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CF4/O2/He Reaction Chemistry in an Atmospheric Pressure Plasma Jet

  • Yongho Kim , Hilary L. Teslow , Jaeyoung Park , Louis A. Rosocha and Hans W. Herrmann EMAIL logo
Published/Copyright: November 30, 2016
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Abstract

An atmospheric pressure plasma jet (APPJ) operated with a CF4/O2/He gas mixture has recently been demonstrated to decontaminate actinide materials such as plutonium and uranium. However, a comprehensive study of the chemical kinetics for an atmospheric plasma containing CF4/O2/He does not exist. To understand and optimize the decontamination process, ultraviolet (UV) absorption spectroscopy was employed to measure chemically active species, such as dioxygen fluoride (O2F) and ozone (O3), inside and outside the APPJ. At room temperature operation, O2F was found to be a significant long-lived radical, which lasted up to 10 ms in the effluent with a density of about 1015 cm-3. The concentration of O3 does not fall off and keeps its density constant up to 10 ms, which indicates the absence of atomic fluorine (F) outside the APPJ. Measurements were in good agreement with a gas-phase post-plasma simulation. In summary, atomic fluorine produced inside the APPJ recombines with O2 molecules, producing O2F molecules, which can live long enough to etch metal surfaces.

Received: 2004-1-12
Revised: 2004-7-30
Accepted: 2005-1-14
Published Online: 2016-11-30
Published in Print: 2005-7-1

© 2016 by Walter de Gruyter Berlin/Boston

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  3. Study in Space and Time of the Gas Temperature Variations in Dielectric Barrier Discharge Reactors
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