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Preparation of 6N grade silicon ingot by combined purification processes from waste silicon cutting sludge

  • Jung-Min Oh , Hyekyoung Kim , Hankwon Chang , Back-Kyu Lee , Hee Dong Jang and Jae-Won Lim
Published/Copyright: September 10, 2015
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Abstract

This study is aimed at fabricating ultrahigh-purity silicon ingots from silicon cutting sludge – a byproduct of the ingot for solar cells cutting process. Firstly, silicon powder from the silicon cutting sludge was recovered by 1st purification, such as ultrasonication, centrifugation, and acid treatment before preparation of the silicon ingots. After the 1st purification, the silicon cutting sludge yielded silicon powder with a purity of 99.7612 %. The 1st-purified silicon powder was subjected to 2nd purification – 3 cycles hydrogen plasma arc melting (HPAM), resulting in ultrahigh-purity silicon ingot with a purity of 99.9999 %. HPAM has been verified to be an effective process for removal of B and P – the major impurities of silicon for semiconductors and solar cells – to levels of total ≤ 0.3 ppm.


These authors contributed equally to this work as the first author.

*Correspondence address, Dr. Hee Dong Jang, Korea Institute of Geoscience and Mineral Resources, 124 Gwahang-no, Yuseong-gu, Daejeon 305-350, Korea, Tel.: +82 42 868 3612, Fax: +82 42 868 3415, E-mail:
** Prof. Jae-Won Lim, Chonbuk National University, 567 Baekje-daero, Deokjin-gu, Jeonju, Jeonbuk 561-756, Korea, Tel.: +82 63 270 2307, Fax: +82 63 270 2305, E-mail:

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Received: 2014-12-11
Accepted: 2015-05-13
Published Online: 2015-09-10
Published in Print: 2015-09-15

© 2015, Carl Hanser Verlag, München

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