Chapter 5. Micros-machined thermal control thin-film devices

Chapters in this book

1. Frontmatter I
2. Preface V
3. Preface from authors VII
4. Contents IX
5. Chapter 1. Introduction 1
6. Chapter 2. Single-structure passive thermal control films 18
7. Chapter 3. Multilayer composite structure passive thermal control film 68
8. Chapter 4. Intelligent thermal control thin films 103
9. Chapter 5. Micros-machined thermal control thin-film devices 129
10. Chapter 6. Preparation, characterization, and detection of thermal control thin films 195
11. Chapter 7. Test technique for thermal control thin films 263
12. References 271
13. Index 275