Laser interference ablation by ultrashort UV laser pulses via diffractive beam management
-
Jan-Hendrik Klein-Wiele
Jan-Hendrik Klein-Wiele received his diploma in physics (1997) from the University of Göttingen. During his diploma, he was working at the Max-Planck-Institute for fluid dynamics in the group of Prof. Tönnies, examining ultrafast optical excitations on sodium cluster films. In 1997, he joined Laser-Laboratorium Göttingen, Germany, where he dedicated his research to the fabrication of periodic nanostructures by direct ultrashort pulse laser ablation. His work includes time-resolved studies of the ablation process, the development of sophisticated optical systems for periodic nanostructuring and the industrial and scientific applications of such structures.
Andreas Blumenstein received his B.Sc. in (2011) and M.Sc. in (2013) both in physics from the University of Göttingen. He received his Ph.D. from the University of Kassel in (2019). For his thesis, he worked at the Laser-Laboratorium Göttingen, Germany, investigating ultrashort laser pulse surface nanostructuring and the role of non-equilibrium effects on the energy absorption process. Further research interests are the creation and application of few cycle laser pulses using stretched flexible hollow core fibers.
Peter Simon received his diploma and Ph.D. degrees in Physics from the University of Szeged in 1982 and 1986, respectively. In 1988, he joined the Laser-Laboratorium Göttingen, where he participated in research associated with the generation, amplification and characterization of femtosecond laser pulses and their application for materials processing. In 1992, he was appointed as a group leader of the High Intensity Laser Technology Group and in 2005 as the Head of the Department of Ultrashort Pulse Photonics. Since 2015 he is heading the Department Short Pulses/Nanostructures. The subjects of his current research include the generation and amplification of ultrashort laser pulses, the compression of energetic few-cycle pulses and the submicron-scale surface texturing of technical materials.
Jürgen Ihlemann received his diploma in physics (1984) and Ph.D. in physical chemistry (1987) from the University of Göttingen. From 1984 to 1988, he was with the the Max-Planck-Institute for biophysical chemistry, Göttingen, where he was working on picosecond laser spectroscopy. In 1989, he joined Laser-Laboratorium Göttingen, Germany, where he is now head of the nanostructure technology group. Research interests are UV laser micro- and nanomachining, patterning of surfaces and thin films and ultrashort pulse laser ablation.
Abstract
The fabrication of periodic surface patterns on various materials by ultrashort ultraviolet (UV) laser pulses is reviewed. Laser interference ablation using two or more coherent beams leads to deterministic, strictly periodic patterns. The generation of the interfering beams is accomplished by diffractive optical elements like gratings, grating systems or computer-generated holograms. The recombination of the diffracted beams is performed by optical imaging or diffractive beam management. Ultrashort UV pulses are especially suited for generating micron- to submicron-sized deterministic periodic patterns on metals and semiconductors.
Funding source: Deutsche Forschungsgemeinschaft
Award Identifier / Grant number: IH 17/18-1
Award Identifier / Grant number: IH 17/18-2
Funding statement: The present work was supported by the Deutsche Forschungsgemeinschaft (DFG; grants IH 17/18-1 and IH 17/18-2, Funder Id: http://dx.doi.org/10.13039/501100001659).
About the authors
Jan-Hendrik Klein-Wiele received his diploma in physics (1997) from the University of Göttingen. During his diploma, he was working at the Max-Planck-Institute for fluid dynamics in the group of Prof. Tönnies, examining ultrafast optical excitations on sodium cluster films. In 1997, he joined Laser-Laboratorium Göttingen, Germany, where he dedicated his research to the fabrication of periodic nanostructures by direct ultrashort pulse laser ablation. His work includes time-resolved studies of the ablation process, the development of sophisticated optical systems for periodic nanostructuring and the industrial and scientific applications of such structures.
