Home Depth-resolved X-ray residual stress analysis in PVD (Ti, Cr) N hard coatings
Article
Licensed
Unlicensed Requires Authentication

Depth-resolved X-ray residual stress analysis in PVD (Ti, Cr) N hard coatings

  • Christoph Genzel EMAIL logo and Walter Reimers
Published/Copyright: February 16, 2022
Become an author with De Gruyter Brill
Author Information
International Journal of Materials Research
From the journal International Journal of Materials Research Volume 94 Issue 6

Abstract

Physical vapour deposition (PVD) of thin hard coatings on TiN basis is usually performed at rather low temperatures (TD < 500 °C) far from thermal equilibrium, which leads to high intrinsic residual stresses in the growing film. In contrast to the extrinsic thermal residual stresses which can easily be estimated from the difference of the coefficients of thermal expansion between the substrate and the coating, a theoretical prediction of the intrinsic residual stresses is difficult, because their amount as well as their distribution within the film depend in a very complex way on the deposition kinetics. By the example of strongly fibre-textured PVD (Ti, Cr)N coatings which have been prepared under defined variation of the deposition parameters in order to adjust the residual stress distribution within the coatings, the paper compares different X-ray diffraction techniques with respect to their applicability for detecting residual stresses which are non-uniform over the coating thickness.

Abstract

Die physikalische Gasphasenabscheidung (PVD) von dünnen Hartstoffschichten auf TiN- Basis erfolgt üblicherweise bei vergleichsweise niedrigen Temperaturen (TD < 500 °C) fernab vom thermischen Gleichgewicht und führt damit zu hohen intrinsischen Eigenspannungen in der wachsenden Schicht. Im Gegensatz zu den extrinsischen thermischen Eigenspannungen, die sich in einfacher Weise aus der Differenz der thermischen Ausdehnungskoeffizienten von Schicht und Substrat abschätzen lassen, gestaltet sich eine theoretische Voraussage der intrinsischen Eigenspannungsanteile schwierig, da sie sowohl hinsichtlich ihrer Höhe als auch ihrer Verteilung in der Schicht in komplexer Weise von der Wachstumskinetik abhängen. Am Beispiel von PVD-(Ti, Cr)N-Schichten mit starker Fasertextur, bei denen die Abscheidebedingungen gezielt variiert wurden, um die Eigenspannungsverteilung innerhalb der Schicht definiert einzustellen, werden verschiedene röntgenographische Messtechniken bezüglich ihrer Eignung für den Nachweis inhomogener Eigenspannungsverteilungen innerhalb der Schichten miteinander verglichen.

Keywords: Thin films; Residual stress; X-ray diffraction

Dedicated to Professor Dr. Otmar Vöhringer on the occasion of his 65th birthday

Dr. Ch. Genzel Hahn-Meitner-Institut Berlin c/o BESSY II Bereich StrukturforschungAlbert-Einstein-Str. 15, D-12489 Berlin, Germany Tel.: +49 30 6392 5751 Fax: +49 30 6392 5752

  1. The authors are indebted to the German Research Foundation (DFG) for financial support of the investigations, reference numbers Re 688/36-1 and Uh 100/17-1.

References

[1] H. Fischmeister, H. Jehn (Eds.): Hartstoffschichten zur Verschleißminderung, DGM Informationsgesellschaft, Oberursel (1986).Search in Google Scholar

[2] E. Klockholm: IBM J. Res. Develop. 31 (1987) 585.10.1147/rd.315.0585Search in Google Scholar

[3] I.C. Noyan, T.C. Huang, B.R. York: Crit. Rev. Solid State Mater. Sci. 20 (1995) 125.10.1080/10408439508243733Search in Google Scholar

[4] D.S. Rickerby, A.M. Jones: Surface Coat. Technol. 36 (1988) 631.10.1016/0257-8972(88)90005-9Search in Google Scholar

[5] A.J. Perry, M. Jagner, D. Sproul, P.J. Rudnik: Surface Coat. Technol. 42 (1990) 49.10.1016/0257-8972(90)90114-RSearch in Google Scholar

[6] B. Eigenmann, B. Scholtes, E. Macherauch: Härterei-Techn. Mitt. 43 (1988) 208.10.1515/htm-1988-430408Search in Google Scholar

[7] F. Höhl, H.R. Stock, B. Biena, G. Spur, G. Meier zu Köcker, K.H. Habig: Mat.-wiss. Werkstofftech. 24 (1993) 125.10.1002/mawe.19930240311Search in Google Scholar

[8] M.C. Polo, J. Esteve, J.L. Morenza: Surface Coat. Technol. 45 (1991) 67.10.1016/0257-8972(91)90207-DSearch in Google Scholar

[9] Ch. Genzel: Adv. in X-Ray Anal. 44 (2001) 247.Search in Google Scholar

[10] R. Zeyfang: Solide State Electronics 14 (1971) 1035.10.1016/0038-1101(71)90172-9Search in Google Scholar

