprayed Ni–Sn coatings after wear tests at elevated temperature
  17. On the wear of TiBx/TiSiyCz coatings deposited on 316L steel
  18. 3D reconstruction and characterization of carbides in Ni-based high carbon alloy in a FIB-SEM system
  19. Microstructural evolution in deformed duplex stainless steels
  20. Microstructure and interfacial reactions in the bonding zone of explosively welded Zr700 and carbon steel plates
  21. Microstructural characterization of second phases in X10CrMoVNb9–1 and 12CrMoWCuVNb steels after long steam exposure time at 550°C
  22. Short Communications
  23. Novel multilayer nano-composite protective coatings for metallic medical tools
  24. Microstructural changes in Cu-5.8 at.% In alloy caused by high pressure torsion
  25. Electron microscopy investigation of a cast AlSi9Mg aluminum alloy subjected to friction stir processing with overlapping passes
  26. DGM News
  27. DGM News
https://doi.org/10.3139/146.111249
Keywords for this article
Silicon nanowire; TEM; SEM/FIB; Liftout; Schottky junction

Articles in the same Issue

  1. Contents
  2. Contents
  3. Original Contributions
  4. Phase transitions induced by severe plastic deformation: steady-state and equifinality
  5. Dynamic precipitation of nickel-based superalloys undergoing severe deformation below the solvus temperature
  6. The influence of ECAP on microstructure evolution of aluminium alloys during in-situ heating in TEM
  7. An investigation into the effect of isothermal annealing on the structure (XRD), microstructure (SEM, TEM) and magnetic properties of amorphous ribbons and bulk amorphous plates
  8. Analysis of the structure (XRD) and microstructure (TEM, SEM, AFM) of bulk amorphous and nanocrystalline alloys based on FeCoB
  9. Preparation and characterization of silicon nanowires using SEM/FIB and TEM
  10. In-situ TEM heating of Ni/Al multilayers
  11. Microstructure and martensitic transformation in Ni48Mn39.5Sn12.5–xSix metamagnetic Heusler alloy ribbons
  12. Evolution of Fe-rich compounds in a secondary Al–Si–Cu alloy: influence of cooling rate
  13. Microstructural evolution and grain refinement in an intermetallic titanium aluminide alloy with a high molybdenum content
  14. Microstructure and properties of thick nanocomposite TiN/Si3N4 coatings on Vanadis 23 HS steel
  15. Influence of casting procedure on microstructure and properties of Mg alloy–glassy carbon particle composite
  16. Microstructural characterization of nanostructured supersonic sprayed Ni–Sn coatings after wear tests at elevated temperature
  17. On the wear of TiBx/TiSiyCz coatings deposited on 316L steel
  18. 3D reconstruction and characterization of carbides in Ni-based high carbon alloy in a FIB-SEM system
  19. Microstructural evolution in deformed duplex stainless steels
  20. Microstructure and interfacial reactions in the bonding zone of explosively welded Zr700 and carbon steel plates
  21. Microstructural characterization of second phases in X10CrMoVNb9–1 and 12CrMoWCuVNb steels after long steam exposure time at 550°C
  22. Short Communications
  23. Novel multilayer nano-composite protective coatings for metallic medical tools
  24. Microstructural changes in Cu-5.8 at.% In alloy caused by high pressure torsion
  25. Electron microscopy investigation of a cast AlSi9Mg aluminum alloy subjected to friction stir processing with overlapping passes
  26. DGM News
  27. DGM News
Sign up now to receive a 20% welcome discount
Institutional Access
How does access work?
Have an idea on how to improve our website?
Please write us.
© 2025 De Gruyter Brill
Downloaded on 6.10.2025 from https://www.degruyterbrill.com/document/doi/10.3139/146.111249/html
Scroll to top button