Andreas Blumenstein received his B.Sc. in (2011) and M.Sc. in (2013) both in physics from the University of Göttingen. He received his Ph.D. from the University of Kassel in (2019). For his thesis, he worked at the Laser-Laboratorium Göttingen, Germany, investigating ultrashort laser pulse surface nanostructuring and the role of non-equilibrium effects on the energy absorption process. Further research interests are the creation and application of few cycle laser pulses using stretched flexible hollow core fibers.
Peter Simon received his diploma and Ph.D. degrees in Physics from the University of Szeged in 1982 and 1986, respectively. In 1988, he joined the Laser-Laboratorium Göttingen, where he participated in research associated with the generation, amplification and characterization of femtosecond laser pulses and their application for materials processing. In 1992, he was appointed as a group leader of the High Intensity Laser Technology Group and in 2005 as the Head of the Department of Ultrashort Pulse Photonics. Since 2015 he is heading the Department Short Pulses/Nanostructures. The subjects of his current research include the generation and amplification of ultrashort laser pulses, the compression of energetic few-cycle pulses and the submicron-scale surface texturing of technical materials.
Jürgen Ihlemann received his diploma in physics (1984) and Ph.D. in physical chemistry (1987) from the University of Göttingen. From 1984 to 1988, he was with the the Max-Planck-Institute for biophysical chemistry, Göttingen, where he was working on picosecond laser spectroscopy. In 1989, he joined Laser-Laboratorium Göttingen, Germany, where he is now head of the nanostructure technology group. Research interests are UV laser micro- and nanomachining, patterning of surfaces and thin films and ultrashort pulse laser ablation.
References
[1] J.-H. Klein-Wiele and P. Simon, Mikroproduktion 04/18, 60 (2018).Suche in Google Scholar
[2] J. Bekesi, J. Kaakkunen, W. Michaeli, F. Klaiber, M. Schoengart, et al., Appl. Phys. A 99, 691 (2010).10.1007/s00339-010-5719-8Suche in Google Scholar
[3] S. Rung, K. Bokan, F. Kleinwort, S. Schwarz, P. Simon, et al., Lubricants 7, 43 (2019).10.3390/lubricants7050043Suche in Google Scholar
[4] L. Müller-Meskamp, Y. H. Kim, T. Roch, S. Hofmann, R. Scholz, et al., Adv. Mater. 24, 906 (2012).10.1002/adma.201104331Suche in Google Scholar
[5] J. Bonse, S. Höhm, S. V. Kirner, A. Rosenfeld and J. Krüger, IEEE J. Sel. Top. Quant. Electron. 23, 9000615 (2017).10.1109/JSTQE.2016.2614183Suche in Google Scholar
[6] K.J. Ilcisin and R. Fedosejevs, Appl. Opt. 26, 396 (1987).10.1364/AO.26.000396Suche in Google Scholar
[7] T. Lippert, T. Gerber, A. Wokaun, D. J. Funk, H. Fukumura, et al., Appl. Phys. Lett. 75, 1018 (1999).10.1063/1.124584Suche in Google Scholar
[8] S. Pissadakis, L. Reekie, M. N. Zervas and J. S. Wilkinson, J. Appl. Phys. 95, 1634 (2004).10.1063/1.1640793Suche in Google Scholar
[9] C. Daniel, F. Mücklich and Z. Liu, Appl. Surf. Sci. 208, 317 (2003).10.1016/S0169-4332(02)01381-8Suche in Google Scholar
[10] S. Beckemper, J. Huang, A. Gillner and K. Wang, J. Laser Micro. Nanoeng. 6, 49 (2011).10.2961/jlmn.2011.01.0011Suche in Google Scholar
