Fabrication of dielectric thin films by sputtering deposition at different pressures with (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 ceramic as target
-
Feng Shi
Abstract
Dielectric ceramic thin films have been fabricated by radio frequency magnetron sputtering on SiO2 (110) substrates with different sputtering pressures and the as-sputtered samples were subsequently annealed in an O2 atmosphere. The microstructure and morphology of the thin films were investigated, particularly as a function of pressures. The thin films deposited at 0.25 Pa are polycrystalline with high-quality crystals and are made up of dense rod-like structures. The main phases are Ba0.5Sr0.5Nb2O6 and Ba0.27Sr0.75Nb2O5.78, which are different from the target because of the volatilization of ZnO. The results indicate that appropriate sputtering pressure contributes to the improvement of the crystal quality and the grain growth of the dielectric ceramic thin films.
References
[1] M.R.Varma, S.Biju, M.T.Sebastian: J. Eur. Ceram. Soc.26 (2006) 1903. 10.1016/j.jeurceramsoc.2005.09.027Search in Google Scholar
[2] S.J.Lee, B.Y.Jang, Y.H.Jung, S.Nahm, H.J.Lee, Y.S.Kim: J. Eur. Ceram. Soc.26 (2006) 2165.10.1016/j.jeurceramsoc.2005.09.089Search in Google Scholar
[3] Z.Z.Tang, S.J.Liu, R.K.Singh, S.Bandyopadhyay, I.Sus, T.Kotani, M.V.Schilfgaarde, N.Newman: Acta. Mater.57 (2009) 432.10.1016/j.actamat.2008.09.038Search in Google Scholar
[4] H.H.Huang, M.C.Wang, C.Y.Chen, N.C.Wu, H.J.Lin: Mater. Sci. Eng. A406 (2006) 279.10.1016/j.msea.2006.06.095Search in Google Scholar
[5] H.H.Huang, M.C.Wang, C.Y.Chen, N.C.Wu, H.J.Lin: J. Eur. Ceram. Soc.26 (2006) 3211.10.1016/j.jeurceramsoc.2005.09.109Search in Google Scholar
[6] A.Ianculescu, B.Despax, V.Bley, T.Lebey, R.Gavrilâ, N.Drâgan: J. Eur. Ceram. Soc.27 (2007) 1129.10.1016/j.jeurceramsoc.2006.05.043Search in Google Scholar
[7] F.Shi: Dielectric properties of Ba(Zn1/3Nb2/3)O3microwave dielectric ceramics. TianJin University Ph. D. Dissertation, Tianjin, 2003.Search in Google Scholar
[8] C.W.Cui, F.Shi, Y.G.Li, S.Y.Wang: J. Mater. Sci – Mater. El.21 (2010) 349.10.1007/s10854-009-9919-ySearch in Google Scholar
[9] F.Shi, C.W.Cui: Appl. Surf. Sci.256 (2010) 2626.10.1016/j.apsusc.2009.11.007Search in Google Scholar
[10] B.Wang, M.Wang, D.X.Zhang, A.P.Huang, X.M.Song, Y.J.Zou, H.Yan: Func. Mater.33 (2002) 82. (in Chinese)Search in Google Scholar
[11] Z.H.Liu, M.M.Shao, H.Yan: J. Wuhan. Uni. Tech.27 (2005) 1. (in Chinese)10.1007/s11595-012-0397-3Search in Google Scholar
© 2011, Carl Hanser Verlag, München
Articles in the same Issue
- Contents
- Contents
- Editorial
- Prof. Dr.-Ing. Heinrich Wollenberger — 80 years
- Original Contributions
- Atom probe tomography: from physical metallurgy towards microelectronics
- Accumulation of radiation damage and disordering in MgAl2O4 under swift heavy ion irradiation
- TEM study of irradiation induced copper precipitation in boron alloyed EUROFER97 steel
- Order – disorder transformation in Ni – V alloys under electron irradiation
- Materials issues of the SINQ high-power spallation target
- The origin and development of the P{011}<111> orientation during recrystallization of particle-containing alloys
- Coarsening kinetics of Cu-rich precipitates in a concentrated multicomponent Fe–Cu based steel
- Beyond Ni-based superalloys: Development of CoRe-based alloys for gas turbine applications at very high temperatures
- The effect of heat treatments on the microstructure, texture and mechanical properties of the extruded magnesium alloy ME21
- Analysing SANS data to determine magnetisation reversal processes in composite perpendicular magnetic recording media using TEM images
- Dislocationless sliding in a polycluster glass
- Evolution of transformation plasticity during bainitic transformation
- Surface tension and viscosity of NiAl catalytic precursor alloys from microgravity experiments
- Synthesis of carbon nanotubes by fine Ni particles in Ni3Al foam
- Fabrication of dielectric thin films by sputtering deposition at different pressures with (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 ceramic as target
- DGM News
- DGM News
Articles in the same Issue
- Contents
- Contents
- Editorial
- Prof. Dr.-Ing. Heinrich Wollenberger — 80 years
- Original Contributions
- Atom probe tomography: from physical metallurgy towards microelectronics
- Accumulation of radiation damage and disordering in MgAl2O4 under swift heavy ion irradiation
- TEM study of irradiation induced copper precipitation in boron alloyed EUROFER97 steel
- Order – disorder transformation in Ni – V alloys under electron irradiation
- Materials issues of the SINQ high-power spallation target
- The origin and development of the P{011}<111> orientation during recrystallization of particle-containing alloys
- Coarsening kinetics of Cu-rich precipitates in a concentrated multicomponent Fe–Cu based steel
- Beyond Ni-based superalloys: Development of CoRe-based alloys for gas turbine applications at very high temperatures
- The effect of heat treatments on the microstructure, texture and mechanical properties of the extruded magnesium alloy ME21
- Analysing SANS data to determine magnetisation reversal processes in composite perpendicular magnetic recording media using TEM images
- Dislocationless sliding in a polycluster glass
- Evolution of transformation plasticity during bainitic transformation
- Surface tension and viscosity of NiAl catalytic precursor alloys from microgravity experiments
- Synthesis of carbon nanotubes by fine Ni particles in Ni3Al foam
- Fabrication of dielectric thin films by sputtering deposition at different pressures with (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 ceramic as target
- DGM News
- DGM News
