Fast and accurate deflectometry with crossed fringes
-
Yuankun Liu
,
Evelyn Olesch
Abstract
Phase measuring deflectometry (PMD) acquires the two components of the local surface gradient via a sequence of two orthogonal sinusoidal fringe patterns that have to be displayed and captured separately. We will demonstrate that the sequential process (different fringe directions, phase shifting) can be completely avoided by using a cross fringe pattern. With an optimized Fourier evaluation, high quality data of smooth optical surfaces can be acquired within one single shot. The cross fringe pattern allows for one more improvement of PMD: we will demonstrate a novel phase-shift technique, where a one-dimensional N-phase shift allows for the acquisition of the two orthogonal phases, with only N exposures instead of 2N exposures. Therefore, PMD can be implemented by a one-dimensional translation of the fringe pattern, instead of the common two-dimensional translation, which is quite useful for certain applications.
References
[1] G. Häusler, German patent DE 19944354.Suche in Google Scholar
[2] M. C. Knauer and G. Häusler, R. Lampalzer, German pa-tent DE 102004020419.Suche in Google Scholar
[3] M. C. Knauer, J. Kaminski and G. Häusler, Proc. SPIE 5457, 366 (2004).Suche in Google Scholar
[4] D. Pérard and J. Beyerer, Proc. SPIE 3204, 74 (1997).Suche in Google Scholar
[5] M. Petz and R. Tutsch, VDI-Ber. 1844, 327 (2004).Suche in Google Scholar
[6] T. Bothe, W. Li, C. von Kopylow and W. Jüptner, Proc. SPIE 5457, 411 (2004).Suche in Google Scholar
[7] P. Su, R. E. Parks, L. Wang, R. Angel and J. H. Burge, Appl. Opt. 49, 4404–4412 (2010).Suche in Google Scholar
[8] S. Ettl, J. Kaminski, E. Olesch, M. C. Knauer and G. Häusler, Appl. Opt. 47, 2091–2097 (2008).Suche in Google Scholar
[9] C. Faber, M. Kurz, C. Röttinger, E. Olesch, D. Domingos, et al., Proc. Euspen 12, 84 (2012).Suche in Google Scholar
[10] G. Häusler, C. Faber, F. Willomitzer and P. Dienstbier, Proc. DGaO, A8 (2012).Suche in Google Scholar
[11] M. Takeda, H. Ina and S. Kobayashi, JOSA, 72, 156–160 (1982).10.1364/JOSA.72.000156Suche in Google Scholar
[12] H. O.Bartelt, Y. Li, Opt. Comm. 48, 1–6 (1983).Suche in Google Scholar
[13] M.Pirga, M. Kujawinska, Opt. Eng. 34, 2459–2466 (1995).Suche in Google Scholar
[14] L. Huang, C. S. Ng and A. K. Asundi, Opt. Express, 19, 12809–12814 (2011).10.1364/OE.19.012809Suche in Google Scholar PubMed
[15] R. Gerchberg and W. Saxton, Optik, 35, 237–246 (1972).10.1038/237246b0Suche in Google Scholar
[16] H. Canabal, J. A. Quiroga and E. Bernabeu, Appl. Opt. 37, 6227–6233 (1998).10.1364/AO.37.006227Suche in Google Scholar PubMed
[17] H. Canabal and E. Bernabeu, Proc. SPIE, 3744, 231 (1999).10.1117/12.357718Suche in Google Scholar
[18] J. L. Li, H. J. Su, and X. Y. Su, Appl. Opt. 36, 277–280 (1997).Suche in Google Scholar
[19] K. Liu, Y. Wang, D. L. Lau, Q. Hao and L.G. Hassebrook, Opt. Express 18, 5229–5244 (2010).10.1364/OE.18.005229Suche in Google Scholar PubMed
[20] G. Häusler, C. Faber, E. Olesch and S. Ettl, Proc. SPIE 8788 (2013).Suche in Google Scholar
[21] C. Faber, E. Olesch, R. Krobot and G. Häusler, Proc. SPIE 8493 (2012).Suche in Google Scholar
©2014 THOSS Media & De Gruyter
Artikel in diesem Heft
- Cover and Frontmatter
- Community
- News from the European Optical Society
- Conference Notes
- Conference Calendar
- Topical issue: Optical metrology for precision engineering
- Editorial
- Optical metrology for precision engineering
- Review Article
- Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
- Research Articles
- Miniaturization of an interferometric distance sensor employing diffractive optics
- Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement
- Single shot interferometry using a two-interferogram phase shifting algorithm
- Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry
- Fundamental validation for surface texture imaging using a microsphere as a laser-trapping-based microprobe
- Lateral resolution improvement of laser-scanning imaging for nano defects detection
- Letters
- Three-axis vibration measurement by using a grating-interferometric vibrometer
- Fast and accurate deflectometry with crossed fringes
- Review Article
- Material and technology trends in fiber optics
Artikel in diesem Heft
- Cover and Frontmatter
- Community
- News from the European Optical Society
- Conference Notes
- Conference Calendar
- Topical issue: Optical metrology for precision engineering
- Editorial
- Optical metrology for precision engineering
- Review Article
- Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
- Research Articles
- Miniaturization of an interferometric distance sensor employing diffractive optics
- Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement
- Single shot interferometry using a two-interferogram phase shifting algorithm
- Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry
- Fundamental validation for surface texture imaging using a microsphere as a laser-trapping-based microprobe
- Lateral resolution improvement of laser-scanning imaging for nano defects detection
- Letters
- Three-axis vibration measurement by using a grating-interferometric vibrometer
- Fast and accurate deflectometry with crossed fringes
- Review Article
- Material and technology trends in fiber optics
