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Nanomechanical studies of ultrathin polymeric resist films

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Published/Copyright: May 23, 2013
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 98 Issue 5

Abstract

An atomic force microscope with a specially constructed stiff cantilever was used to study the mechanical properties of ultrathin polymeric resist films devoted to use in nanoimprint lithography. The methodology, the equipment used in these studies and the results of the estimation of the Young's modulus versus temperature are presented and discussed.

Keywords: Nanomechnical; Atomic force microscopy; Polymers; Young's modulus
* Correspondence address, Prof. Zygmunt Rymuza, sw. A. Boboli 8 Street, 02-525 Warsaw, Poland, Tel.: +48 22 660 8540, Fax: +48 22 660 8601, E-mail:

References

[1] M.F.Ashby, D.R.H.Jones: Engineering Materials 2, An Introduction to Microstructures, Processing and Desing, Pergamon Press, Oxford (1986).Search in Google Scholar

[2] M.Kwacz, S.Chizhik, Z.Rymuza, Z.Kusznierewicz: Polimery49 (2004) 551.Search in Google Scholar

[3] B.Cappella, G.Dietler: Surf. Sci. Rep.34 (1999) 1.10.1016/S0167-5729(99)00003-5Search in Google Scholar

Received: 2006-10-11
Accepted: 2007-1-14
Published Online: 2013-05-23
Published in Print: 2007-05-01

© 2007, Carl Hanser Verlag, München

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https://doi.org/10.3139/146.101484
Keywords for this article
Nanomechnical; Atomic force microscopy; Polymers; Young's modulus

Articles in the same Issue

  1. Contents
  2. Contents
  3. Editorial
  4. Editorial
  5. Basic
  6. Getting accurate nanoindentation data from time-dependent and microstructural effects of zinc
  7. Indentation-induced densification of soda-lime silicate glass
  8. Nanomechanical characterization of relaxation processes in As–S chalcogenide glasses
  9. Nanoindentation behavior and mechanical properties measurement of polymeric materials
  10. Model of a superlattice indentation
  11. Nanomechanical studies of MEMS structures
  12. Mechanical properties of nanostructured polymer particles for anisotropic conductive adhesives
  13. Nanomechanical studies of ultrathin polymeric resist films
  14. Testing the viscoelastic properties of SU8 photo resist thin films at different stages of processing by nanoindentation creep and stress relaxation
  15. Microscale characterization of bitumen – back-analysis of viscoelastic properties by means of nanoindentation
  16. Applied
  17. Visco-elastic properties of thin nylon films using multi-cycling nanoindentation
  18. Area function calibration in nanoindentation using the hardness instead of Young's modulus of fused silica as a reference value
  19. Multiscale modelling of nanoindentation
  20. Unusual architecture of the exceedingly tough Macadamia “nut”-shell as revealed by atomic force microscopy and nanomechanics
  21. Notifications
  22. DGM News
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