Effects of substrate bias on the properties of TiCrN films deposited on 316L by RF magnetron sputtering
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Noureddine Madaoui
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Mourad Azibi
Abstract
TiCrN films were deposited on stainless steel 316L using a 13.56 MHz RF magnetron sputtering system with a titanium–chromium target and Ar-N2 gas mixture. The objective of this study was to investigate the influence of substrate bias, ranging from 0 V to −100 V, on the resulting film properties. The films were analysed using grazing incidence X-ray diffraction (GIXRD), nanoindentation, Raman spectroscopy, and potentiodynamic polarization tests to assess their properties. XRD results show that all structures of the films are crystalline and changed with varying bias voltage. The hardness significantly increased from 17.4 to 19.6 GPa when the bias voltage was increased from 0 to −25 V, followed by a slight decrease to 17.4 GPa at −75 V and as further decrease to 13 GPa at −100 V. The best corrosion current density of the film deposited at 0 V was 2.32 nA/cm2, which is about 27 times less than that of the uncoated steel 63.015 nA/cm2.
Funding source: Center for Development of Advanced Technologies (CDTA)
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Research ethics: Not applicable.
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Informed consent: Not applicable.
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Author contributions: The author has accepted responsibility for the entire content of this manuscript and approved its submission.
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Use of Large Language Models, AI and Machine Learning Tools: None declared.
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Conflict of interest: All other authors state no conflict of interest.
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Research funding: This work was supported by the Center for Development of Advanced Technologies (CDTA).
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Data availability: None declared.
References
[1] R. Hou, S. Lu, S. Chen, W. Dou, and G. Liu, “The corrosion of 316L stainless steel induced by methanocossus mariplaudis through indirect electron transfer in seawater,” Bioelectrochemistry, vol. 149, 2023, Art. no. 108310. https://doi.org/10.1016/j.bioelechem.2022.108310.Suche in Google Scholar PubMed
[2] Y. He, J. Liu, S. Zhang, Y. Li, and X. Gao, “Effect of heat treatment on the microstructure and corrosion resistance of 316L stainless steel fabricated by hybrid in-situ rolled wire-arc additive manufacturing,” Mater. Lett., vol. 331, 2023, Art. no. 133398. https://doi.org/10.1016/j.matlet.2022.133398.Suche in Google Scholar
[3] M. Alahiane, et al.., “Corrosion inhibition of SS 316L by organic compounds: experimental, molecular dynamics, and conceptualization of molecules–surface bonding in H2SO4 solution,” Appl. Surf. Sci., vol. 612, 2023, Art. no. 155755. https://doi.org/10.1016/j.apsusc.2022.155755.Suche in Google Scholar
[4] Y. A. Albrimi, A. Eddib, J. Douch, Y. Berghoute, M. Hamdani, and R. Souto, “Electrochemical behaviour of AISI 316 austenitic stainless steel in acidic media containing chloride ions,” Int. J. Electrochem. Sci., vol. 6, no. 10, pp. 4614–4627, 2011. https://doi.org/10.1016/s1452-3981(23)18352-0.Suche in Google Scholar
[5] B. Hou, et al.., “The cost of corrosion in China,” npj Mater. Degrad., vol. 1, p. 4, 2017. https://doi.org/10.1038/s41529-017-0005-2.Suche in Google Scholar
