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Atom probe tomography: from physical metallurgy towards microelectronics

Dedicated to Prof. Dr.-Ing. Heinrich Wollenberger on the occasion of his 80th birthday
  • Didier Blavette , Sébastien Duguay und Philippe Pareige
Veröffentlicht/Copyright: 18. Mai 2013
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International Journal of Materials Research
Aus der Zeitschrift International Journal of Materials Research Band 102 Heft 9

Abstract

Atom probe tomography (APT) is the only approach able to map out the 3D distribution of chemical species in a material at the atomic-scale. It has been applied to a number of issues in physical metallurgy including precipitation, segregation of impurities to lattice defects, ordering, magnetic multilayers. The implementation of ultrafast laser pulses instead of high-voltage pulses to field evaporate surface atoms has been a major breakthrough as this opened APT to semi-conductors or oxides that are key materials in microelectronics. This article reviews some of the more recent salient findings in physical metallurgy and microelectronics materials using APT. Special attention is paid to the role played by APT in the elucidation of irradiation-induced segregation effects. The following section deals with the segregation of dopants to crystal defects in silicon, a phenomenon that has a considerable influence on properties and performance of latest generation nano-transistors and devices.

Keywords: Precipitation; Irradiation; Microelectronics; Dopants; Atom-probe
∗ Correspondence address, Prof. Didier Blavette, University of Rouen, Groupe de Physique des Matériaux, UMR CNRS 6634, ESP CARNOT Institute, BP12, 76801 St Etienne du Rouvray Cedex, France, Tel.: +33 232 955 032, Fax: +33 232 955 035, E-mail:

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Received: 2011-1-26
Accepted: 2011-7-6
Published Online: 2013-05-18
Published in Print: 2011-09-01

© 2011, Carl Hanser Verlag, München

Artikel in diesem Heft

  1. Contents
  2. Contents
  3. Editorial
  4. Prof. Dr.-Ing. Heinrich Wollenberger — 80 years
  5. Original Contributions
  6. Atom probe tomography: from physical metallurgy towards microelectronics
  7. Accumulation of radiation damage and disordering in MgAl2O4 under swift heavy ion irradiation
  8. TEM study of irradiation induced copper precipitation in boron alloyed EUROFER97 steel
  9. Order – disorder transformation in Ni – V alloys under electron irradiation
  10. Materials issues of the SINQ high-power spallation target
  11. The origin and development of the P{011}<111> orientation during recrystallization of particle-containing alloys
  12. Coarsening kinetics of Cu-rich precipitates in a concentrated multicomponent Fe–Cu based steel
  13. Beyond Ni-based superalloys: Development of CoRe-based alloys for gas turbine applications at very high temperatures
  14. The effect of heat treatments on the microstructure, texture and mechanical properties of the extruded magnesium alloy ME21
  15. Analysing SANS data to determine magnetisation reversal processes in composite perpendicular magnetic recording media using TEM images
  16. Dislocationless sliding in a polycluster glass
  17. Evolution of transformation plasticity during bainitic transformation
  18. Surface tension and viscosity of NiAl catalytic precursor alloys from microgravity experiments
  19. Synthesis of carbon nanotubes by fine Ni particles in Ni3Al foam
  20. Fabrication of dielectric thin films by sputtering deposition at different pressures with (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 ceramic as target
  21. DGM News
  22. DGM News
https://doi.org/10.3139/146.110561
Schlagwörter für diesen Artikel
Precipitation; Irradiation; Microelectronics; Dopants; Atom-probe

Artikel in diesem Heft

  1. Contents
  2. Contents
  3. Editorial
  4. Prof. Dr.-Ing. Heinrich Wollenberger — 80 years
  5. Original Contributions
  6. Atom probe tomography: from physical metallurgy towards microelectronics
  7. Accumulation of radiation damage and disordering in MgAl2O4 under swift heavy ion irradiation
  8. TEM study of irradiation induced copper precipitation in boron alloyed EUROFER97 steel
  9. Order – disorder transformation in Ni – V alloys under electron irradiation
  10. Materials issues of the SINQ high-power spallation target
  11. The origin and development of the P{011}<111> orientation during recrystallization of particle-containing alloys
  12. Coarsening kinetics of Cu-rich precipitates in a concentrated multicomponent Fe–Cu based steel
  13. Beyond Ni-based superalloys: Development of CoRe-based alloys for gas turbine applications at very high temperatures
  14. The effect of heat treatments on the microstructure, texture and mechanical properties of the extruded magnesium alloy ME21
  15. Analysing SANS data to determine magnetisation reversal processes in composite perpendicular magnetic recording media using TEM images
  16. Dislocationless sliding in a polycluster glass
  17. Evolution of transformation plasticity during bainitic transformation
  18. Surface tension and viscosity of NiAl catalytic precursor alloys from microgravity experiments
  19. Synthesis of carbon nanotubes by fine Ni particles in Ni3Al foam
  20. Fabrication of dielectric thin films by sputtering deposition at different pressures with (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 ceramic as target
  21. DGM News
  22. DGM News
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