Startseite Technik Holographic femtosecond laser manipulation for advanced material processing
Artikel
Lizenziert
Nicht lizenziert Erfordert eine Authentifizierung

Holographic femtosecond laser manipulation for advanced material processing

  • Satoshi Hasegawa

    Satoshi Hasegawa is an Assistant Professor at Department of Optical Engineering, Utsunomiya University, Japan. He received his master’s degree from The University of Tokushima in 2007 and his doctorate degree from Utsunomiya University in 2010. He was a postdoctoral fellow at Center for Optical Research and Education (CORE), Utsunomiya University, until 2014. His current interests include femtosecond laser material processing with holographic manipulation and computer-generated holography.

    EMAIL logo
    und Yoshio Hayasaki

    Yoshio Hayasaki received his PhD (Applied Physics) from University of Tsukuba, Japan, in 1993. He was a researcher in RIKEN from April 1993 to March 1995. He was an Associate Professor in The University of Tokushima from April 1995 to March 2008. At present, he is a professor in Utsunomiya University, Center for Optical Research and Education (CORE). The main research fields are information photonics, optical metrology, and laser material processing. Recently, he is focusing on a holographic femtosecond laser processing, digital super-resolution microscopy, and optical frequency comb imaging.

Veröffentlicht/Copyright: 25. Februar 2016
Veröffentlichen auch Sie bei De Gruyter Brill

Abstract

Parallel femtosecond laser processing using a computer-generated hologram displayed on a spatial light modulator, known as holographic femtosecond laser processing, provides the advantages of high throughput and high-energy use efficiency. Therefore, it has been widely used in many applications, including laser material processing, two-photon polymerization, two-photon microscopy, and optical manipulation of biological cells. In this paper, we review the development of holographic femtosecond laser processing over the past few years from the perspective of wavefront and polarization modulation. In particular, line-shaped and vector-wave femtosecond laser processing are addressed. These beam-shaping techniques are useful for performing large-area machining in laser cutting, peeling, and grooving of materials and for high-speed fabrication of the complex nanostructures that are applied to material-surface texturing to control tribological properties, wettability, reflectance, and retardance. Furthermore, issues related to the nonuniformity of diffraction light intensity in optical reconstruction and wavelength dispersion from a computer-generated hologram are addressed. As a result, large-scale holographic femtosecond laser processing over 1000 diffraction spots was successfully demonstrated on a glass sample.


Corresponding author: Satoshi Hasegawa, Center for Optical Research and Education (CORE), Utsunomiya University, 7-1-2 Yoto, Utsunomiya 321-8585, Japan, e-mail:

About the authors

Satoshi Hasegawa

Satoshi Hasegawa is an Assistant Professor at Department of Optical Engineering, Utsunomiya University, Japan. He received his master’s degree from The University of Tokushima in 2007 and his doctorate degree from Utsunomiya University in 2010. He was a postdoctoral fellow at Center for Optical Research and Education (CORE), Utsunomiya University, until 2014. His current interests include femtosecond laser material processing with holographic manipulation and computer-generated holography.

Yoshio Hayasaki

Yoshio Hayasaki received his PhD (Applied Physics) from University of Tsukuba, Japan, in 1993. He was a researcher in RIKEN from April 1993 to March 1995. He was an Associate Professor in The University of Tokushima from April 1995 to March 2008. At present, he is a professor in Utsunomiya University, Center for Optical Research and Education (CORE). The main research fields are information photonics, optical metrology, and laser material processing. Recently, he is focusing on a holographic femtosecond laser processing, digital super-resolution microscopy, and optical frequency comb imaging.

Acknowledgments

This study was supported by a Grant-in-Aid for Scientific Research (B), by a Grant-in-Aid for Challenging Exploratory Research from the Ministry of Education, Culture, Sports, Science, and Technology of Japan, and by Nippon Sheet Glass Foundation for Materials Science and Engineering.