[11] J. Huang, S. Beckemper, A. Gillner and K. Wang, J. Micromech. Microeng. 20, 095004 (2010).10.1088/0960-1317/20/9/095004Suche in Google Scholar
[12] P. E. Dyer, R. J. Farley and R. Giedl, Opt. Commun. 115, 327 (1995).10.1016/0030-4018(94)00694-PSuche in Google Scholar
[13] H. M. Phillips and R. A. Sauerbrey, Opt. Eng. 32, 2424 (1993).10.1117/12.155267Suche in Google Scholar
[14] P. E. Dyer, R. J. Farley, R. Giedl and D. M. Karnakis, Appl. Surf. Sci. 96–98, 537 (1996).10.1016/0169-4332(95)00528-5Suche in Google Scholar
[15] M. Mäder, T. Höche, J. W. Gerlach, R. Böhme and B. Rauschenbach, Phys. Stat. Sol. B 247, 1372 (2010).10.1002/pssb.200945522Suche in Google Scholar
[16] R. J. Peláez, C. N. Afonso, J. Bulíř, M. Novotný, J. Lančok, et al., Nanotechnology 24, 095301 (2013).10.1088/0957-4484/24/9/095301Suche in Google Scholar PubMed
[17] J.-H. Klein-Wiele and P. Simon, Appl. Phys. Lett. 83, 4707 (2003).10.1063/1.1631746Suche in Google Scholar
[18] S. Indrišiūnas, B. Voisiat, M. Gedvilas and G. Račiukaitis, J. Micromech. Microeng. 23, 095034 (2013).10.1088/0960-1317/23/9/095034Suche in Google Scholar
[19] J.-H. Klein-Wiele, T. Fricke-Begemann, P. Simon and J. Ihlemann, Opt. Expr. 27, 28902 (2019).10.1364/OE.27.028902Suche in Google Scholar PubMed
[20] J. Bekesi, P. Simon and J. Ihlemann, Appl. Phys. A 114, 69 (2014).10.1007/s00339-013-8083-7Suche in Google Scholar
[21] J. J. J. Kaakkunen, K. Paivasaari and P. Vahimaa, Appl. Phys. A 103, 267 (2011).10.1007/s00339-011-6366-4Suche in Google Scholar
[22] Y. Bourgin, S. Bakkali, Y. Jourlin, S. Tonchev and O. Parriaux, Opt. Lett. 34, 3800 (2009).10.1364/OL.34.003800Suche in Google Scholar PubMed
[23] P. E. Dyer, R. J. Farley, R. Giedl, C. Ragdale and D. Reid, Appl. Phys. Lett. 64, 3389 (1994).10.1063/1.111284Suche in Google Scholar
[24] K. Tsunetomo and T. Koyama, Opt. Lett. 22, 411 (1997).10.1364/OL.22.000411Suche in Google Scholar
[25] B. Borchers, J. Békési, P. Simon and J. Ihlemann, J. Appl. Phys. 107, 063106 (2010).10.1063/1.3331409Suche in Google Scholar
[26] J. Kaakkunen, J. Bekesi, J. Ihlemann and P. Simon, Appl. Phys. A 101, 225 (2010).10.1007/s00339-010-5824-8Suche in Google Scholar
[27] T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis and H. Misawa, Appl. Phys. Lett. 82, 2758 (2003).10.1063/1.1569987Suche in Google Scholar
[28] J. Bekesi, S. Szatmári, P. Simon and G. Marowsky, Appl. Phys. B 75, 521 (2002).10.1007/s00340-002-0988-3Suche in Google Scholar
[29] P. Simon and J. Ihlemann, Appl. Phys. A 63, 505 (1996).10.1007/BF01571681Suche in Google Scholar
[30] P. Simon and J. Ihlemann, Appl. Surf. Sci. 109/110, 25 (1997).10.1016/S0169-4332(96)00615-0Suche in Google Scholar
[31] K. Chen, J. Ihlemann, P. Simon, I. Baumann and W. Sohler, Appl. Phys. A 65, 517 (1997).10.1007/s003390050617Suche in Google Scholar
[32] F. Beinhorn, J. Ihlemann, P. Simon, G. Marowsky, B. Maisenhölder, et al., Appl. Surf. Sci. 138–139, 107 (1999).10.1016/S0169-4332(98)00390-0Suche in Google Scholar
[33] J. Ihlemann, J.-H. Klein-Wiele, J. Békési and P. Simon, J. Phys. Conf. Ser. 59, 449 (2007).10.1088/1742-6596/59/1/096Suche in Google Scholar
