Startseite Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
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Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines

  • Kuang-Chao Fan

    Kuang-Chao Fan was born in Taiwan, R.O.C., on January 4, 1950. He received his BSc degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 1972, his MSc degree from the Status University of New York at Buffalo, in 1976, and his PhD degree from the University of Manchester Institute of Science and Technology, Manchester, U.K., in 1984, all in Mechanical Engineering. He has been a Professor of Mechanical Engineering at NTU since August 1989. He was the Chairman of the Institute of Industrial Engineering, NTU, the Chairman of Chinese Institute of Automation Technology, the Director of the Tjing Ling Industrial Research Institute, and Associate Dean of the Engineer College, NTU. Since 2001, he has been the Yangtze Professor at Hefei University of Technology, Hefei, China. His current research interests include manufacturing metrology, precision machining, machine tool technology, micro/nanomeasurement, optical switches, and tactile sensor.

     EMAIL logo     , Hung-Yu Wang

    Hung-Yu Wang was born in Taiwan, R.O.C., on September 22, 1981. He received his BS degree from Nation Taiwan University of Science and Technology (NTUST), Taipei, Taiwan, R.O.C., in 2003, his MS degree from the Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2005, all in Mechanical Engineering. His current research interests include metrology system integration.

         , Hao-Wei Yang

    Hao-Wei Yang received his BS degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2012. His current research interests include nanometrology and machine tool metrology.

         und Li-Min Chen

    Li-Min Chen received his BS degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2010. His current research interests include nanometrology and machine tool metrology.
Veröffentlicht/Copyright: 6. August 2014
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Advanced Optical Technologies
Aus der Zeitschrift Advanced Optical Technologies Band 3 Heft 4

Abstract

Any axis of precision machines possesses six-degree-of-freedom (6-DOF) motion errors, also called the geometric errors, due to manufacturing tolerances and assembly errors, namely three linear and three angular errors. Conventional optical instruments allow measurement of only one or two errors at a time. In order to achieve fast measurement, many multi-degree-of-freedom measurement (MDFM) systems have been developed over the past 20 years, from three-degree-of-freedom (3-DOF) to 6-DOF. This article summarizes reports of optical measurement techniques of MDFM systems for precision linear, planar and XYZ stages. Comments are also given for the applicability to practical uses.

Keywords: diffraction grating; laser interferometer; linear motion; multi-degree-of-freedom measurement; planar motion
Corresponding author: Kuang-Chao Fan, Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, Phone: +886-2-2362-0032, e-mail:

About the authors

Kuang-Chao Fan

Kuang-Chao Fan was born in Taiwan, R.O.C., on January 4, 1950. He received his BSc degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 1972, his MSc degree from the Status University of New York at Buffalo, in 1976, and his PhD degree from the University of Manchester Institute of Science and Technology, Manchester, U.K., in 1984, all in Mechanical Engineering. He has been a Professor of Mechanical Engineering at NTU since August 1989. He was the Chairman of the Institute of Industrial Engineering, NTU, the Chairman of Chinese Institute of Automation Technology, the Director of the Tjing Ling Industrial Research Institute, and Associate Dean of the Engineer College, NTU. Since 2001, he has been the Yangtze Professor at Hefei University of Technology, Hefei, China. His current research interests include manufacturing metrology, precision machining, machine tool technology, micro/nanomeasurement, optical switches, and tactile sensor.

Hung-Yu Wang

Hung-Yu Wang was born in Taiwan, R.O.C., on September 22, 1981. He received his BS degree from Nation Taiwan University of Science and Technology (NTUST), Taipei, Taiwan, R.O.C., in 2003, his MS degree from the Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2005, all in Mechanical Engineering. His current research interests include metrology system integration.

Hao-Wei Yang

Hao-Wei Yang received his BS degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2012. His current research interests include nanometrology and machine tool metrology.

Li-Min Chen

Li-Min Chen received his BS degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2010. His current research interests include nanometrology and machine tool metrology.

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Received: 2014-6-13
Accepted: 2014-7-14
Published Online: 2014-8-6
Published in Print: 2014-8-1

©2014 THOSS Media & De Gruyter

Artikel in diesem Heft

  1. Cover and Frontmatter
  2. Community
  3. News from the European Optical Society
  4. Conference Notes
  5. Conference Calendar
  6. Topical issue: Optical metrology for precision engineering
  7. Editorial
  8. Optical metrology for precision engineering
  9. Review Article
  10. Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
  11. Research Articles
  12. Miniaturization of an interferometric distance sensor employing diffractive optics
  13. Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement
  14. Single shot interferometry using a two-interferogram phase shifting algorithm
  15. Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry
  16. Fundamental validation for surface texture imaging using a microsphere as a laser-trapping-based microprobe
  17. Lateral resolution improvement of laser-scanning imaging for nano defects detection
  18. Letters
  19. Three-axis vibration measurement by using a grating-interferometric vibrometer
  20. Fast and accurate deflectometry with crossed fringes
  21. Review Article
  22. Material and technology trends in fiber optics
https://doi.org/10.1515/aot-2014-0038
Schlagwörter für diesen Artikel
diffraction grating; laser interferometer; linear motion; multi-degree-of-freedom measurement; planar motion

Artikel in diesem Heft

  1. Cover and Frontmatter
  2. Community
  3. News from the European Optical Society
  4. Conference Notes
  5. Conference Calendar
  6. Topical issue: Optical metrology for precision engineering
  7. Editorial
  8. Optical metrology for precision engineering
  9. Review Article
  10. Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
  11. Research Articles
  12. Miniaturization of an interferometric distance sensor employing diffractive optics
  13. Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement
  14. Single shot interferometry using a two-interferogram phase shifting algorithm
  15. Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry
  16. Fundamental validation for surface texture imaging using a microsphere as a laser-trapping-based microprobe
  17. Lateral resolution improvement of laser-scanning imaging for nano defects detection
  18. Letters
  19. Three-axis vibration measurement by using a grating-interferometric vibrometer
  20. Fast and accurate deflectometry with crossed fringes
  21. Review Article
  22. Material and technology trends in fiber optics
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