References

[1] D. Du, X. Liu, G. Korn and G. Mourou, Appl. Phys. Lett. 64, 3071–3073 (1994).10.1063/1.111350Suche in Google Scholar

[2] H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, et al., Appl. Phys. Lett. 65, 1850–1852 (1994).10.1063/1.112863Suche in Google Scholar

[3] K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano and H. Hosono, Appl. Phys. B. 71, 119–121 (2000).10.1007/s003400000335Suche in Google Scholar

[4] T. Kondo, S. Matsuo, S. Juodkazis and H. Misawa, Appl. Phys. Lett. 79, 725–727 (2001).10.1063/1.1391232Suche in Google Scholar

[5] Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, et al., Appl. Phys. Lett. 80, 1508–1510 (2002).10.1063/1.1457524Suche in Google Scholar

[6] S. Matsuo, S. Juodkazis and H. Misawa, Appl. Phys. A 80, 683–685 (2005).10.1007/s00339-004-3108-xSuche in Google Scholar

[7] J. Kato, N. Takeyasu, Y. Adachi, H.-B. Sun and S. Kawata, Appl. Phys. Lett. 86, 044102 (2005).10.1063/1.1855404Suche in Google Scholar

[8] J. Amako, K. Nagasaka and N. Kazuhiro, Opt. Lett. 27, 969–971 (2002).10.1364/OL.27.000969Suche in Google Scholar

[9] Y. Kuroiwa, N. Takeshima, Y. Narita, S. Tanaka and K. Hirao, Opt. Express 12, 1908–1915 (2004).10.1364/OPEX.12.001908Suche in Google Scholar PubMed

[10] Y. Hayasaki, T. Sugimoto, A. Takita and N. Nishida, Appl. Phys. Lett. 87, 031101 (2005).10.1063/1.1992668Suche in Google Scholar

[11] N. Sanner, N. Huot, E. Audouard, C. Larat, J. P. Huignard, et al., Opt. Lett. 30, 1479–1481 (2005).10.1364/OL.30.001479Suche in Google Scholar PubMed

[12] S. Hasegawa, Y. Hayasaki and N. Nishida, Opt. Lett. 31, 1705–1707 (2006).10.1364/OL.31.001705Suche in Google Scholar PubMed

[13] L. Kelemen, S. Valkai and P. Ormos, Opt. Express 15, 14488–14497 (2007).10.1364/OE.15.014488Suche in Google Scholar

[14] H. Takahashi, S. Hasegawa, A. Takita and Y. Hayasaki, Opt. Express 16, 16592–16599 (2008).10.1364/OE.16.016592Suche in Google Scholar

[15] K. Obata, J. Koch, U. Hinze and B. N. Chichkov, Opt. Express 18, 17193–17200 (2010).10.1364/OE.18.017193Suche in Google Scholar PubMed

[16] S. D. Gittard, A. Nguyen, K. Obata, A. Koroleva, R. J. Narayan, et al., Biomed. Opt. Express 2, 3167–3178 (2011).10.1364/BOE.2.003167Suche in Google Scholar

[17] Y. C. Li, L. C. Cheng, C. Y. Chang, C. H. Lien, P. J. Campagnola, et al., Opt. Express 20, 19030–19038 (2012).10.1364/OE.20.019030Suche in Google Scholar PubMed

[18] C. Mauclair, G. Cheng, N. Huot, E. Audouard, A. Rosenfeld, et al., Opt. Express 17, 3531–3542 (2009).10.1364/OE.17.003531Suche in Google Scholar PubMed

[19] M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura and K. Hirao, Jpn J. Appl. Phys. 48, 126507–126511 (2009).10.1143/JJAP.48.126507Suche in Google Scholar

[20] M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura and K. Hirao, Opt. Express 18, 12136–12143 (2010).10.1364/OE.18.012136Suche in Google Scholar PubMed

[21] M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura and K. Hirao, Opt. Lett. 36, 1065–1067 (2011).10.1364/OL.36.001065Suche in Google Scholar PubMed

[22] D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, et al., Appl. Phys. B 101, 817–823 (2010).10.1007/s00340-010-4205-5Suche in Google Scholar

[23] H. Imamoto, S. Kanehira, X. Wang, K. Kametani, M. Sakakura, et al., Opt. Lett. 36, 1176–1178 (2011).10.1364/OL.36.001176Suche in Google Scholar

[24] M. Antkowiak, M. L. Torres-Mapa, F. Gunn-Moore and K. Dholakia, J. Biophotonics 3, 696–705 (2010).10.1002/jbio.201000052Suche in Google Scholar PubMed

[25] M. Yamaji, H. Kawashima, J. Suzuki and S. Tanaka, Appl. Phys. Lett. 93, 041116 (2008).10.1063/1.2965451Suche in Google Scholar

[26] M. Yamaji, H. Kawashima, J. Suzuki, S. Tanaka, M. Shimizu, et al., J. Appl. Phys. 111, 083107 (2012).10.1063/1.4705286Suche in Google Scholar

