1 Semiconductor wafer fabrication system

Jie Zhang

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1 Semiconductor wafer fabrication system

Jie Zhang

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This chapter is in the book Wafer Fabrication

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Zhang, Jie. "1 Semiconductor wafer fabrication system". Wafer Fabrication: Automatic Material Handling System, Berlin, Boston: De Gruyter, 2018, pp. 1-18. https://doi.org/10.1515/9783110487473-001

Zhang, J. (2018). 1 Semiconductor wafer fabrication system. In Wafer Fabrication: Automatic Material Handling System (pp. 1-18). Berlin, Boston: De Gruyter. https://doi.org/10.1515/9783110487473-001

Zhang, J. 2018. 1 Semiconductor wafer fabrication system. Wafer Fabrication: Automatic Material Handling System. Berlin, Boston: De Gruyter, pp. 1-18. https://doi.org/10.1515/9783110487473-001

Zhang, Jie. "1 Semiconductor wafer fabrication system" In Wafer Fabrication: Automatic Material Handling System, 1-18. Berlin, Boston: De Gruyter, 2018. https://doi.org/10.1515/9783110487473-001

Zhang J. 1 Semiconductor wafer fabrication system. In: Wafer Fabrication: Automatic Material Handling System. Berlin, Boston: De Gruyter; 2018. p.1-18. https://doi.org/10.1515/9783110487473-001

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Chapters in this book

Frontmatter I
Preface V
Contents VII
1 Semiconductor wafer fabrication system 1
2 Automated material handling systems in SWFSs 19
3 Modeling methods of automated material handling systems in SWFSs 36
4 Analysis of automated material handling systems in SWFSs 78
5 Scheduling methods of automated material handling systems in SWFSs 107
6 Scheduling in Interbay automated material handling systems 135
7 Scheduling in Intrabay automatic material handling systems 182
8 Integrated scheduling in AMHSs 208
9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs 235
Index 271

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https://doi.org/10.1515/9783110487473-001

Chapters in this book

Frontmatter I
Preface V
Contents VII
1 Semiconductor wafer fabrication system 1
2 Automated material handling systems in SWFSs 19
3 Modeling methods of automated material handling systems in SWFSs 36
4 Analysis of automated material handling systems in SWFSs 78
5 Scheduling methods of automated material handling systems in SWFSs 107
6 Scheduling in Interbay automated material handling systems 135
7 Scheduling in Intrabay automatic material handling systems 182
8 Integrated scheduling in AMHSs 208
9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs 235
Index 271

1 Semiconductor wafer fabrication system

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Chapters in this book

Chapters in this book

Chapters in this book