Abstract
Nanostructured filter arrays on image sensors are promising for miniature spectrometers and spectral imagers. In this work, we report on resonant waveguide gratings fabricated by UV nanoimprint lithography and conformal dielectric-plasmonic coatings. Optical measurements in accordance with numerical simulations report on a resonance bandwidth of 20 nm in transmission in the visible range. The impact of cladding thickness and filter lateral size on the resonance properties is investigated with the help of numerical calculations. Finally, it is shown that the proposed geometry based on conformal coatings has a very efficient blocking rate compared to other nanostructured filter approaches.
Author contribution: All the authors have accepted responsibility for the entire content of this submitted manuscript and approved submission.
Research funding: None declared.
Conflict of interest statement: The authors declare no conflicts of interest regarding this article.
References
[1] Y. Liu, H. Pu, and D.-W. Sun, “Hyperspectral imaging technique for evaluating food quality and safety during various processes: A review of recent applications,” Trends Food Sci. Technol., vol. 69, pp. 25–35, 2017, https://doi.org/10.1016/j.tifs.2017.08.013.Search in Google Scholar
[2] M. J. Khan, H. S. Khan, A. Yousaf, K. Khurshid, and A. Abbas, “Modern trends in hyperspectral image analysis: a review,” IEEE Access, vol. 6, pp. 14118–14129, 2018. https://doi.org/10.1109/ACCESS.2018.2812999.Search in Google Scholar
[3] D. Goldring, D. Sharon, S. Rosen, et al., “Spectrometry system with visible aiming beam,” WO Patent 2016/125165, Aug. 11, 2016.Search in Google Scholar
[4] B. Geelen, A. Lambrechts, and K. Tack, “Spectral camera with mosaic of filters for each image pixel,” US Patent 9857222, Jan. 2, 2018.Search in Google Scholar
[5] S. Yokogawa, S. P. Burgos, and H. A. Atwater, “Plasmonic color filters for CMOS image sensor applications,” Nano Lett., vol. 12, pp. 4349–4354, 2012, https://doi.org/10.1021/nl302110z.Search in Google Scholar
[6] S. Junger, W. Tschekalinskij, and N. Weber, “Optical bandpass filter system, in particular for multichannel spectral-selective measurements,” WO Patent 2012/007147, Jul. 11, 2011.Search in Google Scholar
[7] B. I. Choi, B. Lee, and M. K. song, “Nano-optic filter array based sensor,” US Patent 2012/0129269, May 24 2012.Search in Google Scholar
[8] G. Quaranta, G. Basset, O. J. F. Martin, and B. Gallinet, “Recent advances in resonant waveguide gratings,” Laser Photonics Rev., vol. 12, p. 1800017, 2018. https://doi.org/10.1002/lpor.201800017.Search in Google Scholar
[9] S. Fan and J. D. Joannopoulos, “Analysis of guided resonances in photonic crystal slabs,” Phys. Rev. B, vol. 65, p. 235112, 2002, https://doi.org/10.1103/physrevb.65.235112.Search in Google Scholar
[10] A. F. Kaplan, T. Xu, and L. J. Guo, “High efficiency resonance-based spectrum filters with tunable transmission bandwidth fabricated using nanoimprint lithography,” Appl. Phys. Lett., vol. 99, p. 143111, 2011, https://doi.org/10.1063/1.3647633.Search in Google Scholar
[11] Y.-T. Yoon, C.-H. Park, and S.-S. Lee, “Highly efficient color filter incorporating a thin metal–dielectric resonant structure,” Appl. Phy. Express, vol. 5, p. 022501, 2012, https://doi.org/10.1143/apex.5.022501.Search in Google Scholar
[12] D. B. Mazulquim, K. J. Lee, J. W. Yoon, et al., “Efficient band-pass color filters enabled by resonant modes and plasmons near the Rayleigh anomaly,” Opt. Express, vol. 22, p. 30843, 2014, https://doi.org/10.1364/oe.22.030843.Search in Google Scholar
[13] J. Wang, Q. Fan, S. Zhang, et al., “Ultra-thin plasmonic color filters incorporating free-standing resonant membrane waveguides with high transmission efficiency,” Appl. Phys. Lett., vol. 110, p.031110, 2017, https://doi.org/10.1063/1.4974455.Search in Google Scholar
