Startseite Technik Standardization of light scattering measurements
Artikel
Lizenziert
Nicht lizenziert Erfordert eine Authentifizierung

Standardization of light scattering measurements

  • Sven Schröder EMAIL logo , Alexander von Finck und Angela Duparré
Veröffentlicht/Copyright: 5. November 2015
Veröffentlichen auch Sie bei De Gruyter Brill

Abstract

In every advanced optical system, light scattering caused by the imperfections of optical components sooner or later becomes an issue that needs to be addressed. Light scattering can be a critical factor for both the throughput and the imaging quality of optical systems. On a component level, the quantities to describe these effects are the scatter loss or total scattering (TS) and the scattering distribution function or angle-resolved light scattering (ARS). In the last decades, a number of instruments have been developed worldwide for the measurement of TS and ARS. However, numerous pitfalls have to be avoided to obtain objective, reliable, and reproducible measurement results. This is, in particular, true for low scatter levels of high-end optical components. Standard procedures that have to be both concise and easy to implement are thus of crucial importance for the optics community. This paper tries to give an overview on existing standards as well as an outlook on new standards that are still being developed. Special emphasis is put on ISO standards jointly developed, reviewed, and revised by the international experts in the field.


Corresponding author: Sven Schröder, Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Str. 7, 07745 Jena, Germany, e-mail:

Acknowledgments

We are very grateful to Marcus Trost, Tobias Herffurth, and Matthias Hautpvogel (Fraunhofer IOF, Jena, Germany) for their contributions. The fruitful discussions with international experts in the field, such as Thomas Germer (NIST, Gaithersburg, MD) and John Stover (TSW, Tucson, AZ), are also highly appreciated.

References

[1] ISO 13696, ‘Optics and Photonics – Lasers and Laser Related Equipment – Test Methods for Radiation Scattered by Optical Components’ (International Organization for Standardization, Geneva, Switzerland, 2002).Suche in Google Scholar

[2] P. Kadkhoda, A. Müller, D. Ristau, A. Duparré, S. Gliech, et al., Appl. Opt. 39, 3321–32 (2000).10.1364/AO.39.003321Suche in Google Scholar

[3] H. Davies, Proc. IEEE Part IV Inst. Monogr. 90, 209–214 (1954).10.1049/pi-4.1954.0025Suche in Google Scholar

[4] H. Bennett and J. Porteus, J. Opt. Soc. Am. 51, 123–129 (1961).10.1364/JOSA.51.000123Suche in Google Scholar

[5] ASTM F 1048-87, ‘Standard Test Method for Measuring the Effective Surface Roughness of Optical Components by Total Integrated Scattering’ (American Society for Testing and Materials, Philadelphia, 1999).Suche in Google Scholar

[6] ASTM E 1392-90, ‘Standard Practice for Angle Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces’ (American Society for Testing and Materials, Philadelphia, 1990).Suche in Google Scholar

[7] T. Leonhard and P. Rudolph, Proc. SPIE 1995, 285–293 (1993).Suche in Google Scholar

[8] ASTM E 2387-5, ‘Standard Practice for Goniometric Optical Scatter Measurements’ (American Society for Testing and Materials, Philadelphia, 2011).Suche in Google Scholar

[9] J. C. Stover, ‘Optical Scattering: Measurement and Analysis’ (SPIE Optical Engineering Press, Bellingham, WA, 2012).Suche in Google Scholar

[10] J. Bennett and L. Mattsson, in ‘Introduction to Surface Roughness and Scattering’, 2nd ed. (Optical Society of America, Washington, DC, 1999).Suche in Google Scholar

[11] H. Bennett, Opt. Eng. 17, 480–488 (1978).10.1117/12.7972268Suche in Google Scholar

[12] A. Duparré and S. Gliech, Proc. SPIE 3110, 566–573 (1997).Suche in Google Scholar

[13] A. Duparré, J. Ferré-Borrull, S. Gliech, G. Notni, J. Steinert, et al., Appl. Opt. 41, 154–171 (2002).10.1364/AO.41.000154Suche in Google Scholar

