Condensed Phase Equilibria in the Mo-Ga-N System at 800 °C
-
Hari S. Venugopalan
Abstract
Phase equilibria were studied in the Mo–Ga–N system at 800 °C in order to better understand the metallurgy of Mo contacts to the wide band gap semiconductor GaN. Liquid Ga metal and the solid phases Mo8Ga41, Mo3Ga, and β-Mo2N were experimentally observed to be in thermodynamic equilibrium with GaN. Equilibrium between γ-Mo2N and GaN can also be inferred. No ternary phases were found in any of the samples examined in this study.
-
This work was supported by DARPA (Anis Husain) through AFOSR grant F49260-95-1-0516. The authors thank D. L. Waltmeyer and V. R. Iyer for assistance with sample preparation.
Literature
1 Morkoc, H.; Mohammad, S. N.: Science 267 (1995) 51–55.10.1126/science.267.5194.51Search in Google Scholar
2 Sands, T: J. Metals 38 (1986) 31–33.Search in Google Scholar
3 Mohney, S. E.; Lin, X.: J. Electron. Mater. 25 (1996) 811–818.10.1007/BF02666641Search in Google Scholar
4 Cole, M. W.; Eckhart, D. W.; Han, W. Y.; Pfeffer, R. L.; Monahan, T: J. Appl. Phys. 80 (1996) 278–281.10.1063/1.362816Search in Google Scholar
5 Trexler, J. T.; Pearton, S. J.; Holloway, P. H.; Mier, M. G.; Evans, R. K.; Karlicek, R. F.: Comparison of Ni/Au, Pd/Au and Cr/Au Metallizations for Ohmic Contacts to p-GaN, in: F. A. Ponce; T. D. Moustakas; I. Akasaki, B. A. Monemar (eds.), III-V Nitrides, Materials Research Society, Pittsburgh (1997).Search in Google Scholar
6 Mohammad, S. N.; Salvador, A. A.; Morkoc, H.: Proc. IEEE 83 (1995) 1306–1354.10.1109/5.469300Search in Google Scholar
7 Mohney, S. E.; McMahon, D. J.; Whitmire, K. A.: Mater. Sci. Engn. B (in press).Search in Google Scholar
8 Cordes, H.; Chang, Y. A.: MIJ NSR 2 (1997) 1–11.Search in Google Scholar
9 Mohney, S. E.; Luther, B. P., Jackson, T. N.; Khan, M. A.: Metallurgical Study of Contacts to Gallium Nitride, in: Ref. [5].Search in Google Scholar
10 Venugopalan, H. S.; Mohney, S. E.; Luther, B. P.; Wolter, S. D.; Redwing, J. M.: J. Appl. Phys. 82 (1997) 650 – 654.10.1063/1.365593Search in Google Scholar
11 Bornand, J. D.; Siemens, R. E.; Oden, L. L.: J. Less-Common Metal 30 (1973) 205– 209.10.1016/0022-5088(73)90106-9Search in Google Scholar
12 Brewer, L.; Lamoreaux, R. H.: IAEA Review Special Issue 7 (1980) 249-251.Search in Google Scholar
13 Beginge, A.; Yvon, K.; Decroux, M.; Muller, J.: J. Less-Common Metal 99 (1984) L27–L31.10.1016/0022-5088(84)90237-6Search in Google Scholar
14 Brewer, L.: Bull. Alloy Phase Diagrams 1 (1980) 82–85.10.1007/BF02881194Search in Google Scholar
15 Jehn, H.; Ettmayer, P.: J. Less-Common Metal 58 (1976) 85–98.10.1016/0022-5088(78)90073-5Search in Google Scholar
16 Evans, D. A.; Jack, K. H.: Acta Cryst. 10 (1957) 833–834.10.1107/S0365110X57001279Search in Google Scholar
17 Hahn, R.; Juga, Z.: Z. Anorg. Chem 239 (1938) 282–287.10.1002/zaac.19382390307Search in Google Scholar
18 Porowski, S.; Grgegory, I.: Phase Diagram of GaN, in: J. H. Edgar (ed.), Properties of Group III-V Nitrides, INSPEC, London (1994).Search in Google Scholar
19 Perlin, P.; Jauberthie-Carillon, C.; Itie, J. P.; San Miguel, A.; Grgegory, I.; Polian, A.: Phys. Rev. B. 45 (1992) 83–89.10.1103/PhysRevB.45.83Search in Google Scholar
20 Samsonov, G. V.; Vinitskii, I. M.: Handbook of Refractory Metal Compounds, IFI/Plenum, New York (1980).10.1007/978-1-4684-6099-5Search in Google Scholar
21 Anitha, V P.; Bhattacharya, A.; Patil, N. G.; Major, S.: Thin Solid Films 236 (1993) 306–310.10.1016/0040-6090(93)90687-KSearch in Google Scholar
© 1998 Carl Hanser Verlag, München
Articles in the same Issue
- Frontmatter
- Aufsätze
- Thermal Analysis of Solid State Amorphization: Predicted and Measured Reaction Enthalpies and Reaction Kinetics
- Precipitation Trends in Highly Alloyed Austenitic Stainless Steels
- Condensed Phase Equilibria in the Mo-Ga-N System at 800 °C
- Interdiffusion in the β Mo–Ti Solid Solution at High Temperatures
- Nitride Phase Equilibria in the Fe–Cr–Mn–N System at 1273 and 1073 K
- The Solubility of Nickel in Sodium Calculated from Corrosion Tests in Flowing Liquid Metal
- Influence of Heterogeneous Dislocation Arrangements on X-ray Diffraction Profiles Measured on Cyclically Deformed Nickel Single Crystals
- Change of Crystal Orientation in Straining and Dislocation Glide Systems
- On the High Temperature Creep Behavior of Two Rapidly Solidified Dispersion Strengthened Al–Fe–V–Si Materials
- Kinetics of Ferrite to Austenite Transformation in a High Strength Low Alloy Steel Containing Nb
- Mechanical Alloying of Zn-rich Zn–Al–Cu Alloys
- Mitteilungen der Deutschen Gesellschaft für Materialkunde e.V.
- Personen
- Terminkalender
Articles in the same Issue
- Frontmatter
- Aufsätze
- Thermal Analysis of Solid State Amorphization: Predicted and Measured Reaction Enthalpies and Reaction Kinetics
- Precipitation Trends in Highly Alloyed Austenitic Stainless Steels
- Condensed Phase Equilibria in the Mo-Ga-N System at 800 °C
- Interdiffusion in the β Mo–Ti Solid Solution at High Temperatures
- Nitride Phase Equilibria in the Fe–Cr–Mn–N System at 1273 and 1073 K
- The Solubility of Nickel in Sodium Calculated from Corrosion Tests in Flowing Liquid Metal
- Influence of Heterogeneous Dislocation Arrangements on X-ray Diffraction Profiles Measured on Cyclically Deformed Nickel Single Crystals
- Change of Crystal Orientation in Straining and Dislocation Glide Systems
- On the High Temperature Creep Behavior of Two Rapidly Solidified Dispersion Strengthened Al–Fe–V–Si Materials
- Kinetics of Ferrite to Austenite Transformation in a High Strength Low Alloy Steel Containing Nb
- Mechanical Alloying of Zn-rich Zn–Al–Cu Alloys
- Mitteilungen der Deutschen Gesellschaft für Materialkunde e.V.
- Personen
- Terminkalender
