Three-axis vibration measurement by using a grating-interferometric vibrometer

So Ito; Ryo Aihara; Woo Jae Kim; Yuki Shimizu; Wei Gao

doi:10.1515/aot-2014-0028

Article

Three-axis vibration measurement by using a grating-interferometric vibrometer

So Ito , Ryo Aihara , Woo Jae Kim , Yuki Shimizu and Wei Gao

Published/Copyright: August 6, 2014

Published by

Become an author with De Gruyter Brill

Author Information

From the journal Advanced Optical Technologies Volume 3 Issue 4

Abstract

Three-axis vibration measurement of the linear air-bearing stage demonstrated by utilizing the method of the multi-axis laser interferometer is discussed. In order to detect the X-Y-Z directional vibration of the positioning stage table simultaneously, two-dimensional XY gratings are utilized as the scale grating and the reference grating of the interferometer. The X- and Y-directional positive and negative first-order diffracted beams are superimposed to generate the interference signals on the photodetectors. When the multi-axis vibration is applied to the scale grating, the intensities of the interference signals in X- and Y-directions varied corresponding to the vibration of the scale grating. Consequently, three-axis vibrations of the scale grating can be calculated by processing the X- and Y-directional positive and negative first-order interference signals. In this paper, a three-axis vibrometer based on the grating-interferometer has been developed for measurement of the positioning stage table vibration. The detection method of the vibration based on the Doppler frequency shift has been demonstrated. As an application of the multi-axis grating-interferometric vibrometer, multi-axis vibrations of the linear air-bearing stage are measured by using the developed vibrometer.

Keywords: air-bearing linear stage; grating interferometer; multi-axis measurement; surface encoder; vibrometer

Corresponding author: So Ito, Nano-Metrology and Control Laboratory, Department of Nanomechanics, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi, 980-8579, Japan, e-mail: so.ito@nano.mech.tohoku.ac.jp

References

[1] S. Wakui, Precision Eng. 27, 170–173 (2003).10.1016/S0141-6359(02)00227-1Search in Google Scholar

[2] T. Kunioka, Y. Takeda and T. Matsuda, J. Vac. Sci. Technol. B., 17, 2917–2920 (1999).Search in Google Scholar

[3] S. K. Ro, S. Kim, Y. K. Kwak and H. Park, Precision Eng. 34, 186–194 (2010).Search in Google Scholar

[4] K. Kawashima, T. Arai, K. Tadano, T. Fujita and T. Kagawa, Precision Eng. 34, 556–533 (2010).Search in Google Scholar

[5] J. Mao, H. Tachikawa and A. Shimokohbe, Precision Eng. 27, 32–41 (2003).10.1016/S0141-6359(02)00179-4Search in Google Scholar

[6] W. J. Kim, A. Kimura, K. Hosono, Y. Shimizu and W. Gao, Int. J. Nanomanufacturing 7, 409–426 (2011).10.1504/IJNM.2011.043684Search in Google Scholar

[7] A. Kimura, W. Gao, W. J. Kim, K. Hosono, Y. Shimizu, et al., Precision Eng. 36, 576–585 (2012).10.1016/j.precisioneng.2012.04.005Search in Google Scholar

[8] J. Rafa and C. Ziolkwski, Wave Motion, 45, 178–190 (2008).10.1016/j.wavemoti.2007.05.003Search in Google Scholar

[9] W. Gao, Precision Nanometrology, Springer Series in Advanced Manufacturing, Chapter 4, Grating Encoder for Measurement of In-plane and Out-of-plane Motion, 2010.10.1007/978-1-84996-254-4Search in Google Scholar

[10] X. Li, Y. Shimizu, H. Muto, S. Ito and W. Gao, Key Eng. Mate. 523–524, 913–918 (2012).10.4028/www.scientific.net/KEM.523-524.913Search in Google Scholar

Received: 2014-4-18

Accepted: 2014-7-9

Published Online: 2014-8-6

Published in Print: 2014-8-1

You are currently not able to access this content.

Articles in the same Issue

https://doi.org/10.1515/aot-2014-0028

Keywords for this article

air-bearing linear stage; grating interferometer; multi-axis measurement; surface encoder; vibrometer