[34] G. Zito, B. Piccirillo, E. Santamato, A. Marino, V. Tkachenko, et al., Opt. Expr. 16, 5164 (2008).10.1364/OE.16.005164Suche in Google Scholar
[35] J. Békési, J. Meinertz, J. Ihlemann and P. Simon, Appl. Phys. A 93, 27 (2008).10.1007/s00339-008-4680-2Suche in Google Scholar
[36] A. Yen, E. H. Anderson, R. A. Ghanbari, M. L. Schattenburg and H. I. Smith, Appl. Opt. 31, 4540 (1992).10.1364/AO.31.004540Suche in Google Scholar PubMed
[37] M. Livitziis and S. Pissadakis, Opt. Lett. 33, 1449 (2008).10.1364/OL.33.001449Suche in Google Scholar PubMed
[38] J. Turunen and F. Wyrowski, Diffractive optics for industrial and commercial applications (Akademie Verlag, Berlin, 1997).10.1016/B978-012186030-1/50008-4Suche in Google Scholar
[39] J. Bekesi, D. Schäfer, J. Ihlemann and P. Simon, Proc. SPIE 4977, 235 (2003).10.1117/12.479226Suche in Google Scholar
[40] Z. Xiong, G. D. Peng, B. Wu and P. L. Chu, J. Lightwave Technol. 17, 2361 (1999).10.1109/50.803031Suche in Google Scholar
[41] D. S. Ivanov, V. P. Lipp, A. Blumenstein, F. Kleinwort, V. P. Veiko, et al., Phys. Rev. Appl. 4, 064006 (2015).10.1103/PhysRevApplied.4.064006Suche in Google Scholar
©2020 THOSS Media & De Gruyter, Berlin/Boston
Artikel in diesem Heft
- Cover and Frontmatter
- Community
- Conference Notes
- Topical Issue: Laser Micro- and Nano-Material Processing – Part 1
- Editorial
- Laser micro- and nano-material processing – Part 1
- Review Articles
- Formation of laser-induced periodic surface structures on different materials: fundamentals, properties and applications
- Laser interference ablation by ultrashort UV laser pulses via diffractive beam management
- Direct femtosecond laser surface structuring with complex light beams generated by q-plates
- Research Articles
- Effects of laser processing conditions on wettability and proliferation of Saos-2 cells on CoCrMo alloy surfaces
- Interference-based laser-induced micro-plasma ablation of glass
- Ultrafast laser micro-nano structured superhydrophobic teflon surfaces for enhanced SERS detection via evaporation concentration
- High-quality net shape geometries from additively manufactured parts using closed-loop controlled ablation with ultrashort laser pulses
Artikel in diesem Heft
- Cover and Frontmatter
- Community
- Conference Notes
- Topical Issue: Laser Micro- and Nano-Material Processing – Part 1
- Editorial
- Laser micro- and nano-material processing – Part 1
- Review Articles
- Formation of laser-induced periodic surface structures on different materials: fundamentals, properties and applications
- Laser interference ablation by ultrashort UV laser pulses via diffractive beam management
- Direct femtosecond laser surface structuring with complex light beams generated by q-plates
- Research Articles
- Effects of laser processing conditions on wettability and proliferation of Saos-2 cells on CoCrMo alloy surfaces
- Interference-based laser-induced micro-plasma ablation of glass
- Ultrafast laser micro-nano structured superhydrophobic teflon surfaces for enhanced SERS detection via evaporation concentration
- High-quality net shape geometries from additively manufactured parts using closed-loop controlled ablation with ultrashort laser pulses
