Synthesis and characterization of zirconium nitride coatings by cathodic arc sputtering technique
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, and
Abstract
Polycrystalline zirconium nitride films (560 nm) were deposited on stainless steel (SS-316) substrates using the multi-target cathodic arc sputtering technique. Deposition was carried out under N2 reactive atmosphere (4 × 10−3 mbar) at two different temperatures, 150 and 200 °C. X-ray diffraction studies show that reflections from planes changed from (111) to (200) for deposition temperatures of 150 °C and 200 °C, respectively. Films deposited at 150 °C and 200 °C bear a critical load of 6.4 N and 6.8 N respectively, showing better adherence at higher temperature. This may be the result of film–substrate diffusion at the interface.
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© 2014, Carl Hanser Verlag, München
Articles in the same Issue
- Contents
- Contents
- Original Contributions
- Thermodynamic description of the Ta–W–Zr system
- Interrelationships of defects, nitride modification and excess nitrogen in nitrided Fe-4.75 at.% Al alloy
- Effects of rotating magnetic and ultrasonic fields on the microstructure and mechanical properties of Al-8 wt.%Si alloy
- Microstructural control of Ti-46Al-7Nb-0.7Cr-0.2Ni-0.1Si alloy by heat treatment
- Structure and mechanical properties of Zn-(5–25) Al alloys
- Hot ductility behavior of near-alpha titanium alloy IMI834
- The effect of nano-SiO2 on magnetic and dielectric properties of Li–Zn ferrite
- Production of aluminum nano-composite reinforced by tungsten carbide particles via mechanical milling and subsequent hot pressing
- Short Communications
- Microstructure and texture evolution of Mg–Li alloy during rolling
- Microstructure and mechanical properties of Ti2AlC-reinforced TiAl composites
- Thermal fatigue behavior of cast superalloy Inconel 713LC
- Study of structural, morphological and optical properties of S and Cu co-doped SnO2 nanostructured thin films prepared by spray pyrolysis
- Synthesis and characterization of zirconium nitride coatings by cathodic arc sputtering technique
- Plasmon enhanced scattering and fluorescence in amorphous matrix
- Novel preparation of a porous composite insulating scaffold from forsterite and sodium carbonate media
- People
- Werner Mader, 65 years
- DGM News
- DGM News
Articles in the same Issue
- Contents
- Contents
- Original Contributions
- Thermodynamic description of the Ta–W–Zr system
- Interrelationships of defects, nitride modification and excess nitrogen in nitrided Fe-4.75 at.% Al alloy
- Effects of rotating magnetic and ultrasonic fields on the microstructure and mechanical properties of Al-8 wt.%Si alloy
- Microstructural control of Ti-46Al-7Nb-0.7Cr-0.2Ni-0.1Si alloy by heat treatment
- Structure and mechanical properties of Zn-(5–25) Al alloys
- Hot ductility behavior of near-alpha titanium alloy IMI834
- The effect of nano-SiO2 on magnetic and dielectric properties of Li–Zn ferrite
- Production of aluminum nano-composite reinforced by tungsten carbide particles via mechanical milling and subsequent hot pressing
- Short Communications
- Microstructure and texture evolution of Mg–Li alloy during rolling
- Microstructure and mechanical properties of Ti2AlC-reinforced TiAl composites
- Thermal fatigue behavior of cast superalloy Inconel 713LC
- Study of structural, morphological and optical properties of S and Cu co-doped SnO2 nanostructured thin films prepared by spray pyrolysis
- Synthesis and characterization of zirconium nitride coatings by cathodic arc sputtering technique
- Plasmon enhanced scattering and fluorescence in amorphous matrix
- Novel preparation of a porous composite insulating scaffold from forsterite and sodium carbonate media
- People
- Werner Mader, 65 years
- DGM News
- DGM News