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Atomic layer deposition: state-of-the-art and research/industrial perspectives

  • Elia Marin , Alex Lanzutti , Francesco Andreatta , Maria Lekka , Luis Guzman and Lorenzo Fedrizzi
Published/Copyright: October 13, 2011

Published Online: 2011-10-13
Published in Print: 2011-11-01

©2011 by Walter de Gruyter Berlin Boston

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