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Stress-gradient induced fatigue at ultra high frequencies in sub micron thin metal films

  • Christoph Eberl , Diana Courty , Astrid Walcker und Oliver Kraft
Veröffentlicht/Copyright: 11. Juni 2013
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International Journal of Materials Research
Aus der Zeitschrift International Journal of Materials Research Band 103 Heft 1

Abstract

Mechanical fatigue at frequencies in the GHz regime in submicron metal thin films is governed by size and frequency effects. The cyclic load can lead to damage formation also known as acoustomigration and determines the reliability of micro electro mechanical systems and surface acoustic wave devices. The size and frequency effects dramatically change the fatigue behavior compared to bulk material. The resulting damage structure is similar to electromigration experiments where void and extrusion formation lead to failure. Here, a dislocation based mechanism is presented which explains the damage formation. This mechanism is induced by gradients in cyclic shear stress which is induced by the short acoustic wave length at frequencies in the GHz regime. Discrete dislocation dynamic simulations are presented that reflect the dislocation behavior at these ultra high frequencies.

Keywords: Fatigue mechanisms; Surface acoustic wave; Acoustomigration; Discrete dislocation simulation; Aluminum thin film
* Dr. Christoph Eberl, Karlsruhe Institute of Technology, Kaiserstr. 12, 76131 Karlruhe, Germany. Tel.: +49 (0) 721 608 222 52, Fax: +49 (0) 721 608 223 47, E-mail:

Dedicated to Prof. Dr.-Ing. Christina Berger on the occasion of her 65th birthday

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Received: 2011-3-3
Accepted: 2011-10-25
Published Online: 2013-06-11
Published in Print: 2012-01-01

© 2012, Carl Hanser Verlag, München

Artikel in diesem Heft

  1. Contents
  2. Contents
  3. Editorial
  4. Editorial January 2012
  5. Original Contributions
  6. High-strength aluminum-based light-weight materials for safety components – recent progress by microstructural refinement and particle reinforcement
  7. Microstructure – deformation relationships in fine grained high manganese TWIP steel – the role of local texture
  8. Microstructure of a eutectic NiAl—Mo alloy directionally solidified using an industrial scale and a laboratory scale Bridgman furnace
  9. Effect of Si addition on the oxidation resistance of Co–Re–Cr-alloys: Recent attainments in the development of novel alloys
  10. Corrosion behavior of silicon oxycarbide-based ceramic nanocomposites under hydrothermal conditions
  11. Thermal cycling damage evolution of a thermal barrier coating and the influence of substrate creep, interface roughness and pre-oxidation
  12. Influence of creep and cyclic oxidation in thermal barrier coatings
  13. Residual stress states as a result of bending and straightening processes of steels in different heat treatment conditions
  14. Residual stresses under quasi-static and cyclic loading in shot peened Inconel 718
  15. Investigation of the surface residual stresses in spray cooled induction hardened gearwheels
  16. Stress-gradient induced fatigue at ultra high frequencies in sub micron thin metal films
  17. Influence of graphite spherical size on fatigue behaviour and fracture toughness of ductile cast iron EN-GJS-400-18LT
  18. Failure behaviour of the superalloy MAR-M247 LC under LCF, HCF and combined LCF/HCF loading
  19. Measuring techniques for the very high cycle fatigue behaviour of high strength steel at ultrasonic frequencies
  20. Failure limits of continuous carbon fibre reinforced plastics loaded with fibre parallel compression
  21. Development of an integrative simulation method to predict the microstructural influence on the mechanical behaviour of semi-crystalline thermoplastic parts
  22. DGM News
  23. DGM News
https://doi.org/10.3139/146.110635
Schlagwörter für diesen Artikel
Fatigue mechanisms; Surface acoustic wave; Acoustomigration; Discrete dislocation simulation; Aluminum thin film

Artikel in diesem Heft

  1. Contents
  2. Contents
  3. Editorial
  4. Editorial January 2012
  5. Original Contributions
  6. High-strength aluminum-based light-weight materials for safety components – recent progress by microstructural refinement and particle reinforcement
  7. Microstructure – deformation relationships in fine grained high manganese TWIP steel – the role of local texture
  8. Microstructure of a eutectic NiAl—Mo alloy directionally solidified using an industrial scale and a laboratory scale Bridgman furnace
  9. Effect of Si addition on the oxidation resistance of Co–Re–Cr-alloys: Recent attainments in the development of novel alloys
  10. Corrosion behavior of silicon oxycarbide-based ceramic nanocomposites under hydrothermal conditions
  11. Thermal cycling damage evolution of a thermal barrier coating and the influence of substrate creep, interface roughness and pre-oxidation
  12. Influence of creep and cyclic oxidation in thermal barrier coatings
  13. Residual stress states as a result of bending and straightening processes of steels in different heat treatment conditions
  14. Residual stresses under quasi-static and cyclic loading in shot peened Inconel 718
  15. Investigation of the surface residual stresses in spray cooled induction hardened gearwheels
  16. Stress-gradient induced fatigue at ultra high frequencies in sub micron thin metal films
  17. Influence of graphite spherical size on fatigue behaviour and fracture toughness of ductile cast iron EN-GJS-400-18LT
  18. Failure behaviour of the superalloy MAR-M247 LC under LCF, HCF and combined LCF/HCF loading
  19. Measuring techniques for the very high cycle fatigue behaviour of high strength steel at ultrasonic frequencies
  20. Failure limits of continuous carbon fibre reinforced plastics loaded with fibre parallel compression
  21. Development of an integrative simulation method to predict the microstructural influence on the mechanical behaviour of semi-crystalline thermoplastic parts
  22. DGM News
  23. DGM News
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