Influence of the mathematical model on the evaluation of nanomechanical properties of ultrathin polymer layers studied by AFM
-
Adam Koszewski
Abstract
The major research topic presented in this study concerns nanoindentation experiments of thin soft films, showing high adhesion forces. The aim of this research was to evaluate the nanomechanical properties of a 200 nm thick thermoplastic polymer layer mr-I 7000E devoted to nanoimprint lithography. The experiments were carried out using an atomic force microscopy instrument equipped with a modified 14 N m− 1 silicon cantilever tip (5 μm in diameter). The forces exerted during film indentation varied from 0 up to 2.5 μN. The Hertz and Johnson – Kendall – Roberts (JKR) models were used for analysis of the force – distance curves in order to extract the Young's modulus value. Contrary to the Hertz model, in the JKR model the adhesion force between tip and sample was considered as an additional load during the nanoindentation. The final results of these estimations were 0.20 and 0.25 GPa for the Hertz and JKR models, respectively. It shows that neglect of the adhesion force may cause an error of 20 %.
References
[1] C.M.Sottomayor-Torres (Ed.): Alternative Lithography, Kluwer Academic, New York(2003).10.1007/978-1-4419-9204-8Search in Google Scholar
[2] A.C.Fischer-Cripps: Introduction to Contact Mechanics, Springer, Berlin(2000).Search in Google Scholar
[3] K.L.Johnson: Contact Mechanics, Cambridge University Press, Cambridge(1985).10.1017/CBO9781139171731Search in Google Scholar
[4] M.Kwacz, S.Chizhik, Z.Rymuza, Z.Kusznierewicz: Polimery49(2004)551 [in Polish].10.14314/polimery.2004.551Search in Google Scholar
[5] V.Tsukruk, Z.Huang, S.Chizhik, V.Gorbunov: J. Mater. Sci.33(1998)4905.10.1023/A:1004457532183Search in Google Scholar
[6] A.Koszewski, T.Gorski, F.Reuter, Z.Rymuza: Int. J. Mater. Res.98(2007)393.10.3139/146.101484Search in Google Scholar
© 2008, Carl Hanser Verlag, München
Articles in the same Issue
- Contents
- Contents
- Editorial
- Editorial
- Basic
- Relating viscoelastic nanoindentation creep and load relaxation experiments
- Identification of viscoelastic model parameters by means of cyclic nanoindentation testing
- Scaling relations for viscoelastic – cohesive conical indentation
- Effect of the indentation depth on the evaluation of mechanical properties of thin films
- Investigation of the relationship between work done during indentation and the hardness and Young's modulus obtained by indentation testing
- Pop-in effect in Ge- and Si-coated single-crystalline Si
- Multi-scale mechanical characterization of a freestanding polymer film using indentation
- Applied
- Energy-based hardness of soda-lime silicate glass
- Mechanical properties of a-C, SiC and Ti-C: H films
- Influence of the mathematical model on the evaluation of nanomechanical properties of ultrathin polymer layers studied by AFM
- AFM testing of the nanomechanical behaviour of MEMS micromembranes
- Mechanical and tribological behaviour of carbon nanotube brushes
- Phase equilibria in the system “MnO” – CaO – SiO2 – Al2O3 – K2O relevant to manganese smelting slags
- Influence of grain refinement and modification on dry sliding wear behavior of Al-12Si and Al-12Si-3Cu cast alloys
- Measurement of the isothermal sections at 700 and 427 °C in the Al – Mg – Ni system
- Notifications
- DGM News
Articles in the same Issue
- Contents
- Contents
- Editorial
- Editorial
- Basic
- Relating viscoelastic nanoindentation creep and load relaxation experiments
- Identification of viscoelastic model parameters by means of cyclic nanoindentation testing
- Scaling relations for viscoelastic – cohesive conical indentation
- Effect of the indentation depth on the evaluation of mechanical properties of thin films
- Investigation of the relationship between work done during indentation and the hardness and Young's modulus obtained by indentation testing
- Pop-in effect in Ge- and Si-coated single-crystalline Si
- Multi-scale mechanical characterization of a freestanding polymer film using indentation
- Applied
- Energy-based hardness of soda-lime silicate glass
- Mechanical properties of a-C, SiC and Ti-C: H films
- Influence of the mathematical model on the evaluation of nanomechanical properties of ultrathin polymer layers studied by AFM
- AFM testing of the nanomechanical behaviour of MEMS micromembranes
- Mechanical and tribological behaviour of carbon nanotube brushes
- Phase equilibria in the system “MnO” – CaO – SiO2 – Al2O3 – K2O relevant to manganese smelting slags
- Influence of grain refinement and modification on dry sliding wear behavior of Al-12Si and Al-12Si-3Cu cast alloys
- Measurement of the isothermal sections at 700 and 427 °C in the Al – Mg – Ni system
- Notifications
- DGM News
