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The coupled FEM analysis of super-high angular speed polishing of diamond films

  • S. T. Huang , L. Zhou , L. F. Xu and K. R. Jiao
Published/Copyright: June 11, 2013
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 100 Issue 5

Abstract

Super-high angular speed polishing of diamond films is a new polishing method. During the polishing process, the rotational velocity of the cast iron polishing plate is higher than that of conventional polishing methods, and friction between the polishing plate and the diamond film during rotary motion generates heat that creates a diffusion condition for carbon atoms. The temperature and strain energy density distributions of the polished surface directly affect the polishing quality of diamond films. In this paper, a three-dimensional thermo-mechanical coupled finite element analysis was employed to analyze the temperature and strain energy due to the friction between the polishing plate and the thick diamond film while the polishing plate rotates at super-high angular speed. The results indicate that when the diamond film and polishing plate rotate in the same direction, the differences of temperature and strain energy evidently decrease, and the temperature and strain energy in the diamond film become more uniform. The removal rate by super-high speed polishing has been quantitatively described by the diffusion mechanism, and it agrees well with the experiment data. This work will provide theoretical guidance to the design and operation of the super-high speed polishing of diamond films.

Keywords: Diamond films; Polishing; Temperature field; Strain energy; Thermo-mechanical coupling
* Correspondence address, Dr. Li Zhou School of Mechanical Engineering Shenyang Ligong University, Shenyang, 110168, China Tel.: +86 248 225 3722 Fax: +86 242 468 2115 E-mail:

References

[1] A.P.Malshe, B.S.Park, W.D.Brown, H.A.Naseem: Diamond Relat. Mater.8 (1999) 1198.Search in Google Scholar

[2] C.J.Tang, A.J.Neves, A.J.S.Fernandes, J.Grácio, N.Ali: Diamond Ralat. Mater.12 (2003) 1411.Search in Google Scholar

[3] A.Gicquel, K.Hassouni, F.Silva, J.Achard: Curr. Appl. Phys.1 (2001) 479.Search in Google Scholar

[4] S.Jin, J.E.Graebner, G.W.Kammlott, T.H.Tiefel, S.G.Kosinski, L.H.Chen, R.A.Fastnacht: Appl. Phys. Lett.60 (1992) 1948.Search in Google Scholar

[5] M.Yoshikawa, F.Okuzumi: Surf. Coat. Technol.88 (1996) 197.Search in Google Scholar

[6] A.M.Ozkan, A.P.Makshe, W.D.Brown: Diamond Relat. Mater.6 (1997) 1789.Search in Google Scholar

[7] A.Hirata, H.Tokura, M.Yoshikawa: Thin Solid Films212 (1992) 43.Search in Google Scholar

[8] C.Y.Wang, F.L.Zhang, T.C.Kuang, C.L.Chen: Thin Solid Films496 (2006) 698.10.1007/BF00486264Search in Google Scholar

[9] C.Y.Cheng, H.Y.Tsai, C.H.Wu, P.Y.Liu, C.H.Hsieh, Y.Y.Chang: Diamond Relat. Mater.14 (2005) 622.Search in Google Scholar

[10] S.K.Choi, D.Y.Jung, S.Y.Kweon, S.K.Jung: Thin Solid Films279 (1996) 110.Search in Google Scholar

[11] A.M.Zaitsev, G.Kosaca, B.Richarz, V.Raiko, R.Job, T.Fries, W.R.Fahrner: Diamond Relat. Mater.7 (1998) 1108.Search in Google Scholar

[12] Y.J.Sun, S.B.Wang, S.Tian, Y.H.Wang: Diamond Relat. Mater.15 (2006) 1412.Search in Google Scholar

[13] S.Jin, L.H.Chen, J.E.Graebner, M.McCormack, M.E.Reiss: Appl. Phys. Lett.63 (1993) 622.Search in Google Scholar

[14] H.Yokoyama, H.Numakura, M.Koiwa: Acta Mater.46 (1998) 2823.Search in Google Scholar

[15] H.Tokura, C.F.Yang, M.Yoshikawa: Thin Solid Films212 (1992) 49.Search in Google Scholar

[16] A.Özel, V.Ucar, A.Mimaroglu, I.Calli: Mater. Design21 (2000) 437.Search in Google Scholar

[17] L.Zhou, S.X.Li, W.Ke: Int. J. Mater. Res.99 (2008) 191.Search in Google Scholar

[18] C.M.Chen, R.Kovacevic: Int. J. Mach. Tools. Manufact.43 (2003) 1319.Search in Google Scholar

[19] A.S.Vishnevskii, A.V.Lysenko: Synth. Diamonds4 (1974) 7.Search in Google Scholar

[20] H.M.Strong, R.E.Hanneman: J. Chem. Phys.46 (1967) 3668.Search in Google Scholar

[21] J.Chipman: Metall. Trans.3 (1972) 55.10.1007/BF02680585Search in Google Scholar

[22] G.L.Selman, P.J.Ellison, A.S.Darling: Platinum Met. Rev.14 (1970) 14.Search in Google Scholar

[23] J.Agren: Scr. Metall.20 (1986) 1507.10.1016/0036-9748(86)90384-4Search in Google Scholar

[24] R.P.Smith: Trans. Metall. Soc. AIME230 (1964) 476.10.1213/00000539-196409000-00011Search in Google Scholar

[25] J.Cermak, F.Rollert, H.Mehrer: Z. Metallkd.81 (1990) 81.Search in Google Scholar

[26] F.Okuzumi, C.F.Yang, M.Yishikawa: Diamond Films Technol.4 (1995) 233.Search in Google Scholar

Received: 2008-7-1
Accepted: 2009-2-10
Published Online: 2013-06-11
Published in Print: 2009-05-01

© 2009, Carl Hanser Verlag, München

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https://doi.org/10.3139/146.110089
Keywords for this article
Diamond films; Polishing; Temperature field; Strain energy; Thermo-mechanical coupling

Articles in the same Issue

  1. Contents
  2. Contents
  3. Feature
  4. Nd–Fe–B permanent magnets a quarter century later: implications for patentability
  5. Micromagnetism of advanced hard magnetic materials
  6. Magnetism of nanostructured materials for advanced magnetic recording
  7. Basic
  8. A Study of the Al–Mg–B Ternary Phase Diagram
  9. Effects of Lanthanum on Magnetic Behavior and Hardness of Electroless Ni–Fe–P Deposits
  10. Interfacial Reactions between Lead-Free Solders and the Multilayer Au/Ni/SUS304 Substrate
  11. Melting Behavior of Sn–Bi Alloy Powder Compacts Observed Using Optical Dilatometry
  12. High-Strength Mg-Based Bulk Metallic Glass Composites with Remarkable Plasticity
  13. Determination of Liquidus Temperature in Sn–Ti–Zr Alloys by Viscosity, Electrical Conductivity and XRD Measurements
  14. The coupled FEM analysis of super-high angular speed polishing of diamond films
  15. Applied
  16. Comparison of Depth-Sensing Indentation at Ultramicroscopic Contacts by Single- and Multiple-Partial-Unload Cycles
  17. Sintering Behavior of ZnO: Mn Ceramics Fabricated from Sol-Gel Derived Nanocrystalline powders
  18. Suitability of Maraging Steel Weld Cladding for Repair of Die-Casting Tooling
  19. Enhanced properties of functionally graded Cu–Cr powder compacts
  20. Influence of Cr on the microstructure and mechanical properties of Ti–Si Eutectic Alloys
  21. Notifications
  22. DGM News
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