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Wafer Fabrication
Automatic Material Handling System
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Jie Zhang
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Together with:
Huazhong University of Science and Technology
Language:
English
Published/Copyright:
2018
About this book
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
- Presents mathematical foundations of intelligent manufacturing system.
- Explores dispatch methods at local and system level.
- Illustrates theories via case studies.
Author / Editor information
Jie Zhang, Shanghai Jiaotong University, Shanghai, China
Reviews
Table of content:
Chapter 1 Wafer fabrication system-semiconductor manufacturing, process, manufacturing system, machining system, dispatch
Chapter 2 Automatic Materiel Handling System (AMHS) in wafer fabrication-development, sub-systems, layout, features
Chapter 3 AMHS modeling-modeling based on network flow, queueing theory, Mathematical Programming model, Markov model, Simulation Model, Petri network model
Chapter 4 AMHS performance analysis-description of the running of AMHS, frequently-used analytical methods, extended Markov model, performance analysis based on extended Markov model
Chapter 5 AMHS dispatch-dispatch based on Heuristic Rules, operational research, intelligent algorithm
Chapter 6 Dispatch of Interbay handling system-methods, model, structure, dispatch based on Complex Heuristic Rules
Chapter 7 Dispatch of Intrabay handling system-dispatch based on GDP, Push-Pull theory
Chapter 8 Dispatch at system level-dispatch based on PMPGA, GARL Complex Heuristic Rules
Chapter 9 Performance and evaluation-system performance modeling, modeling based on AOKCTP, performance analysis, case studies
Chapter 1 Wafer fabrication system-semiconductor manufacturing, process, manufacturing system, machining system, dispatch
Chapter 2 Automatic Materiel Handling System (AMHS) in wafer fabrication-development, sub-systems, layout, features
Chapter 3 AMHS modeling-modeling based on network flow, queueing theory, Mathematical Programming model, Markov model, Simulation Model, Petri network model
Chapter 4 AMHS performance analysis-description of the running of AMHS, frequently-used analytical methods, extended Markov model, performance analysis based on extended Markov model
Chapter 5 AMHS dispatch-dispatch based on Heuristic Rules, operational research, intelligent algorithm
Chapter 6 Dispatch of Interbay handling system-methods, model, structure, dispatch based on Complex Heuristic Rules
Chapter 7 Dispatch of Intrabay handling system-dispatch based on GDP, Push-Pull theory
Chapter 8 Dispatch at system level-dispatch based on PMPGA, GARL Complex Heuristic Rules
Chapter 9 Performance and evaluation-system performance modeling, modeling based on AOKCTP, performance analysis, case studies
Topics
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Frontmatter
I -
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Preface
V -
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Contents
VII -
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1 Semiconductor wafer fabrication system
1 -
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2 Automated material handling systems in SWFSs
19 -
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3 Modeling methods of automated material handling systems in SWFSs
36 -
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4 Analysis of automated material handling systems in SWFSs
78 -
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5 Scheduling methods of automated material handling systems in SWFSs
107 -
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6 Scheduling in Interbay automated material handling systems
135 -
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7 Scheduling in Intrabay automatic material handling systems
182 -
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8 Integrated scheduling in AMHSs
208 -
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9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs
235 -
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Index
271
Publishing information
Pages and Images/Illustrations in book
eBook published on:
September 24, 2018
eBook ISBN:
9783110487473
Hardcover published on:
September 24, 2018
Hardcover ISBN:
9783110486902
Pages and Images/Illustrations in book
Front matter:
12
Main content:
272
Illustrations:
50
Tables:
10
Audience(s) for this book
Researchers on advanced manufacturing and operational research, manufacturing engineers.
Safety & product resources
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Manufacturer information:
Walter de Gruyter GmbH
Genthiner Straße 13
10785 Berlin
productsafety@degruyterbrill.com
