Multifunctional materials for lean processing of waferscale optics
-
Ruth Houbertz
,
Verena Hartinger
Abstract
The continuous miniaturization of components and devices along with the increasing need of sustainability in production requires materials which can fulfill the manifold requests concerning their functionality. From an industrial point of view emphasis is on cost reduction either for the materials, the processes, or for both, along with a facilitation of processing and a general reduction of resource consumption in manufacturing. Multifunctional nanoscale materials have been widely investigated due to their tunable material properties and their ability to fulfill the increasingly growing demands in miniaturization, ease of processes, low-cost manufacturing, scalability, reliability, and finally sustainability. A material class which fulfills these requirements and is suited for integrated or waferscale optics are inorganic–organic hybrid polymers such as ORMOCER®s [ORMOCER® is registered by the Fraunhofer Gesellschaft für Angewandte Forschung e.V. and commercialized by microresist technology GmbH under license since 2003]. The combination of chemically designed multifunctional low-cost materials with tunable optical properties is very attractive for (integrated) optical and waferscale applications via a variety of different nano- and microstructuring techniques to fabricate micro- and nano-optical components, typically within less than a handful of process steps. The influence of photoinitiator and cross-linking conditions onto the optical properties of an acrylate-based inorganic–organic hybrid polymer will be discussed, and its suitability for being applied in waferscale optics is demonstrated and discussed for miniaturized multi- and single channel imaging optics.
Funding source: DFG Priority Program
Award Identifier / Grant number: HO 2475/3-1
About the authors
Ruth Houbertz. Physicist. SPIE Fellow. Member of the SPIE Board. ThinkMade Engineering & Consulting, President & Founder of Multiphoton Optics GmbH (CEO until 2020, CTO from 2013–mid 2014). Different tech and management positions in Technology and Materials Development at Fraunhofer ISC (2000-2014). Worked at Sandia Nat.’l Labs in Livermore, USA (1999–2000). Established SXM, Analytics, E-Beam Lithography Teams at Saarland University (1993–1999). PhD from Ulm University in 1993 on Silicon Processing. Solid business and technology background in materials, analytics, processing technologies, hardware. Many Awards among which are the Best of Industry 2018 Award, Cowin Award of Entrepreneurship 2014, SPIE Green Photonics Award 2013, and Fraunhofer Award 2007. Inventor. Senator of Economy Europe.
Verena Hartinger. Dipl. Ing. Nanotechnology. She is a fiber laser and frequency comb expert working at Menlo Systems GmbH since 2009 in various roles. She received her diploma from the Julius-Maximilian University in Würzburg with the diploma thesis carried out at the Fraunhofer ISC from 2008 to 2009, where she has investigated specially synthesized ORMOCER® materials by one- and two-photon polymerization and spectroscopically investigated their cross-linking behavior and its correlation to the material’s composition and properties using FTIR and µ-Raman spectroscopy.
Jan J. Klein earned his PhD in Organic Chemistry from the Humboldt-Universität zu Berlin (Germany) in early 2012. Afterwards he joined micro resist technology GmbH as an R&D scientist responsible for the development of new hybrid polymers. In 2014, he has become the product manager for hybrid polymers. Since early 2020 he has been appointed as business unit manager for optical polymers. He is responsible for the product development and marketing as well as for the customer acquisition and technical support.
Martin Herder studied chemistry at Humboldt-Universität zu Berlin (Germany). He joined the group of Prof. Stefan Hecht for research on diarylethene photoswitches and their application in organic electronic devices. After receiving his PhD in 2015, he moved as a Feodor Lynen fellow to Strasbourg (France) for performing post-doctoral research with Prof. Jean-Marie Lehn on shifting dynamic equilibria using light. In 2018, he joined micro resist technology GmbH in Berlin (Germany) as R&D scientist pursuing his research interests at the interface of photo- and materials chemistry with micro- and nanotechnology.
Gabi Grützner graduated in chemistry in Jena (Germany), specializing in physical, surface and glass chemistry. Subsequently, she worked as a research assistant in the development of optoelectronic components at the TV electronics factory in Berlin before becoming an entrepreneur herself: In 1993 she founded micro resist technology GmbH. In her role as the managing director (CEO) she turned the company into an international leader for the development and production of innovative photoresists, (photo)polymers, and ancillaries for micro- and nanostructuring processes. While shaping the entrepreneurial orientation and setting decisive innovation impulses for product and technology developments, she is committed to both the regional economy and scientific committees.
Peter Dannberg. Physicist. Senior researcher at Fraunhofer Institute Applied Optics & Precision Engineering (IOF) since 1993. He has received his PhD from the University of Jena in 1986. He is specialist in microfabrication for free-space and guided wave optics at Jena and Dortmund University. His research activities involve optical polymers and their processing via lithography and replication, especially microlens or microprism arrays, wafer-level generation of complex micro-optical systems, and optical layer`s stacking. His works include characterization as well as stability and compatibility tests. He invented many patents and has won the Fraunhofer Award in 2014.
Acknowledgments
R. Houbertz would like to thank all people who supported part of this work, especially A. Martin and C. Cronauer for preparative works, which were done in the framework of the German Science Foundation Program SPP1327 (grant HO 2475/3-1) project. *Part of the works were done by V. Fodermeyer (now V. Hartinger) at Fraunhofer ISC, Neunerplatz 2, 97082 Würzburg, Germany, during her diploma thesis in 2009 under auspices of R. Houbertz. B. Hecht (Würzburg University) who had accompanied the works is gratefully acknowledged.
Author contributions: All the authors have accepted responsibility for the entire content of this submitted manuscript and approved submission.
Research funding: R. Houbertz would like to thank all people who supported part of this work, especially A. Martin and C. Cronauer for preparative works, which were done in the framework of the German Science Foundation Program SPP1327 (grant HO 2475/3-1) project. *Part of the works were done by V. Fodermeyer (now V. Hartinger) at Fraunhofer ISC, Neunerplatz 2, 97082 Würzburg, Germany.
Conflict of interest statement: The authors declare no conflicts of interest regarding this article.
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Articles in the same Issue
- Frontmatter
- Editorial
- From the publisher Reviewer recognition and publisher’s note 2021
- Community
- News
- Views
- High quality diffractive optical elements (DOEs) using SMILE imprint technique
- Topical Issue: Diffractive Optics; Guest Editor: Reinhard Voelkel
- Editorial
- Diffractive optics
- Review article
- Diamond diffractive optics—recent progress and perspectives
- Research articles
- Narrowband transmission filters based on resonant waveguide gratings and conformal dielectric-plasmonic coatings
- Inverse design of diffractive optical elements using step-transition perturbation approach
- Diffractive optics based automotive lighting system
- Multifunctional materials for lean processing of waferscale optics
- Research article
- Stray light analysis and design optimization of geometrical waveguide
Articles in the same Issue
- Frontmatter
- Editorial
- From the publisher Reviewer recognition and publisher’s note 2021
- Community
- News
- Views
- High quality diffractive optical elements (DOEs) using SMILE imprint technique
- Topical Issue: Diffractive Optics; Guest Editor: Reinhard Voelkel
- Editorial
- Diffractive optics
- Review article
- Diamond diffractive optics—recent progress and perspectives
- Research articles
- Narrowband transmission filters based on resonant waveguide gratings and conformal dielectric-plasmonic coatings
- Inverse design of diffractive optical elements using step-transition perturbation approach
- Diffractive optics based automotive lighting system
- Multifunctional materials for lean processing of waferscale optics
- Research article
- Stray light analysis and design optimization of geometrical waveguide
