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AFM testing of the nanomechanical behaviour of MEMS micromembranes

  • G. Ekwinski , A. Goehlich , K. Trieu , Z. Rymuza and A. Koszewski
Published/Copyright: May 23, 2013
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 99 Issue 8

Abstract

The nanomechanical behaviour of micromembranes for high temperature applications of a microelectro mechanical system pressure sensor has been studied by use of atomic force microscopy. A method was elaborated and used for measure nanometre deformation of the membrane under application of high loads. This method was also useful for identifying failures of a membrane, e. g., undesired position against the substrate of the structure. The tests were performed for a series of membranes. The characteristics of the mechanical behaviour were plotted for different geometrical features of the membranes to identify the influence of geometry and dimension. The method was found to be very effective for the process characterisation of the fabricated MEMS micromembranes devoted, e. g., to high temperature pressure sensors.

Keywords: Nanomechanical testing; Atomic force microscopy; MEMS membranes
* Correspondence address, Prof. Zygmunt Rymuza Institute of Micromechanics and Photonics Warsaw University of Technology Sw. A. Boboli 8, 02 – 525 Warsaw, Poland Tel.: +48 22 234 8540 Fax: +48 22 234 8601 E-mail:

References

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Received: 2007-10-19
Accepted: 2008-2-1
Published Online: 2013-05-23
Published in Print: 2008-08-01

© 2008, Carl Hanser Verlag, München

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https://doi.org/10.3139/146.101715
Keywords for this article
Nanomechanical testing; Atomic force microscopy; MEMS membranes

Articles in the same Issue

  1. Contents
  2. Contents
  3. Editorial
  4. Editorial
  5. Basic
  6. Relating viscoelastic nanoindentation creep and load relaxation experiments
  7. Identification of viscoelastic model parameters by means of cyclic nanoindentation testing
  8. Scaling relations for viscoelastic – cohesive conical indentation
  9. Effect of the indentation depth on the evaluation of mechanical properties of thin films
  10. Investigation of the relationship between work done during indentation and the hardness and Young's modulus obtained by indentation testing
  11. Pop-in effect in Ge- and Si-coated single-crystalline Si
  12. Multi-scale mechanical characterization of a freestanding polymer film using indentation
  13. Applied
  14. Energy-based hardness of soda-lime silicate glass
  15. Mechanical properties of a-C, SiC and Ti-C: H films
  16. Influence of the mathematical model on the evaluation of nanomechanical properties of ultrathin polymer layers studied by AFM
  17. AFM testing of the nanomechanical behaviour of MEMS micromembranes
  18. Mechanical and tribological behaviour of carbon nanotube brushes
  19. Phase equilibria in the system “MnO” – CaO – SiO2 – Al2O3 – K2O relevant to manganese smelting slags
  20. Influence of grain refinement and modification on dry sliding wear behavior of Al-12Si and Al-12Si-3Cu cast alloys
  21. Measurement of the isothermal sections at 700 and 427 °C in the Al – Mg – Ni system
  22. Notifications
  23. DGM News
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