[27] M. K. Bhuyan, F. Courvoisier, P. A. Lacourt, M. Jacquot, R. Salut, et al., Appl. Phys. Lett. 97, 081102 (2010).10.1063/1.3479419Suche in Google Scholar

[28] A. Jesacher and M. J. Booth, Opt. Express 18, 21090–21099 (2010).10.1364/OE.18.021090Suche in Google Scholar PubMed

[29] B. P. Cumming, A. Jesacher, M. J. Booth, T. Wilson and M. Gu, Opt. Express 19, 9419–9425 (2011).10.1364/OE.19.009419Suche in Google Scholar PubMed

[30] S. Hasegawa and Y. Hayasaki, Opt. Express 23, 23185–23194 (2015).10.1364/OE.23.023185Suche in Google Scholar PubMed

[31] Z. Kuang, W. Perrie, J. Leach, M. Sharp, S. Edwardson, et al., Appl. Surf. Sci. 255, 2284–2289 (2008).10.1016/j.apsusc.2008.07.091Suche in Google Scholar

[32] Z. Kuang, D. Liu, W. Perrie, S. Edwardson, M. Sharp, et al., Appl. Surf. Sci. 255, 6582–6588 (2009).10.1016/j.apsusc.2009.02.043Suche in Google Scholar

[33] P. S. Salter and M. J. Booth, Opt. Lett. 36, 2302–2304 (2011).10.1364/OL.36.002302Suche in Google Scholar

[34] H. Takahashi, S. Hasegawa and Y. Hayasaki, Appl. Opt. 46, 5917–5923 (2007).10.1364/AO.46.005917Suche in Google Scholar

[35] K. Chaen, H. Takahashi, S. Hasegawa and Y. Hayasaki, Opt. Commun. 280, 165–172 (2007).10.1016/j.optcom.2007.08.006Suche in Google Scholar

[36] S. Hasegawa and Y. Hayasaki, Opt. Rev. 14, 208–213 (2007).10.1007/s10043-007-0208-9Suche in Google Scholar

[37] S. Hasegawa and Y. Hayasaki, Opt. Lett. 34, 22–24 (2009).10.1364/OL.34.000022Suche in Google Scholar

[38] S. Hasegawa and Y. Hayasaki, Jpn. J. Appl. Phys. 48, 09LE03 (2009).10.1143/JJAP.48.09LE03Suche in Google Scholar

[39] S. Hasegawa and Y. Hayasaki, Opt. Lett. 36, 2943–2945 (2011).10.1364/OL.36.002943Suche in Google Scholar

[40] Y. Hayasaki, M. Nishitani, H. Takahashi, H. Yamamoto, A. Takita, et al., Appl. Phys. A 107, 357–362 (2012).10.1007/s00339-012-6801-1Suche in Google Scholar

[41] S. Hasegawa and Y. Hayasaki, Appl. Phys., A Mater. Sci. Process. 111, 929–934 (2013).10.1007/s00339-012-7317-4Suche in Google Scholar

[42] I. G. Mariyenko, J. Strohaber and C. J. G. J. Uitenvaal, Opt. Express 13, 7599–7608 (2005).10.1364/OPEX.13.007599Suche in Google Scholar PubMed

[43] G. Mínguez-Vega, J. Lancis, J. Caraquitena, V. Torres-Company and P. Andrés, Opt. Lett. 31, 2631–2633 (2006).10.1364/OL.31.002631Suche in Google Scholar

[44] G. Mínguez-Vega, E. Tajahuerce, M. Fernández-Alonso, V. Climent, J. Lancis, et al., Opt. Express 15, 278–288 (2007).10.1364/OE.15.000278Suche in Google Scholar PubMed

[45] L. Martínez-León, P. Clemente, E. Tajahuerce, G. Mínguez-Vega, O. Mendoza-Yero, et al., Appl. Phys. Lett. 94, 011104 (2009).10.1063/1.3063047Suche in Google Scholar

[46] R. Martínez-Cuenca, O. Mendoza-Yero, B. Alonso, I. J. Sola, G. Mínguez-Vega, et al., Opt. Lett. 37, 957–959 (2012).10.1364/OL.37.000957Suche in Google Scholar

[47] S. Hasegawa and Y. Hayasaki, Opt. Lett. 39, 478–481 (2014).10.1364/OL.39.000478Suche in Google Scholar