[6] F. Zhang, S. Yan, F. Yin, and J. He, “Microstructures and mechanical properties of TiCrN/AlTiCr based coatings prepared by plasma nitriding 5083 Al alloys co-deposited with TiCr films,” Vacuum, vol. 157, pp. 115–123, 2018. https://doi.org/10.1016/j.vacuum.2018.08.039.Suche in Google Scholar
[7] R. Raghav, A. Kumar, and R. S. Mulik, “Comparison of CrN and CrTiN hard coatings developed on SiAlON tool inserts via magnetron sputtering process,” J. Mater. Eng. Perform., pp. 1–16, 2023. https://doi.org/10.1007/s11665-023-08591-0.Suche in Google Scholar
[8] A. Kehal, N. Saoula, and C. Nouveau, “Effect of Ar/N2 flow ratio on the microstructure and mechanical properties of Ti-Cr-N coatings deposited by DC magnetron sputtering on AISI D2 tool steels,” Surf. Coat. Technol., vol. 421, 2021, Art. no. 127444. https://doi.org/10.1016/j.surfcoat.2021.127444.Suche in Google Scholar
[9] V. Vasyliev, et al.., “Structure and properties of nitride coatings based on Ti and Cr synthesized by PIII&D technique,” in Microstructure and Properties of Micro-and Nanoscale Materials, Films, and Coatings (NAP 2019) Selected Articles from the International Conference on Nanomaterials: Applications and Properties, (NAP 2019), 2020, pp. 91–104.10.1007/978-981-15-1742-6_10Suche in Google Scholar
[10] D. Kazlauskas, G. Keturakis, V. Jankauskas, and A. Andriušis, “Investigation of TiCrN-coated high speed steel tools wear during medium density fiberboard milling,” J. Friction Wear, vol. 42, pp. 124–129, 2021. https://doi.org/10.3103/s1068366621020057.Suche in Google Scholar
[11] A. Meysami, R. A. Najafabadi, T. Yosefnejad, and T. Isfahani, “Enhancing wear behavior and hardness of D5 Cold work tool steel through TiCrN multilayer nanocoating via physical vapor deposition,” Surf. Eng. Appl. Electrochem., vol. 60, pp. 58–68, 2024. https://doi.org/10.3103/s1068375524010113.Suche in Google Scholar
[12] V. Prabakaran and K. Chandrasekaran, “Characterisation and corrosion resistance of TiCrN composite coating on steel by physical vapour deposition method,” J. Bio- Tribo-Corros., vol. 2, p. 25, 2016. https://doi.org/10.1007/s40735-016-0055-y.Suche in Google Scholar
[13] M. Azibi, N. Madaoui, N. Saoula, B. Idir, S. Sam, and M. R. Khelladi, “Tailoring Zr-N thin film characteristics on Ti-6Al-4 V alloy: effect of nitrogen and bias voltage,” Braz. J. Phys., vol. 54, p. 90, 2024. https://doi.org/10.1007/s13538-024-01458-2.Suche in Google Scholar
[14] F. O. Kolawole, et al.., “Fracture toughness of duplex CrN/DLC and nano-multilayer DLC-W deposited on valve tappet via hybrid PVD and PECVD,” Sādhanā, vol. 49, p. 127, 2024. https://doi.org/10.1007/s12046-024-02490-3.Suche in Google Scholar
[15] W. C. Oliver and G. M. Pharr, “An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,” J. Mater. Res., vol. 7, pp. 1564–1583, 1992. https://doi.org/10.1557/jmr.1992.1564.Suche in Google Scholar
[16] X.-J. Chen, V. V. Struzhkin, S. Kung, H.-k. Mao, R. J. Hemley, and A. N. Christensen, “Pressure-induced phonon frequency shifts in transition-metal nitrides,” Phys. Rev. B, vol. 70, 2004, Art. no. 014501. https://doi.org/10.1103/physrevb.70.014501.Suche in Google Scholar
[17] A. Kosari Mehr, R. Babaei, A. K. Mehr, and M. R. Zamani Meymian, “Raman and ultraviolet–visible spectroscopy of titanium chromium nitride thin films,” Surf. Eng., vol. 37, no. 2, pp. 148–153, 2021. https://doi.org/10.1080/02670844.2020.1746493.Suche in Google Scholar
[18] M. S. Kabir, P. Munroe, Z. Zhou, and Z. Xie, “Structure and mechanical properties of graded Cr/CrN/CrTiN coatings synthesized by close field unbalanced magnetron sputtering,” Surf. Coat. Technol., vol. 309, pp. 779–789, 2017. https://doi.org/10.1016/j.surfcoat.2016.10.087.Suche in Google Scholar