[14] D. Rönnow and E. Veszelei, Rev. Sci. Instrum. 65, 327–334 (1994).10.1063/1.1145191Suche in Google Scholar

[15] D. Rönnow and A. Roos, Rev. Sci. Instrum. 66, 2411–2422 (1995).10.1063/1.1145639Suche in Google Scholar

[16] O. Kienzle, J. Staub, and T. Tschudi, Meas. Sci. Technol. 5, 747–752 (1994).10.1088/0957-0233/5/6/017Suche in Google Scholar

[17] S. Schröder, S. Gliech, and A. Duparré, Proc. SPIE 5965 1B, 1–9 (2005).10.1117/12.625780Suche in Google Scholar

[18] K. Guenther, P. Wierer, and J. Bennet, Appl. Opt. 23, 3820–3836 (1984).10.1364/AO.23.003820Suche in Google Scholar

[19] J. Detrio and S. Miner, Opt. Eng. 24, 419–422 (1985).10.1117/12.7973499Suche in Google Scholar

[20] A. Krasilnikova and J. Bulir, Proc. SPIE 5965, 59651I (2005).10.1117/12.625139Suche in Google Scholar

[21] O. Balachninaite, R. Grigonis, V. Sirutkaitis, and R. Eckardt, Opt. Comm. 248, 15–25 (2005).10.1016/j.optcom.2004.11.097Suche in Google Scholar

[22] P. Kadkhoda, A. Müller, and D. Ristau, Proc. SPIE 3902, 118–127 (2000).Suche in Google Scholar

[23] S. Gliech, J. Steinert, and A. Duparré, Appl. Opt. 41, 3224–3235 (2002).10.1364/AO.41.003224Suche in Google Scholar

[24] M. Otani, R. Biro, C. Ouchi, M. Hasegawa, Y. Suzuki, et al. Appl. Opt. 41, 3248–3255 (2002).10.1364/AO.41.003248Suche in Google Scholar

[25] S. Schröder, S. Gliech, and A. Duparré A. Appl. Opt. 44, 6093–6107 (2007).10.1364/AO.44.006093Suche in Google Scholar PubMed

[26] T. Germer and C. Asmail, Rev. Sci. Instrum. 70, 3688 (1999).10.1063/1.1149950Suche in Google Scholar

[27] P. Bousquet, F. Flory, and P. Roche, J. Opt. Soc. Am. 71, 1115–1123 (1981).10.1364/JOSA.71.001115Suche in Google Scholar

[28] J. Elson, J. Rahn, and J. Bennett, Appl. Opt. 19, 669–679 (1980).10.1364/AO.19.000669Suche in Google Scholar PubMed

[29] C. Amra, C. Grezes-Besset, P. Roche, and E. Pelletier, Appl. Opt. 28, 2723–2730 (1989).10.1364/AO.28.002723Suche in Google Scholar PubMed

[30] J. Neubert, T. Seifert, N. Czarnetzki, and T. Weigel, Proc. SPIE 2210, 543–552 (1994).Suche in Google Scholar

[31] F. Orazio, R. Silva, and W. Stockwell, Proc. SPIE 384, 123–132 (1983).Suche in Google Scholar

[32] C. Asmail, C. L. Cromer, J. E. Proctor, J. J. Hsia, and R. P. Division, Proc. SPIE 2260, 52–61 (1994).Suche in Google Scholar

[33] S. Schröder, T. Herffurth, H. Blaschke, and A. Duparré, Appl. Opt. 50, C164–C171 (2011).10.1364/AO.50.00C164Suche in Google Scholar PubMed

[34] H. Hogrefe and C. Kunz, Appl. Opt. 26, 2851–2859 (1987).10.1364/AO.26.002851Suche in Google Scholar

[35] C. Amra, D. Torricini, and P. Roche, Appl. Opt. 32, 5462–5474 (1993).10.1364/AO.32.005462Suche in Google Scholar PubMed

[36] T. F. Schiff, M. W. Knighton, D. J. Wilson, F. M. Cady, J. C. Stover, et al., Proc. SPIE 1995, 121–130 (1993).Suche in Google Scholar

