Comparison of Depth-Sensing Indentation at Ultramicroscopic Contacts by Single- and Multiple-Partial-Unload Cycles
-
Maissarath Nassirou
und Jeremy Thurn
Abstract
Thin films typically exhibit variations in modulus and hardness with increasing indentation depth during depth-sensing indentation experiments at ultramicroscopic contacts (“nanoindentation”) because the measured stiffness response is affected by the substrate. There are three techniques commonly used to sample this variation in properties with depth: multiple indentations with increasing peak load, a single indentation with multiple-partial-unload cycles, and continuous stiffness measurement during a single indentation event. Experiments using the first two options were performed on a series of thin film systems and the method of multiple-partial-unloading found to have significant drawbacks when used at the sub-micron length scale that lead to erroneous conclusions.
References
[1] M.F.Doerner, W.D.Nix: J. Mater. Res.1 (1986) 601.Suche in Google Scholar
[2] Y.Sun, T.Bell, S.Zheng: Thin Solid Films258 (1995) 198.10.1016/S0378-7753(97)83995-XSuche in Google Scholar
[3] J.L.Hay, M.E.O'Hern, W.C.Oliver, in: N.R.Moody, W.W.Gerberich, N.Burnham, S.P.Baker (Eds.), Fundamentals of Nanoindentation and Nanotribology, Materials Research Society, Pittsburgh (1998) 27.Suche in Google Scholar
[4] R.B.King: Int. J. Solids Structures23 (1987) 1657.10.1016/0020-7683(87)90116-8Suche in Google Scholar
[5] M.Korsunsky, M.R.McGurk, S.J.Bull, T.F.Page: Surf. Coat. Technol.99 (1998) 171.Suche in Google Scholar
[6] J.Mencik, D.Munz, E.Quandt, E.R.Weppelmann, M.V.Swain: J. Mater. Res.12 (1997) 2475.Suche in Google Scholar
[7] A.Rar, H.Song, G.M.Pharr, in: C.S.Ozkan, R.C.Cammarata, L.B.Freund, H.Gao (Eds.), Thin Films: Stresses and Mechanical Properties IX, Materials Research Society, Pittsburgh (2002) L10.10.1.Suche in Google Scholar
[8] W.C.Oliver, G.M.Pharr: J. Mater. Res.7 (1992) 1564.Suche in Google Scholar
[9] I.N.Sneddon: Int. J. Eng. Sci.3 (1965) 47.10.1016/0020-7225(65)90019-4Suche in Google Scholar
[10] O.Postel, J.Heberlein: Surf. Coat. Technol.108–109 (1998) 247.Suche in Google Scholar
[11] S.O.Kucheyev, J.E.Bradby, J.S.Williams, C.Jagadish, M.V.Swain: Appl. Phys. Lett.80 (2002) 956.Suche in Google Scholar
[12] K.I.Schiffmann, R.L.A.Kuster: Z. Metallkd.95 (2004) 311.Suche in Google Scholar
[13] J.W.Leggoe: J. Mater. Res.19 (2004) 2437.10.1557/JMR.2004.0300Suche in Google Scholar
[14] M.Suganuma, M.V.Swain: J. Mater. Res.19 (2004) 3490.Suche in Google Scholar
[15] O.L.Warren, A.Dwivedi, T.J.Wyrobek, O.O.Famodu, I.Takeuchi: Rev. Sci. Instrum.76 (2005) 062209–1.10.1063/1.1906089Suche in Google Scholar
[16] Hysitron Inc.: TriboIndenter User Manual, Hysitron, Minneapolis (2004).Suche in Google Scholar
[17] Micro Materials Ltd.: Depth profiling of hardness and modulus: The load-partial unload technique, at http://www.micromaterials.co.uk/DepthProfiling.htmSuche in Google Scholar
[18] Center For Tribology, Inc.: Nano-indentation module NH-1: Nano & micro tests, at http://www.cetr.com/Brochures/CETR2005_Brochures/CETR2005_Nano-Module_Final.pdfSuche in Google Scholar
[19] Y.-T.Cheng, C.-M.Cheng: J. Mater. Res.13 (1998) 1059.Suche in Google Scholar
© 2009, Carl Hanser Verlag, München
Artikel in diesem Heft
- Contents
- Contents
- Feature
- Nd–Fe–B permanent magnets a quarter century later: implications for patentability
- Micromagnetism of advanced hard magnetic materials
- Magnetism of nanostructured materials for advanced magnetic recording
- Basic
- A Study of the Al–Mg–B Ternary Phase Diagram
- Effects of Lanthanum on Magnetic Behavior and Hardness of Electroless Ni–Fe–P Deposits
- Interfacial Reactions between Lead-Free Solders and the Multilayer Au/Ni/SUS304 Substrate
- Melting Behavior of Sn–Bi Alloy Powder Compacts Observed Using Optical Dilatometry
- High-Strength Mg-Based Bulk Metallic Glass Composites with Remarkable Plasticity
- Determination of Liquidus Temperature in Sn–Ti–Zr Alloys by Viscosity, Electrical Conductivity and XRD Measurements
- The coupled FEM analysis of super-high angular speed polishing of diamond films
- Applied
- Comparison of Depth-Sensing Indentation at Ultramicroscopic Contacts by Single- and Multiple-Partial-Unload Cycles
- Sintering Behavior of ZnO: Mn Ceramics Fabricated from Sol-Gel Derived Nanocrystalline powders
- Suitability of Maraging Steel Weld Cladding for Repair of Die-Casting Tooling
- Enhanced properties of functionally graded Cu–Cr powder compacts
- Influence of Cr on the microstructure and mechanical properties of Ti–Si Eutectic Alloys
- Notifications
- DGM News
Artikel in diesem Heft
- Contents
- Contents
- Feature
- Nd–Fe–B permanent magnets a quarter century later: implications for patentability
- Micromagnetism of advanced hard magnetic materials
- Magnetism of nanostructured materials for advanced magnetic recording
- Basic
- A Study of the Al–Mg–B Ternary Phase Diagram
- Effects of Lanthanum on Magnetic Behavior and Hardness of Electroless Ni–Fe–P Deposits
- Interfacial Reactions between Lead-Free Solders and the Multilayer Au/Ni/SUS304 Substrate
- Melting Behavior of Sn–Bi Alloy Powder Compacts Observed Using Optical Dilatometry
- High-Strength Mg-Based Bulk Metallic Glass Composites with Remarkable Plasticity
- Determination of Liquidus Temperature in Sn–Ti–Zr Alloys by Viscosity, Electrical Conductivity and XRD Measurements
- The coupled FEM analysis of super-high angular speed polishing of diamond films
- Applied
- Comparison of Depth-Sensing Indentation at Ultramicroscopic Contacts by Single- and Multiple-Partial-Unload Cycles
- Sintering Behavior of ZnO: Mn Ceramics Fabricated from Sol-Gel Derived Nanocrystalline powders
- Suitability of Maraging Steel Weld Cladding for Repair of Die-Casting Tooling
- Enhanced properties of functionally graded Cu–Cr powder compacts
- Influence of Cr on the microstructure and mechanical properties of Ti–Si Eutectic Alloys
- Notifications
- DGM News