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Methods for thin foil thickness determination by using alpha spectroscopy

  • L. C. Hao , M. V. Nhon and C. V. Tao
Published/Copyright: April 25, 2013
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Abstract

In both, industry and scientific research, there is a demand for the determination of material thicknesses. In this work, two methods are described which are very simple, fast, effective and low-cost to determine the exactly thickness of thin foils (μm). Both methods are based on the energy loss of alpha particles when passing through the foil and the detection by high energy resolution alpha spectroscopy. The strengths and weakness of the two methods are discussed.

Kurzfassung

Sowohl in der Industrie wie auch in der Forschung gibt es einen Bedarf für die Bestimmung von Materialdicken. In der vorliegenden Arbeit werden zwei Methoden zur exakten Bestimmung der Dicke dünner Folien (μm) beschrieben, die einfach, schnell und effektiv sind und wenig kosten. Beide Methoden basieren auf dem Energieverlust von Alpha-Teilchen beim Durchgang durch eine Folie und den Nachweis mit Hilfe der Alpha-Spektroskopie mit hoher Energieauflösung. Die Stärken und Schwächen der beiden Methoden werden diskutiert.


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References

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Received: 2009-8-31
Published Online: 2013-04-25
Published in Print: 2010-04-01

© 2010, Carl Hanser Verlag, München

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