[19] K. Valleti, P. Miryalkar, and R. L. Rama Krishna, “Efficacy of TiCrN/DLC coatings for service life enhancement of stamping dies,” Vacuum, vol. 217, 2023, Art. no. 112534. https://doi.org/10.1016/j.vacuum.2023.112534.Suche in Google Scholar
[20] S. Kumar, S. R. Maity, and L. Patnaik, “Effect of surface modification on the nanomechanical and wear properties of AISI D3 cold work tool steel,” in Recent Advancements in Mechanical Engineering, Singapore, 2023, pp. 105–113.10.1007/978-981-19-3266-3_9Suche in Google Scholar
[21] T. Li, H. Zhang, Y. Wang, C. Wu, Y. Yan, and Y. Chen, “TiCr transition layer promoting the growth of high-stability TiCrN coating for titanium bipolar plate,” Surf. Coat. Technol., vol. 451, p. 2022/12/15, 2022, Art. no. 129026. https://doi.org/10.1016/j.surfcoat.2022.129026.Suche in Google Scholar
[22] N. Madaoui, L. Bait, K. Kheyar, and N. Saoula, “Effect of argon‐oxygen mixing gas during magnetron sputtering on TiO2 coatings,” Adv. Mater. Sci. Eng., vol. 2017, 2017, Art. no. 4926543. https://doi.org/10.1155/2017/4926543.Suche in Google Scholar
[23] J. Vetter, W. Burgmer, H. G. Dederichs, and A. J. Perry, “The architecture and performance of multilayer and compositionally gradient coatings made by cathodic arc evaporation,” Surf. Coat. Technol., vol. 61, nos. 1–3, pp. 209–214, 1993. https://doi.org/10.1016/0257-8972(93)90227-f.Suche in Google Scholar
[24] P. Hones, R. Sanjinés, and F. Lévy, “Sputter deposited chromium nitride based ternary compounds for hard coatings,” Thin Solid Films, vol. 332, nos. 1–2, pp. 240–246, 1998. https://doi.org/10.1016/s0040-6090(98)00992-4.Suche in Google Scholar
[25] S. Zhang, D. Sun, Y. Fu, and H. Du, “Recent advances of superhard nanocomposite coatings: a review,” Surf. Coat. Technol., vol. 167, nos. 2–3, pp. 113–119, 2003. https://doi.org/10.1016/s0257-8972(02)00903-9.Suche in Google Scholar
[26] P. C. Wo, P. R. Munroe, Z.-T. Jiang, Z. Zhou, K. Y. Li, and Z. Xie, “Enhancing toughness of CrN coatings by Ni addition for safety-critical applications,” Mater. Sci. Eng.: A, vol. 596, pp. 264–274, 2014. https://doi.org/10.1016/j.msea.2013.12.064.Suche in Google Scholar
[27] H. Zegtouf, et al.., “A study of properties of ZrO thin films deposited by magnetron sputtering under different plasma parameters: biomedical application,” J. Electr. Eng., vol. 70, pp. 117–121, 2019. https://doi.org/10.2478/jee-2019-0052.Suche in Google Scholar
[28] M. Ji, Y.-H. Choa, and Y.-I. Lee, “One-step synthesis of black TiO2-x microspheres by ultrasonic spray pyrolysis process and their visible-light-driven photocatalytic activities,” Ultrason. Sonochem., vol. 74, 2021, Art. no. 105557. https://doi.org/10.1016/j.ultsonch.2021.105557.Suche in Google Scholar PubMed PubMed Central
[29] N. Madaoui, N. Saoula, L. Zougar, I. Djabrouhou, S. Sali, and S. Kermadi, “Effect of TiO2 coating thickness on the structure, mechanical properties, and corrosion behavior of AISI 304L stainless steel,” J. Mater. Eng. Perform., vol. 32, pp. 895–908, 2023. https://doi.org/10.1007/s11665-022-07144-1.Suche in Google Scholar
[30] J. Ni, et al.., “3D-printed Ti6Al4V femoral component of knee: improvements in wear and biological properties by AIP TiN and TiCrN coating,” J. Mater. Res. Technol., vol. 14, pp. 2322–2332, 2021. https://doi.org/10.1016/j.jmrt.2021.07.143.Suche in Google Scholar
[31] V. A. Thampi, A. Bendavid, and B. Subramanian, “Nanostructured TiCrN thin films by Pulsed Magnetron Sputtering for cutting tool applications,” Ceram. Int., vol. 42, no. 8, pp. 9940–9948, 2016. https://doi.org/10.1016/j.ceramint.2016.03.095.Suche in Google Scholar
