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Removal of Xylene, Trichloroethylene and Their Mixtures from Air Stream by a Pulsed Corona Discharge Induced Plasma Reactor

  • J. S. Chang , T. Yamamoto , H. Kohno , M. Tamura , S. Honda , A. Shibuya and A. A. Berezin
Published/Copyright: January 26, 2017
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Abstract

Volatile organic compounds (VOC) containing gases from semiconductor industries are toxic to human health, and, therefore, need to be controlled. A bench scale wire-pipe type pulsed corona discharge induced plasma reactor was used to decompose these compounds from dry air. The concentration of VOCs and by-products are measured by both gas/chromatography and Fourier Transform InfraRed Spectroscopy systems. The removal efficiencies for both xylene and trichloroethylene depends on the residence time and applied voltage and a 100% removal efficiency was achieved for both 200 ppm o-xylene and TCE with the residence time below 2.5 s and applied voltage of 25 kV. When xylene and TCE mixture was used, xylene removal is enhanced while TCE removal is reduced. The mechanism of destruction process and discharge by-products are also discussed in detail.

Received: 1996-12-16
Revised: 1997-6-25
Accepted: 1997-6-30
Published Online: 2017-1-26
Published in Print: 1997-6-1

© 2017 by Walter de Gruyter Berlin/Boston

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