Critical Evaluation of the State of the Art of the Analysis of Light Elements in Thin Films Demonstrated Using the Examples of SiOXNY and AlOXNY Films (IUPAC Technical Report)
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Critical Evaluation of the State of the Art of the Analysis of Light Elements in Thin Films Demonstrated Using the Examples of SiOXNY and AlOXNY Films (IUPAC Technical Report)
S. Dreer and P. Wilhartitz
Pure and Applied Chemistry
Vol. 76, No. 6, pp. 1161–1213 (2004)
The quantitative analysis of thin films containing light elements is very important in improving the coating processes and technological properties of the products. In order to review the state of the art of modern analytical techniques for such applications, the model systems SiOXNY and AlOXNY were selected. Over 1000 abstracts were screened, and the relevant literature was evaluated to give a comprehensive overview of instruments, analytical procedures and results, film types, deposition methods, and investigation goals. From more than 150 citations, the limitations, drawbacks, and pitfalls of the different methods were extracted and reviewed critically, while in addition, improvements were proposed where possible. These suggestions are combined with the newest results of investigation by the authors of this paper. Recommendations concerning the optimized combination of analytical methods for different analytical problems have been worked out on the basis of all results. Analysis of various multicomponent systems containing light elements demonstrated the applicability of the different methods of analysis in combination to all film systems with related compositions.
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- Mark Your Calendar
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Articles in the same Issue
- From the Editor
- Contents
- Chemists in a Vulnerable World
- Strengthening International Science for the Benefit of Society: An Overview of the International Council for Science
- Women in Chemistry: Her Lab in Your Life
- The Future of Chemistry Education
- Young Observers Going to Beijing
- Marian Góral Received the 2004 Franzosini Award
- International Year of Physics, 2005
- Electromotivity to Replace Electromotive Force?
- Bonded by Stereobonds
- Reference Methods, Standards, and Applications of Photoluminescence
- Glossary of Terms Used in Biomolecular Screening
- Practical Studies for Medicinal Chemistry Guidelines
- Internationally Agreed Terminology for Observations in Scientific Communication
- Biophysico-Chemical Processes of Heavy Metals and Metalloids in Soil Environments
- Quantities, Terminology, and Symbols in Photothermal and Related Spectroscopies (IUPAC Recommendations 2004)
- Electrochemical Detection in Liquid Flow Analytical Techniques: Characterization and Classification (IUPAC Technical Report)
- Piezoelectric Chemical Sensors (IUPAC Technical Report)
- Guidelines for Calibration in Analytical Chemistry. Part 2: Multicomponent Calibration (IUPAC Technical Report)
- Critical Evaluation of the State of the Art of the Analysis of Light Elements in Thin Films Demonstrated Using the Examples of SiOXNY and AlOXNY Films (IUPAC Technical Report)
- Mechanisms of Immunosensitization to Metals (IUPAC Technical Report)
- Chemistry at the Interfaces
- Macromolecules and Materials Science
- Introdução à Química Orgânica
- Polymers in Medicine, Nanotechnology, Degradation, and Stabilization
- Biodegradable Polymers and Plastics
- Functional and Nano Systems
- π-Electron Systems
- Biomolecular Chemistry
- Food Safety
- Analytical Methodologies in Trace Metal Speciation
- Hydrogen Energy
- Polymer Gels and Networks
- Nanostructured Advanced Materials
- Physics and Sustainable Development
- Mycotoxins and Phycotoxins
- Mark Your Calendar
- Index for 2004