[11] J.J. Blech, Y. Kantor: Computers & Struct. 18 (1984) 609.10.1016/0045-7949(84)90006-3Search in Google Scholar

[12] W.G. Sloof, B.J. Kooi, R. Delhez, Th.H. de Keijser, E.J. Mittemeijer: J. Mater. Res. 11 (1996) 1440.10.1557/JMR.1996.0181Search in Google Scholar

[13] I.C. Noyan, J.B. Cohen: Residual Stress Measurement by Diffraction and Interpretation, Springer, New York (1987).10.1007/978-1-4613-9570-6Search in Google Scholar

[14] V. Hauk: Structural and Residual Stress Analysis by Nondestructive Methods, Elsevier, Amsterdam (1997).Search in Google Scholar

[15] T. Dümmer, B. Eigenmann, D. Löhe: Mater. Sci. Forum 321–324 (2000) 81.10.4028/www.scientific.net/MSF.321-324.81Search in Google Scholar

[16] Ch. Genzel, W. Reimers: Surface Coat. Technol. 116–119 (1999) 404.10.1016/S0257-8972(99)00235-2Search in Google Scholar

[17] Ch. Genzel, M. Broda, D. Dantz, W. Reimers: J. Appl. Cryst. 32 (1999) 779.10.1107/S0021889899005518Search in Google Scholar

[18] E. Macherauch, P. Müller: Z. angew. Physik 13 (1961) 305.Search in Google Scholar

[19] Ch. Genzel: phys. stat. sol. (a) 159 (1997) 283.10.1002/1521-396X(199702)159:2<283::AID-PSSA283>3.0.CO;2-OSearch in Google Scholar

[20] Ch. Genzel, in: P. Scardi, E.J. Mittemeijer (Eds.), Proc. Size-Strain III Conf., Trento, Italy, December 2–5, 2001, in press.Search in Google Scholar

[21] Ch. Genzel, W. Reimers, A. Haase, in: Proc. 6th Int. Conf. on Residual Stress (ICRS-6), Oxford, UK, July 10–12, 2000, Vol. 1, IOM Communications, London (2000) 74.Search in Google Scholar

[22] Ch. Genzel: phys. stat. sol. (a) 146 (1994) 629.10.1002/pssa.2211460208Search in Google Scholar

[23] Ch. Genzel: J. Appl. Cryst. 32 (1999) 770.10.1107/S0021889899005506Search in Google Scholar

[24] C.J. Shute, J.B. Cohen: J. Appl. Phys. 70 (1991) 2104.10.1063/1.349446Search in Google Scholar

[25] H. Dölle, V. Hauk: Härterei Tech. Mitt. 34 (1979) 272.10.1515/htm-1979-340605Search in Google Scholar

[26] H. Behnken, V. Hauk: Z. Metallkd. 82 (1991) 151.10.1515/ijmr-1991-820213Search in Google Scholar

[27] M. van Leeuwen, J.D. Kamminga, E.J. Mittemeijer: J. Appl. Phys. 86 (1999) 1904.10.1063/1.370986Search in Google Scholar

[28] U. Welzel, in: As Ref. [20], in press.Search in Google Scholar

[29] Ch. Genzel: Habilitationsschrift, Humboldt University Berlin (2000).Search in Google Scholar

[30] H. Ruppersberg, I. Detemple, J. Krier: phys. stat. sol. (a) 116 (1989) 681.10.1002/pssa.2211160226Search in Google Scholar

[31] The investigations were part of a joint research project of the Technical University Berlin and the Hahn Meitner Institute, which was financially supported by the German Research Foundation (DFG): UH 100/17-1 and RE 688/36-1.Search in Google Scholar

[32] A. Haase, Ch. Genzel, D. Dantz, M. Löhmann, B. Wallis, C. Stock, W. Reimers, in: H. Morawiec, D. Stróz˙ (Eds.), Applied Crystallography, Proc. XVIII Conf., Wisla, Poland, September 4–7, 2000, World Scientific Publishing, Singapore (2001) 97.10.1142/9789812811325_0013Search in Google Scholar

[33] V. Hauk: Adv. in X-Ray Anal. 27 (1984) 101.10.1154/S0376030800017006Search in Google Scholar

[34] E. Kröner: Z. Physik 151 (1958) 504.10.1007/BF01337948Search in Google Scholar

[35] B.E. Warren: Progr. Metal Physics 8 (1959) 147.10.1016/0502-8205(59)90015-2Search in Google Scholar

[36] J.I. Langford: J. Appl. Cryst. 11 (1978) 10.10.1107/S0021889878012601Search in Google Scholar
Received: 2002-12-17
Published Online: 2022-02-16

