Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement

Hung-Lin Hsieh; Ju-Yi Lee; Yu-Che Chung

doi:10.1515/aot-2014-0027

Article

Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement

Hung-Lin Hsieh
Hung-Lin Hsieh received the BS and MS degrees from the National Changhua University of Education, Taiwan, in 2001 and 2004, and his PhD degrees from the National Central University, Taiwan, and the University of Technology of Troyes, France, in 2011, respectively. He is currently an Assistant Professor of Mechanical Engineering (ME) and a member of the Opto-Mechatronics Technology Center, National Taiwan University of Science and Technology, Taiwan. His current research interests are optical metrology and precision motion control.
, Ju-Yi Lee
Ju-Yi Lee received his Master’s and PhD degrees from the Institute of Electro-Optical Engineering, the National Chiao Tung University of Taiwan in 1995 and 1999, respectively. In 2000, he was a researcher in Industrial Technology Research Institute of Taiwan. In 2004, he joined the Department of Mechanical Engineering, National Central University as an assistant professor, and has been an associate professor since 2008. His research interests are optical metrology and sensors.
and Yu-Che Chung
Yu-Che Chung received his BS degree in the Department of Mechanical Engineering, Chung Yuan Christian University in 2011. He is now working toward a MS degree at the Institute of Mechanical Engineering of National Central University of Taiwan. His current research activity is optical metrology.

Published/Copyright: July 11, 2014

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From the journal Advanced Optical Technologies Volume 3 Issue 4

Abstract

A wavelength-modulated heterodyne grating shearing interferometry using a birefringent crystal is proposed for two-dimensional displacement measurement. There is a difference in the optical path lengths of the p- and s- polarizations of the light beam in the birefringent crystal because of the double refraction caused by the birefringence. By passing through the unequal-path-length optical configuration, the wavelength-modulated light beam is converted into a heterodyne light beam having two frequencies. The modulated heterodyne light beam is further combined with grating-shearing interferometry based on the quasi-common-optical-path (QCOP) design concept. According to the working principle and the Jones calculation, the displacement information of a moving grating can be obtained by means of the optical phase variation resulting from the grating. Theoretical analysis shows that the measurement sensitivity of the proposed method is about 0.134°/nm. The experimental results indicate that the resolution is about 10 nm for the centimetric-level measurement range.

Keywords: birefringence; diffraction gratings; heterodyne; interferometry.

Corresponding author: Ju-Yi Lee, Department of Mechanical Engineering, National Central University, 300 Jhongda Road, Jhongli City, Taoyuan County 320, Taiwan, e-mail: juyilee@ncu.edu.tw

About the authors

Hung-Lin Hsieh

Hung-Lin Hsieh received the BS and MS degrees from the National Changhua University of Education, Taiwan, in 2001 and 2004, and his PhD degrees from the National Central University, Taiwan, and the University of Technology of Troyes, France, in 2011, respectively. He is currently an Assistant Professor of Mechanical Engineering (ME) and a member of the Opto-Mechatronics Technology Center, National Taiwan University of Science and Technology, Taiwan. His current research interests are optical metrology and precision motion control.

Ju-Yi Lee

Ju-Yi Lee received his Master’s and PhD degrees from the Institute of Electro-Optical Engineering, the National Chiao Tung University of Taiwan in 1995 and 1999, respectively. In 2000, he was a researcher in Industrial Technology Research Institute of Taiwan. In 2004, he joined the Department of Mechanical Engineering, National Central University as an assistant professor, and has been an associate professor since 2008. His research interests are optical metrology and sensors.

Yu-Che Chung

Yu-Che Chung received his BS degree in the Department of Mechanical Engineering, Chung Yuan Christian University in 2011. He is now working toward a MS degree at the Institute of Mechanical Engineering of National Central University of Taiwan. His current research activity is optical metrology.

Acknowledgments

This study is supported by the Ministry of Science and Technology, Taiwan, under contract numbers NSC-102-2221-E-011-092 and NSC 100-2221-E-008-074-MY3

Author contributions

H-L H. and J-Y L. designed the optical configuration. H-L H. and Y-C C. set up the experimental system and carried out the experiments. J-Y L. and Y-C C analyzed the acquired data. J-Y L. and H-L H. derived and estimated the error influence. H-L H., J-Y L. and Y-C C. prepared the original manuscript.

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Received: 2014-4-17

Accepted: 2014-6-16

Published Online: 2014-7-11

Published in Print: 2014-8-1

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Articles in the same Issue

https://doi.org/10.1515/aot-2014-0027

Keywords for this article

birefringence; diffraction gratings; heterodyne; interferometry.