Crystal orientation and residual stress in TiN film by synchrotron radiation
-
Takao Hanabusa
,
Kazuya Kusaka
Abstract
The residual stress in a TiN film, the thickness of which is less than 1 µm, deposited by arc ion plating was measured using the SPring-8 synchrotron radiation facility installed at Japan Synchrotron Radiation Research Institute (JASRI). Films thicker than 300 nm have a {111} texture, whereas those with a thickness of 100 nm have a relatively random orientation. Instead of the conventional laboratory X-ray equipment, ultrabright synchrotron radiation can be used to precisely measure the residual stress in thin films with a thickness of 100 to 800 nm. The residual stress in thicker TiN films is about 7 GPa in compression and it is not affected by the film thickness. The slightly small compressive stress in a film of 100 nm in thickness may be due to the different crystal orientations in the film.
Dedicated to Professor Dr. Otmar Vöhringer on the occasion of his 65th birthday
The authors would like to thank Dr. Harutaka Koike of the Japan Synchrotron Radiation Research Institute (JASRI) for his helpful support. The synchrotron radiation experiments were performed using the SPring-8 with the approval of the JASRI (Proposal No. 2002A 0258-ND1-np).
References
[1] T. Matsue, T. Hanabusa, Y. Ikeuch: Mater. Sci. Res. Int. 5 (1999) 45.10.2472/jsms.48.3Appendix_45Search in Google Scholar
[2] Y. Miki, T. Taniguchi, T. Hanabusa, K. Kusaka, T. Matsue: Mater. Sci. Res. Int. 6 (2000) 243.10.2472/jsms.49.12Appendix_243Search in Google Scholar
[3] M.H. Staia, B. Lewis, J. Cawley, T. Hudson: Surf. Coat. Technol. 76/77 (1995) 231.10.1016/0257-8972(95)02527-8Search in Google Scholar
[4] H. Uchida, S. Inoue, Y. Nakano, K. Koterazawa: Mater. Sci. Res. Int. 5 (1999) 265.10.2472/jsms.48.12Appendix_265Search in Google Scholar
[5] I.J. Smith, D. Gillibrand, J.S. Brooks, W.-D. Münz, S. Hervey, R. Goodwin: Surf. Coat. Technol. 90 (1997) 164.10.1016/S0257-8972(96)03113-1Search in Google Scholar
[6] O. Knotek, F. Löffler, B. Bosserhoff: Surf. Coat. Technol. 62 (1993) 630.10.1016/0257-8972(93)90310-KSearch in Google Scholar
[7] O. Sakata, Y. Furukawa, S. Goto, T. Mochizuki, T. Uruga, K. Takeshita, H. Ohashi, T. Ohata, T. Matsushita, S. Takahashi, H. Tajiri, T. Ishikawa, M. Nakamura, M. Ito, K. Sumitani, T. Takahashi, T. Shimura, A. Saito, M. Takahashi: Surf. Rev. Lett. (in press).Search in Google Scholar
[8] T. Hanabusa: Mater. Sci. Res. Int. 5 (1999) 63.10.2472/jsms.48.6Appendix_63Search in Google Scholar
[9] K. Yamamoto, T. Sato, E. Iwamura: J. Surf. Finish. Soc. Japan 50 (1999) 52 [in Japanese].10.4139/sfj.50.52Search in Google Scholar
[10] JSMS Committee on X-ray Study of Mechanical Behavior of Materials, Standard of X-ray Stress Measurement Method, The Society of Materials Science, Japan (1997) 12.Search in Google Scholar
[11] E. Macherauch, P. Müller: Z. angew. Phys. 13 (1961) 305.Search in Google Scholar
© 2003 Carl Hanser Verlag, München
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- Notifications/Mitteilungen
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Articles in the same Issue
- Frontmatter
- Articles/Aufsätze
- Bedeutung von Eigenspannungsabbau und mikrostrukturellen Veränderungen für die Lebensdauervorhersage schwingbeanspruchter Schweißverbindungen
- Factors affecting cyclic lifetime of EB-PVD thermal barrier coatings with various bond coats
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- Strength and ductility of thin Cu wires
- Modeling of deformation behavior of copper under equal channel angular pressing
- Reaktionssintern von AlMg–MgO zur Herstellung von Bauteilen auf Spinellbasis
- Determination of the local oxygen distribution in a commercial titanium alloy by 3-dimensional atom probe
- Phase diagram of the Al–Cu–Fe quasicrystal-forming alloy system
- Notifications/Mitteilungen
- Personal/Personelles
- Books/Bücher
- Conferences/Konferenzen
