Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement
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Hung-Lin Hsieh
Hung-Lin Hsieh received the BS and MS degrees from the National Changhua University of Education, Taiwan, in 2001 and 2004, and his PhD degrees from the National Central University, Taiwan, and the University of Technology of Troyes, France, in 2011, respectively. He is currently an Assistant Professor of Mechanical Engineering (ME) and a member of the Opto-Mechatronics Technology Center, National Taiwan University of Science and Technology, Taiwan. His current research interests are optical metrology and precision motion control.
Ju-Yi Lee received his Master’s and PhD degrees from the Institute of Electro-Optical Engineering, the National Chiao Tung University of Taiwan in 1995 and 1999, respectively. In 2000, he was a researcher in Industrial Technology Research Institute of Taiwan. In 2004, he joined the Department of Mechanical Engineering, National Central University as an assistant professor, and has been an associate professor since 2008. His research interests are optical metrology and sensors.
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Yu-Che Chung
Yu-Che Chung received his BS degree in the Department of Mechanical Engineering, Chung Yuan Christian University in 2011. He is now working toward a MS degree at the Institute of Mechanical Engineering of National Central University of Taiwan. His current research activity is optical metrology.
Abstract
A wavelength-modulated heterodyne grating shearing interferometry using a birefringent crystal is proposed for two-dimensional displacement measurement. There is a difference in the optical path lengths of the p- and s- polarizations of the light beam in the birefringent crystal because of the double refraction caused by the birefringence. By passing through the unequal-path-length optical configuration, the wavelength-modulated light beam is converted into a heterodyne light beam having two frequencies. The modulated heterodyne light beam is further combined with grating-shearing interferometry based on the quasi-common-optical-path (QCOP) design concept. According to the working principle and the Jones calculation, the displacement information of a moving grating can be obtained by means of the optical phase variation resulting from the grating. Theoretical analysis shows that the measurement sensitivity of the proposed method is about 0.134°/nm. The experimental results indicate that the resolution is about 10 nm for the centimetric-level measurement range.
About the authors
Hung-Lin Hsieh received the BS and MS degrees from the National Changhua University of Education, Taiwan, in 2001 and 2004, and his PhD degrees from the National Central University, Taiwan, and the University of Technology of Troyes, France, in 2011, respectively. He is currently an Assistant Professor of Mechanical Engineering (ME) and a member of the Opto-Mechatronics Technology Center, National Taiwan University of Science and Technology, Taiwan. His current research interests are optical metrology and precision motion control.
Ju-Yi Lee received his Master’s and PhD degrees from the Institute of Electro-Optical Engineering, the National Chiao Tung University of Taiwan in 1995 and 1999, respectively. In 2000, he was a researcher in Industrial Technology Research Institute of Taiwan. In 2004, he joined the Department of Mechanical Engineering, National Central University as an assistant professor, and has been an associate professor since 2008. His research interests are optical metrology and sensors.
Yu-Che Chung received his BS degree in the Department of Mechanical Engineering, Chung Yuan Christian University in 2011. He is now working toward a MS degree at the Institute of Mechanical Engineering of National Central University of Taiwan. His current research activity is optical metrology.
Acknowledgments
This study is supported by the Ministry of Science and Technology, Taiwan, under contract numbers NSC-102-2221-E-011-092 and NSC 100-2221-E-008-074-MY3
Author contributions
H-L H. and J-Y L. designed the optical configuration. H-L H. and Y-C C. set up the experimental system and carried out the experiments. J-Y L. and Y-C C analyzed the acquired data. J-Y L. and H-L H. derived and estimated the error influence. H-L H., J-Y L. and Y-C C. prepared the original manuscript.
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©2014 THOSS Media & De Gruyter
Artikel in diesem Heft
- Cover and Frontmatter
- Community
- News from the European Optical Society
- Conference Notes
- Conference Calendar
- Topical issue: Optical metrology for precision engineering
- Editorial
- Optical metrology for precision engineering
- Review Article
- Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
- Research Articles
- Miniaturization of an interferometric distance sensor employing diffractive optics
- Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement
- Single shot interferometry using a two-interferogram phase shifting algorithm
- Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry
- Fundamental validation for surface texture imaging using a microsphere as a laser-trapping-based microprobe
- Lateral resolution improvement of laser-scanning imaging for nano defects detection
- Letters
- Three-axis vibration measurement by using a grating-interferometric vibrometer
- Fast and accurate deflectometry with crossed fringes
- Review Article
- Material and technology trends in fiber optics
Artikel in diesem Heft
- Cover and Frontmatter
- Community
- News from the European Optical Society
- Conference Notes
- Conference Calendar
- Topical issue: Optical metrology for precision engineering
- Editorial
- Optical metrology for precision engineering
- Review Article
- Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
- Research Articles
- Miniaturization of an interferometric distance sensor employing diffractive optics
- Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement
- Single shot interferometry using a two-interferogram phase shifting algorithm
- Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry
- Fundamental validation for surface texture imaging using a microsphere as a laser-trapping-based microprobe
- Lateral resolution improvement of laser-scanning imaging for nano defects detection
- Letters
- Three-axis vibration measurement by using a grating-interferometric vibrometer
- Fast and accurate deflectometry with crossed fringes
- Review Article
- Material and technology trends in fiber optics
