4 Analysis of automated material handling systems in SWFSs

Chapters in this book

1. Frontmatter I
2. Preface V
3. Contents VII
4. 1 Semiconductor wafer fabrication system 1
5. 2 Automated material handling systems in SWFSs 19
6. 3 Modeling methods of automated material handling systems in SWFSs 36
7. 4 Analysis of automated material handling systems in SWFSs 78
8. 5 Scheduling methods of automated material handling systems in SWFSs 107
9. 6 Scheduling in Interbay automated material handling systems 135
10. 7 Scheduling in Intrabay automatic material handling systems 182
11. 8 Integrated scheduling in AMHSs 208
12. 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs 235
13. Index 271