[37] M. Newell and R. Keski-Kuha, Appl. Opt. 36, 2897–2904 (1997).10.1364/AO.36.002897Suche in Google Scholar

[38] M. Zerrad, M. Lequime, and C. Amra, Proc. SPIE 8169, 81690K (2011).10.1117/12.896730Suche in Google Scholar

[39] S. Schröder, M. Trost, T. Herffurth, A. von Finck, and A. Duparré, Adv. Opt. Technol. 3, 113–120 (2014).10.1515/aot-2013-0048Suche in Google Scholar

[40] S. Schröder, D. Unglaub, M. Trost, X. Cheng, J. Zhang, et al., Appl. Opt. 53, A35–A41 (2014).10.1364/AO.53.000A35Suche in Google Scholar PubMed

[41] A. von Finck, M. Hauptvogel, and A. Duparré, Appl. Opt. 50, C321–C328 (2011).10.1364/AO.50.00C321Suche in Google Scholar PubMed

[42] A. von Finck, T. Herffurth, S. Schröder, A. Duparré, and S. Sinzinger, Appl. Opt. 53, A259–A269 (2014).10.1364/AO.53.00A259Suche in Google Scholar PubMed

[43] T. Herffurth, S. Schröder, M. Trost, A. Duparré, and A. Tünnermann, Appl. Opt. 52, 3279–3287 (2013).10.1364/AO.52.003279Suche in Google Scholar

[44] T. Herffurth, M. Trost, S. Schröder, K. Täschner, H. Bartzsch, et al., Appl. Opt. 53, A351–A359 (2014).10.1364/AO.53.00A351Suche in Google Scholar PubMed

[45] JCGM 100:2008, ‘Evaluation of Measurement Data – Guide to the Expression of Uncertainty in Measurement (GUM)’ (2008).Suche in Google Scholar

[46] A. von Finck, ‘Table Top System for Angle Resolved Light Scattering Measurement’, Dissertation (TU-Ilmenau, 2014).Suche in Google Scholar

[47] H. van de Hulst, ‘Light Scattering by Small Particles’ (John Wiley & Sons, New York, 1957).10.1063/1.3060205Suche in Google Scholar

[48] S. Maure, G. Albrand, and C. Amra, Appl. Opt. 35, 5573–5582 (1996).10.1364/AO.35.005573Suche in Google Scholar PubMed

[49] M. Trost, S. Schröder, T. Feigl, A. Duparré, and A. Tünnermann, Appl. Opt. 50, C148–C153 (2011).10.1364/AO.50.00C148Suche in Google Scholar PubMed

[50] M. Trost, S. Schröder, A. Duparré, S. Risse, T. Feigl, et al., Opt. Express 21, 27852–27864 (2013).10.1364/OE.21.027852Suche in Google Scholar PubMed

[51] A. Duparré, D. Ristau, Appl. Opt. 50, C172–C177 (2011).10.1364/AO.50.00C172Suche in Google Scholar PubMed

[52] S. Schröder and A. Duparré, Measurement of light scattering, transmittance, and reflectance, in ‘Laser-Induced Damage in Optical Materials’, Ed. By D. Ristau (Taylor & Francis, Boca Raton, 2013).Suche in Google Scholar

[53] ISO 15368, ‘Optics and Optical Instruments – Measurement of Reflectance of Plane Surfaces and Transmittance of Plane Parallel Elements’ (International Organization for Standardization, Geneva, Switzerland, 2001).Suche in Google Scholar

[54] ISO 13697, ‘Optics and Photonics – Lasers and Laser Related Equipment – Test Methods for Specular Reflectance and Regular Transmittance of Optical Laser Components’ (International Organization for Standardization, Geneva, Switzerland, 2006).Suche in Google Scholar

Received: 2015-9-4
Accepted: 2015-10-3
Published Online: 2015-11-5
Published in Print: 2015-10-1

©2015 THOSS Media & De Gruyter

Heruntergeladen am 6.2.2026 von https://www.degruyterbrill.com/document/doi/10.1515/aot-2015-0041/html?lang=de
Button zum nach oben scrollen