[14] C. Bauer and H. Giessen, “Tailoring the plasmonic Fano resonance in metallic photonic crystals,” Nanophotonics, vol. 9, pp. 523–531, 2020, https://doi.org/10.1515/nanoph-2019-0335.Search in Google Scholar
[15] C. Genet, M. P. van Exter, and J. P. Woerdmann, “Fano-type interpretation of red shifts and red tails in hole array transmission spectra,” Opt. Commun., vol. 225, pp. 331–336, 2003, https://doi.org/10.1016/j.optcom.2003.07.037.Search in Google Scholar
[16] M. Sarrazin, J.-P. Vigneron, and J.-M. Vigoureux, “Role of Wood anomalies in optical properties of thin metallic films with a bidimensional array of subwavelength holes,” Phys. Rev. B, vol. 67, p.085415, 2003, https://doi.org/10.1103/physrevb.67.085415.Search in Google Scholar
[17] F. Lütolf, O. J. F. Martin, and B. Gallinet, “Fano-resonant aluminum and gold nanostructures created with a tunable, up-scalable process,” Nanoscale, vol. 7, p. 18179, 2015, https://doi.org/10.1039/c5nr05316a.Search in Google Scholar
[18] P. Lalanne and G. M. Morris, “Highly improved convergence of the coupled-wave method for TM polarization,” J. Opt. Soc. Am. A, vol. 13, pp. 779–784, 1996, https://doi.org/10.1364/josaa.13.000779.Search in Google Scholar
[19] B. Gallinet, T. Siegfried, H. Sigg, P. Nordlander, and O. J. F. Martin, “Plasmonic radiance: Probing structure at the ngström scale with visible light,” Nano Lett., vol. 13, pp. 497–503, 2013, https://doi.org/10.1021/nl303896d.Search in Google Scholar
[20] J. M. Bendickson, E. N. Glytsis, T. K. Gaylord, and D. L. Brundrett, “Guided-mode resonant subwavelength gratings: effects of finite beams and finite gratings,” J. Opt. Soc. Am. A, vol. 18, pp. 1912–1928, 2001, https://doi.org/10.1364/josaa.18.001912.Search in Google Scholar
[21] G. Niederer, H. P. Herzig, J. Shamir, H. Thiele, M. Schnieper, and C. Zschokke, “Tunable, oblique incidence resonant grating filter for telecommunications,” Appl. Opt., vol. 43, pp. 1683–1694, 2004, https://doi.org/10.1364/ao.43.001683.Search in Google Scholar
[22] I. Gyongy, A. Davies, B. Gallinet, et al., “Cylindrical microlensing for enhanced collection efficiency of small pixel SPAD arrays in single-molecule localisation microscopy,” Opt. Express, vol. 26, pp. 2280–2291, 2018, https://doi.org/10.1364/oe.26.002280.Search in Google Scholar
© 2020 Walter de Gruyter GmbH, Berlin/Boston
Articles in the same Issue
- Frontmatter
- Editorial
- From the publisher Reviewer recognition and publisher’s note 2021
- Community
- News
- Views
- High quality diffractive optical elements (DOEs) using SMILE imprint technique
- Topical Issue: Diffractive Optics; Guest Editor: Reinhard Voelkel
- Editorial
- Diffractive optics
- Review article
- Diamond diffractive optics—recent progress and perspectives
- Research articles
- Narrowband transmission filters based on resonant waveguide gratings and conformal dielectric-plasmonic coatings
- Inverse design of diffractive optical elements using step-transition perturbation approach
- Diffractive optics based automotive lighting system
- Multifunctional materials for lean processing of waferscale optics
- Research article
- Stray light analysis and design optimization of geometrical waveguide
Articles in the same Issue
- Frontmatter
- Editorial
- From the publisher Reviewer recognition and publisher’s note 2021
- Community
- News
- Views
- High quality diffractive optical elements (DOEs) using SMILE imprint technique
- Topical Issue: Diffractive Optics; Guest Editor: Reinhard Voelkel
- Editorial
- Diffractive optics
- Review article
- Diamond diffractive optics—recent progress and perspectives
- Research articles
- Narrowband transmission filters based on resonant waveguide gratings and conformal dielectric-plasmonic coatings
- Inverse design of diffractive optical elements using step-transition perturbation approach
- Diffractive optics based automotive lighting system
- Multifunctional materials for lean processing of waferscale optics
- Research article
- Stray light analysis and design optimization of geometrical waveguide