[48] L. Novotny, M. R. Beversluis, K. S. Youngworth and T. G. Brown, Phys. Rev. Lett. 86, 5251–5254 (2001).10.1103/PhysRevLett.86.5251Suche in Google Scholar PubMed

[49] K. Yoshiki, M. Hashimoto and T. Araki, Jpn. J. Appl. Phys. 44, L1066–L1068 (2005).10.1143/JJAP.44.L1066Suche in Google Scholar

[50] B. Jia, H. Kang, J. Li and M. Gu, Opt. Lett. 34, 1918–1920 (2009).10.1364/OL.34.001918Suche in Google Scholar PubMed

[51] Y. Shimotsuma, P. G. Kazansky, J. Qiu and K. Hirao, Phys. Rev. Lett. 91, 247405 (2003).10.1103/PhysRevLett.91.247405Suche in Google Scholar

[52] V. G. Niziev and A. V. Nesterov, J. Phys. D 32, 1455–1461 (1999).10.1088/0022-3727/32/13/304Suche in Google Scholar

[53] M. Meier, V. Romano and T. Feurer, Appl. Phys., A Mater. Sci. Process. 86, 329–334 (2007).10.1007/s00339-006-3784-9Suche in Google Scholar

[54] O. J. Allegre, W. Perrie, S. P. Edwardson, G. Dearden and K. G. Watkins, J. Opt. 14, 085601 (2012).10.1088/2040-8978/14/8/085601Suche in Google Scholar

[55] Y. Kozawa and S. Sato, Opt. Express 18, 10828–10833 (2010).10.1364/OE.18.010828Suche in Google Scholar PubMed

[56] S. Hasegawa and Y. Hayasaki, Opt. Express 21, 12987–12995 (2013).10.1364/OE.21.012987Suche in Google Scholar PubMed

[57] K. Lou, S. X. Qian, X. L. Wang, Y. Li, B. Gu, et al., Opt. Express 20, 120–127 (2012).10.1364/OE.20.000120Suche in Google Scholar PubMed

[58] Y. Jin, O. J. Allegre, W. Perrie, K. Abrams, J. Ouyang, et al., Opt. Express 21, 25333–25343 (2013).10.1364/OE.21.025333Suche in Google Scholar PubMed

[59] K. Lou, S. X. Qian, Z. C. Ren, C. H. Tu, Y. N. Li, et al., Sci. Rep. 3, 2281 (2013).10.1038/srep02281Suche in Google Scholar

[60] O. J. Allegre, Y. Jin, W. Perrie, J. Ouyang, E. Fearon, et al., Opt. Express 21, 21198–21207 (2013).10.1364/OE.21.021198Suche in Google Scholar PubMed

[61] S. Hasegawa and Y. Hayasaki, Int. J. Optomechatronics, 8, 73–88 (2014).10.1080/15599612.2014.901456Suche in Google Scholar

[62] J. Bonse, R. Koter, M. Hartelt, D. Spaltmann, S. Pentzien, et al., Appl. Phys. A 117, 103–110 (2014).10.1007/s00339-014-8229-2Suche in Google Scholar

[63] A. Y. Vorobyev and C. Guo, Opt. Express 18, 6455–6460 (2010).10.1364/OE.18.006455Suche in Google Scholar PubMed

[64] A. Y. Vorobyev and C. Guo, Opt. Express 19, A1031–A1036 (2011).10.1364/OE.19.0A1031Suche in Google Scholar PubMed

[65] M. Gecevičius, M. Beresna and P. G. Kazansky, Opt. Lett. 38, 4096–4099 (2013).10.1364/OL.38.004096Suche in Google Scholar PubMed

[66] K. Sakuma, S. Hasegawa, H. Takahashi, M. Ota and Y. Hayasaki, Appl. Phys. B, 119, 533–538 (2015).10.1007/s00340-015-6011-6Suche in Google Scholar

[67] J. Bengtsson, Appl. Opt. 33, 6879–6884 (1994).10.1364/AO.33.006879Suche in Google Scholar

Received: 2015-12-18
Accepted: 2016-2-1
Published Online: 2016-2-25
Published in Print: 2016-2-1

©2016 THOSS Media & De Gruyter

Heruntergeladen am 6.2.2026 von https://www.degruyterbrill.com/document/doi/10.1515/aot-2015-0062/pdf
Button zum nach oben scrollen