Observation of an Anomalously High Etch Rate in Plasma-Enhanced CVD Silicon Nitride Films

Chapters in this book

1. Frontmatter I
2. Classification Scheme II
3. Author Index V
4. Contents 3
5. Original Papers
6. Structure
7. Neutron Scattering Investigation on Molten Ga-Te Alloys 11
8. Double Laue Pattern Topography of Top-Seeded BaTiOs Single Crystals Using White Synchrotron X-Radiation 19
9. On Mössbauer Analysis of Mineral Mixtures Having Environmentally Broadened Spectral Lines 31
10. Surface Composition of the Ordered Al50-Co50 Alloy 39
11. Pulsed Ion Beam Annealing of Ti-Au Alloys 49
12. Crystal Structure of Fe₂TiO₅ 55
13. The Segregation of Iron in Tungsten 65
14. Photoeffect in X-Ray Grazing Incidence Diffraction 73
15. High Resolution Electron Microscopic Investigations of Dislocations in Deformed GaAs Single Crystals Doped with Te 79
16. Lattice properties
17. Thermal Expansion of CuInTea from 30 to 300 K 87
18. Separation of Thermal Component in Diffuse Scattering from Disordered Binary Alloys 95
19. Electrooptic Properties of Rb₂ZnCl₄ in the Incommensurate and Ferroelectric Phases 103
20. Optical Properties of Bi₁₂Si _1-x Ti_xO₂₀ Single Crystals 113
21. Defects, atomistic aspects
22. X-Ray Diffraction Contrast and Ray-Paths in the Case of a Dislocation in a Particular Position 119
23. Theoretical Study of the Temperature Dependence of EBIC Contrast from Individual, Surface-Parallel Dislocations in a Schottky Diode 133
24. On the Gettering Efficiency of Crystal Defects in Silicon 143
25. The Exodiffusion of Hydrogen in Dislocated Crystalline Silicon 149
26. Internal Friction in High-Purity Aluminium Single Crystals 157
27. Paramagnetic Centres in Aluminium-Oxide Layers Prepared by Anodic Oxidation 165
28. Diffusion of Impurities in Undercooled Melt of Pulse Heated Ion-Implanted Silicon 171
29. Study of Thermochemically Reduced and Electron-Irradiated LiNbO₃ Single Crystals by Positron Annihilation and Optical Absorption Measurements 179
30. A New Long-Period Derivative of the Au₅Mn₂ Structure 185
31. Magnetism
32. Mössbauer Studies of Small Magnetite Particles of a Magnetic Fluid 193
33. Propriétés magnétiques de MnRhAs 199
34. The Effect of H₂ Absorption on the Magnetic Properties of Gd-Pd Intermetallic Compounds 207
35. Effect of Magnetic Vacancies on Magnetic Properties of Terbium Orthoferrites 215
36. Distortion of the AFMR Line by the RF Field Power 223
37. Pressure Effect on Magnetic Transformations in the Co_xNi _1-x MnGe System 229
38. Localised electronic states and transitions
39. New Oxygen-Induced Recombination Centres in 600 to 800 °C Heat-Treated Silicon 237
40. Evaluation of Chromium Concentration in Semi-Insulating (*aAs:Cr from Optical Absorption 243
41. Influence of the Temperature Dependence of the Thermal Impurity Activation Energy on the Analysis of Hall Measurements on GaP 251
42. Specific Features of Piezogalvanomagnetic Effects in Oxygen-Containing Silicon Crystals in the Presence of Thermal Donors-I and -II 263
43. The Influence of Alkali Atoms Implanted in Silicon on the Negative Secondary Ion Emission 269
44. Spatial Distribution of Localized Electronic States Responsible for the Polarization of Granular Insulating Thin Films 273
45. The Influence of Deep Levels on Photoemomry Effect in Structures with a Potential Barrier 285
46. Electric transport
47. Electrical Conduction in PbMoO₄ Crystals 291
48. Exclusion Effect Quenching in Compensated Semiconductors under the Action of Impurity Illumination Generating Majority Current Carriers 301
49. Effective Diffusion Length of Minority Carriers in Polycrystalline Silicon 311
50. Measurement of Electrical Potential Distribution in a Polymer near the Contact to a Metal by Means of Scanning Electron Microscopy 319
51. Computer Simulation and Analytical Solutions in the Study of the Transient Radiation-Induced Conductivity in Polymers 327
52. The Annealing Effect on the Conduction Mechanism of Copper Ferrite 337
53. Device-related phenomena
54. Evidence of Schottky Barrier Formation at Contact oi Metal with Chalcogenide Glassy Semiconductor 343
55. Short Notes
56. Observation of an Anomalously High Etch Rate in Plasma-Enhanced CVD Silicon Nitride Films 357
57. Thermal Expansion of Sodium-Cadmium Formate. Powder Data 361
58. On the Sign Choice in the Darwin Solution for X-Ray Diffraction in a Semi-Infinite Crystal 363
59. Phosphorus Pressure Effects on GaP Crystal Quality in the Solution Growth 365
60. Auger Analysis of a GaAs (111 )A Surface after Its Contact with the In-Ga-As-P Saturated Liquid 369
61. An Infrared Study of As₂O₃ Glasses 373
62. Electron Microscope and Electron Diffraction Studies of Amorphization Phenomena in Ge Implanted with Te Ions 379
63. Photobleaching Behaviours of Rhodamine 6G Diffused in Polymethyl Methacrylate and in the Copolymer of Methyl Methacrylate with Methacrylic Acid 385
64. A Mechanism for Drag on Dislocations in Zinc 391
65. Ge and Au Profiles in GaAs Produced from AuGe Contacts and Studied by SIMS 395
66. The EBIC Contrast of Dislocation Slip Planes in Silicon 399
67. The Magnetic Properties of l^TI^ ^Se Solid Solution 403
68. Magnetic Properties of the Fe_xCo _1-x Cr₂S₄(0 <x <1) System 407
69. Initial Permeability of Amorphous Films with Multilayered Structure 411
70. The Mossbauer Effect and Magnetic Susceptibilities in Ga₂Se₃:⁵⁷Fe Single Crystals 415
71. Effect of Scandium Ions on Magnetic Properties of Dysprosium Orthoferrite 419
72. On the Role of Cu Atoms on the Behaviour of Domain Wall-Dislocation Interaction in Ni-Cu Alloy 423
73. Energy Band Diagrams, of Cu₂S-Zn_xCd _1-x S (0 ≤ x ≤ 1)Heterojunctions 427
74. Thermoluminescence Studies of CaS Single Crystals in the Temperature Range 8 to 2 75 K 431
75. Two Stimulated Emission ⁴F _3/2 ->₄I _11/2.13/2 Channels of Nd ³⁺ Ions in Crystals of the CaF₂-ScF₃ System 437
76. On the Electrical Transport Phenomena in Thin Wires 441
77. Photoconductivity of Flash Evaporated CuInSe₂ Thin Films 445
78. Dielectric Properties of HbCl-Single Crystals 449
79. Pre-Printed Titles 453