Index

Jie Zhang

Home Technology Index

Chapter

Licensed

Unlicensed Requires Authentication

Index

Jie Zhang

Published by

Become an author with De Gruyter Brill

Explore this Subject How to publish with us

This chapter is in the book Wafer Fabrication

MLA
APA
Harvard
Chicago
Vancouver

MLA
APA
Harvard
Chicago
Vancouver

Zhang, Jie. "Index". Wafer Fabrication: Automatic Material Handling System, Berlin, Boston: De Gruyter, 2018, pp. 271-272. https://doi.org/10.1515/9783110487473-010

Zhang, J. (2018). Index. In Wafer Fabrication: Automatic Material Handling System (pp. 271-272). Berlin, Boston: De Gruyter. https://doi.org/10.1515/9783110487473-010

Zhang, J. 2018. Index. Wafer Fabrication: Automatic Material Handling System. Berlin, Boston: De Gruyter, pp. 271-272. https://doi.org/10.1515/9783110487473-010

Zhang, Jie. "Index" In Wafer Fabrication: Automatic Material Handling System, 271-272. Berlin, Boston: De Gruyter, 2018. https://doi.org/10.1515/9783110487473-010

Zhang J. Index. In: Wafer Fabrication: Automatic Material Handling System. Berlin, Boston: De Gruyter; 2018. p.271-272. https://doi.org/10.1515/9783110487473-010

Copy

Copied to clipboard

BibTeX EndNote RIS

You are currently not able to access this content.

Chapters in this book

Frontmatter I
Preface V
Contents VII
1 Semiconductor wafer fabrication system 1
2 Automated material handling systems in SWFSs 19
3 Modeling methods of automated material handling systems in SWFSs 36
4 Analysis of automated material handling systems in SWFSs 78
5 Scheduling methods of automated material handling systems in SWFSs 107
6 Scheduling in Interbay automated material handling systems 135
7 Scheduling in Intrabay automatic material handling systems 182
8 Integrated scheduling in AMHSs 208
9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs 235
Index 271

Search book Search the content of this book

https://doi.org/10.1515/9783110487473-010

Chapters in this book

Frontmatter I
Preface V
Contents VII
1 Semiconductor wafer fabrication system 1
2 Automated material handling systems in SWFSs 19
3 Modeling methods of automated material handling systems in SWFSs 36
4 Analysis of automated material handling systems in SWFSs 78
5 Scheduling methods of automated material handling systems in SWFSs 107
6 Scheduling in Interbay automated material handling systems 135
7 Scheduling in Intrabay automatic material handling systems 182
8 Integrated scheduling in AMHSs 208
9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs 235
Index 271

Index

Chapter PDF View

Chapters in this book

Chapters in this book

Chapters in this book