© 2003 Carl Hanser Verlag, München

Articles in the same Issue

  1. Frontmatter
  2. Articles/Aufsätze
  3. Bedeutung von Eigenspannungsabbau und mikrostrukturellen Veränderungen für die Lebensdauervorhersage schwingbeanspruchter Schweißverbindungen
  4. Factors affecting cyclic lifetime of EB-PVD thermal barrier coatings with various bond coats
  5. Depth-resolved X-ray residual stress analysis in PVD (Ti, Cr) N hard coatings
  6. Crystal orientation and residual stress in TiN film by synchrotron radiation
  7. Characterization of thermal and anodic oxide layers on β- and on near-β-titanium alloys for biomedical application
  8. Micromechanisms and modelling of crack initiation and growth in tool steels: role of primary carbides
  9. Fatigue crack nucleation at grain boundaries – experiment and simulation
  10. Fatigue and fracture-induced defect structures of metals investigated by positron microscopy
  11. Deformation and fracture of Nb/α-Al2O3 composites in compression and bending studied by optical methods
  12. Dislocation microstructures of single crystal ⟨001⟩ CMSX-4 specimens tensile tested at 700 and 1000°C
  13. Influence of mechanical surface treatments on the HCF performance of the Ni-superalloy Udimet 720 LI
  14. Precipitation of β-phase and twinning during deformation of Mg–Al alloy AZ91 at 150 °C after solution treatment
  15. Nanograin size, high-nitrogen austenitic stainless steels
  16. Der dynamische SD-Effekt und der Einfluss auf die Fließortkurve
  17. Einfluss der Umformgeschwindigkeit und -temperatur auf das Fließverhalten metallischer Werkstoffe
  18. Mean stress sensitivity of sintered iron and steel
  19. Thermozyklisches Kriechen einer kurzfaserverstärkten Aluminium-Kolbenlegierung
  20. Strength and ductility of thin Cu wires
  21. Modeling of deformation behavior of copper under equal channel angular pressing
  22. Reaktionssintern von AlMg–MgO zur Herstellung von Bauteilen auf Spinellbasis
  23. Determination of the local oxygen distribution in a commercial titanium alloy by 3-dimensional atom probe
  24. Phase diagram of the Al–Cu–Fe quasicrystal-forming alloy system
  25. Notifications/Mitteilungen
  26. Personal/Personelles
  27. Books/Bücher
  28. Conferences/Konferenzen
https://doi.org/10.1515/ijmr-2003-0114
Keywords for this article
Thin films; Residual stress; X-ray diffraction

Articles in the same Issue

  1. Frontmatter
  2. Articles/Aufsätze
  3. Bedeutung von Eigenspannungsabbau und mikrostrukturellen Veränderungen für die Lebensdauervorhersage schwingbeanspruchter Schweißverbindungen
  4. Factors affecting cyclic lifetime of EB-PVD thermal barrier coatings with various bond coats
  5. Depth-resolved X-ray residual stress analysis in PVD (Ti, Cr) N hard coatings
  6. Crystal orientation and residual stress in TiN film by synchrotron radiation
  7. Characterization of thermal and anodic oxide layers on β- and on near-β-titanium alloys for biomedical application
  8. Micromechanisms and modelling of crack initiation and growth in tool steels: role of primary carbides
  9. Fatigue crack nucleation at grain boundaries – experiment and simulation
  10. Fatigue and fracture-induced defect structures of metals investigated by positron microscopy
  11. Deformation and fracture of Nb/α-Al2O3 composites in compression and bending studied by optical methods
  12. Dislocation microstructures of single crystal ⟨001⟩ CMSX-4 specimens tensile tested at 700 and 1000°C
  13. Influence of mechanical surface treatments on the HCF performance of the Ni-superalloy Udimet 720 LI
  14. Precipitation of β-phase and twinning during deformation of Mg–Al alloy AZ91 at 150 °C after solution treatment
  15. Nanograin size, high-nitrogen austenitic stainless steels
  16. Der dynamische SD-Effekt und der Einfluss auf die Fließortkurve
  17. Einfluss der Umformgeschwindigkeit und -temperatur auf das Fließverhalten metallischer Werkstoffe
  18. Mean stress sensitivity of sintered iron and steel
  19. Thermozyklisches Kriechen einer kurzfaserverstärkten Aluminium-Kolbenlegierung
  20. Strength and ductility of thin Cu wires
  21. Modeling of deformation behavior of copper under equal channel angular pressing
  22. Reaktionssintern von AlMg–MgO zur Herstellung von Bauteilen auf Spinellbasis
  23. Determination of the local oxygen distribution in a commercial titanium alloy by 3-dimensional atom probe
  24. Phase diagram of the Al–Cu–Fe quasicrystal-forming alloy system
  25. Notifications/Mitteilungen
  26. Personal/Personelles
  27. Books/Bücher
  28. Conferences/Konferenzen
Sign up now to receive a 20% welcome discount
Institutional Access
How does access work?
Have an idea on how to improve our website?
Please write us.
© 2025 De Gruyter Brill
Downloaded on 21.10.2025 from https://www.degruyterbrill.com/document/doi/10.1515/ijmr-2003-0114/html
Scroll to top button