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Comparison of Depth-Sensing Indentation at Ultramicroscopic Contacts by Single- and Multiple-Partial-Unload Cycles

  • Maissarath Nassirou and Jeremy Thurn
Published/Copyright: June 11, 2013
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 100 Issue 5

Abstract

Thin films typically exhibit variations in modulus and hardness with increasing indentation depth during depth-sensing indentation experiments at ultramicroscopic contacts (“nanoindentation”) because the measured stiffness response is affected by the substrate. There are three techniques commonly used to sample this variation in properties with depth: multiple indentations with increasing peak load, a single indentation with multiple-partial-unload cycles, and continuous stiffness measurement during a single indentation event. Experiments using the first two options were performed on a series of thin film systems and the method of multiple-partial-unloading found to have significant drawbacks when used at the sub-micron length scale that lead to erroneous conclusions.

Keywords: Elastic properties; Thin film; Hardness
* Correspondence address, Jeremy Thurn, Staff Engineer, Mailstop NRN191, 7801 Computer Ave S., Bloomington, MN 55435 USA, Tel.: +1 952 402 7384, Fax: +1 952 402 7170, E-mail:

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Received: 2008-3-29
Accepted: 2009-2-18
Published Online: 2013-06-11
Published in Print: 2009-05-01

© 2009, Carl Hanser Verlag, München

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https://doi.org/10.3139/146.110084
Keywords for this article
Elastic properties; Thin film; Hardness

Articles in the same Issue

  1. Contents
  2. Contents
  3. Feature
  4. Nd–Fe–B permanent magnets a quarter century later: implications for patentability
  5. Micromagnetism of advanced hard magnetic materials
  6. Magnetism of nanostructured materials for advanced magnetic recording
  7. Basic
  8. A Study of the Al–Mg–B Ternary Phase Diagram
  9. Effects of Lanthanum on Magnetic Behavior and Hardness of Electroless Ni–Fe–P Deposits
  10. Interfacial Reactions between Lead-Free Solders and the Multilayer Au/Ni/SUS304 Substrate
  11. Melting Behavior of Sn–Bi Alloy Powder Compacts Observed Using Optical Dilatometry
  12. High-Strength Mg-Based Bulk Metallic Glass Composites with Remarkable Plasticity
  13. Determination of Liquidus Temperature in Sn–Ti–Zr Alloys by Viscosity, Electrical Conductivity and XRD Measurements
  14. The coupled FEM analysis of super-high angular speed polishing of diamond films
  15. Applied
  16. Comparison of Depth-Sensing Indentation at Ultramicroscopic Contacts by Single- and Multiple-Partial-Unload Cycles
  17. Sintering Behavior of ZnO: Mn Ceramics Fabricated from Sol-Gel Derived Nanocrystalline powders
  18. Suitability of Maraging Steel Weld Cladding for Repair of Die-Casting Tooling
  19. Enhanced properties of functionally graded Cu–Cr powder compacts
  20. Influence of Cr on the microstructure and mechanical properties of Ti–Si Eutectic Alloys
  21. Notifications
  22. DGM News
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