[32] C. H. Hsu, C. K. Lin, K. H. Huang, and K. L. Ou, “Improvement on hardness and corrosion resistance of ferritic stainless steel via PVD-(Ti,Cr)N coatings,” Surf. Coat. Technol., vol. 231, pp. 380–384, 2013. https://doi.org/10.1016/j.surfcoat.2012.05.095.Suche in Google Scholar
[33] Z. A. Ait-Djafer, N. Saoula, D. Wamwangi, N. Madaoui, and H. Aknouche, “Bias voltage effect on magnetron sputtered titanium aluminum nitride TiAlN thin films properties,” Eur. Phys. J.: Appl. Phys., vol. 86, 2019, Art. no. 30301. https://doi.org/10.1051/epjap/2019180344.Suche in Google Scholar
[34] N. Madaoui, M. Azibi, I. Djabrouhou, and N. Saoula, “Effect of deposition time on properties of the ZnO by USD Method,” Rev. Mex. Fis., vol. 70, no. 3, pp. 031001 1–13, 2024. https://doi.org/10.31349/revmexfis.70.031001.Suche in Google Scholar
[35] N. Madaoui, et al.., “The effect of substrate bias voltage on the electrochemical corrosion behaviors of thin film deposited on stainless steel by r. f magnetron sputtering,” Prot. Met. Phys. Chem. Surf., vol. 53, pp. 527–533, 2017. https://doi.org/10.1134/s2070205117030157.Suche in Google Scholar
[36] W. Peng, et al.., “Electrochemical corrosion behavior of high strength steel in simulated deep-sea environment under different hydrostatic pressure,” J. Mater. Res. Technol., vol. 23, pp. 2301–2316, 2023. https://doi.org/10.1016/j.jmrt.2023.01.130.Suche in Google Scholar
© 2025 Walter de Gruyter GmbH, Berlin/Boston
Artikel in diesem Heft
- Frontmatter
- Atomic, Molecular & Optical Physics
- Artificial intelligence assisted photonic bio sensing for rapid bacterial diseases
- A compact analytical solution of the Dicke superradiance master equation via residue calculus
- Chemical Physics
- Extremal linear triangular chains with respect to the Kirchhoff index
- Hydrodynamics & Plasma Physics
- Heat and mass transfer enhancement for MHD nanofluid coupled to elastic interface
- Effect of Combined Kappa–Cairns distributed electrons on ion-acoustic solitary structures in electron–ion dusty plasma
- The solitary periodic soliton and formation of shock with phase shift in multi-component unmagnetized dusty plasmas
- Study of propagation dynamics of intense Laguerre–Gaussian laser beam in preformed plasma channel created by ignitor–heater method
- Solid State Physics & Materials Science
- Effects of substrate bias on the properties of TiCrN films deposited on 316L by RF magnetron sputtering
- Generalized Debye scattering formula for strained amorphous materials
Artikel in diesem Heft
- Frontmatter
- Atomic, Molecular & Optical Physics
- Artificial intelligence assisted photonic bio sensing for rapid bacterial diseases
- A compact analytical solution of the Dicke superradiance master equation via residue calculus
- Chemical Physics
- Extremal linear triangular chains with respect to the Kirchhoff index
- Hydrodynamics & Plasma Physics
- Heat and mass transfer enhancement for MHD nanofluid coupled to elastic interface
- Effect of Combined Kappa–Cairns distributed electrons on ion-acoustic solitary structures in electron–ion dusty plasma
- The solitary periodic soliton and formation of shock with phase shift in multi-component unmagnetized dusty plasmas
- Study of propagation dynamics of intense Laguerre–Gaussian laser beam in preformed plasma channel created by ignitor–heater method
- Solid State Physics & Materials Science
- Effects of substrate bias on the properties of TiCrN films deposited on 316L by RF magnetron sputtering
- Generalized Debye scattering formula for strained amorphous materials
