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Microstructure of MoSi2-base nanocomposite coatings formed on Mo substrates by chemical vapor deposition

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Veröffentlicht/Copyright: 22. Januar 2022
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International Journal of Materials Research
Aus der Zeitschrift International Journal of Materials Research Band 96 Heft 3

Abstract

The microstructures and formation processes of MoSi2 – Si3N4 or MoSi2 – SiC nanocomposite coatings on Mo substrates by ammonia nitridation or carburizing process followed by chemical vapor deposition of Si was investigated using optical microscopy, field-emission scanning electron microscopy (SEM), cross-sectional transmission electron microscopy (XTEM), and X-ray diffraction (XRD). The present study demonstrated that the crack density formed in the MoSi2-base nanocomposite coatings due to mismatch in the coefficient of thermal expansion (CTE) between the nanocomposite coatings and the Mo substrate could be reduced by the control of volume percentage of the Si3N4 or SiC particles with the low CTE values. Especially, no cracks were observed in the MoSi2-(30– 33) vol.% Si3N4 nanocomposite coating, indicating that its CTE value was close to that of the Mo substrate. The microstructure of MoSi2-base nanocomposite coatings showed the oblate-spheroidal-type Si3N4 or SiC particles dispersed in the equiaxed MoSi2 grains. The average size of equiaxed MoSi2 grains ranged from 300 to 100 nm depending on the processes, and that of Si3N4 or SiC particles ranged from 150 to 90 nm. The growth of MoSi2 grains was inhibited by the nanosize Si3N4 or SiC particles located mostly at the grain boundaries of MoSi2.

Keywords: CVD; MoSi2-base nanocomposite coating; Microstructure; Molybdenum
Jin-Kook Yoon Metal Procening Research Center Korea Institute of Science and Technology P.O. Box 1 31 Cheongryang, Seoul, 130-650, Korea Tel.: +82 2958 5376 Fax: +82 22 958 5379

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Received: 2004-06-03
Accepted: 2004-11-02
Published Online: 2022-01-22

© 2005 Carl Hanser Verlag, München

Artikel in diesem Heft

  1. Frontmatter
  2. Editorial
  3. Editorial
  4. Articles Basic
  5. Effect of substrate materials in the low-pressure synthesis of diamond: approach by theory of charged clusters
  6. Effect of gas nitriding in flowing ammonia on the hot-dip galvanising of the Dual-Phase steel DP500
  7. Nanoscaled multilayers for magnetoelectronics – characterised by analytical TEM
  8. Obtaining different orientation relationships for Cu films grown on (0001) α-Al2O3 substrates by magnetron sputtering
  9. Effect of the W–W contiguity on conductivity of W–Cu composite using the Voronoi diagram
  10. Current understanding of annealing texture evolution in thin films and interconnects
  11. Articles Applied
  12. The effect of zirconium on corrosion behavior of NiAl intermetallic compound in molten carbonate salt
  13. Effects of annealing temperature and time on the microstructural evolution and corresponding mechanical properties of 5083 Al alloy deformed at cryogenic and room temperatures
  14. Microstructure of MoSi2-base nanocomposite coatings formed on Mo substrates by chemical vapor deposition
  15. Regular Articles Applied
  16. In-situ hot pressing/solid-liquid reaction synthesis of bulk Cr2AlC
  17. Wear of conventional and experimental aluminium bearing alloys sliding under lubrication
  18. Observations and analysis of the peritectic reaction for Fe–Co Alloys
  19. Notifications/Mitteilungen
  20. Personal/Personelles
  21. News/Aktuelles
  22. Conferences
https://doi.org/10.3139/ijmr-2005-0050
Schlagwörter für diesen Artikel
CVD; MoSi2-base nanocomposite coating; Microstructure; Molybdenum

Artikel in diesem Heft

  1. Frontmatter
  2. Editorial
  3. Editorial
  4. Articles Basic
  5. Effect of substrate materials in the low-pressure synthesis of diamond: approach by theory of charged clusters
  6. Effect of gas nitriding in flowing ammonia on the hot-dip galvanising of the Dual-Phase steel DP500
  7. Nanoscaled multilayers for magnetoelectronics – characterised by analytical TEM
  8. Obtaining different orientation relationships for Cu films grown on (0001) α-Al2O3 substrates by magnetron sputtering
  9. Effect of the W–W contiguity on conductivity of W–Cu composite using the Voronoi diagram
  10. Current understanding of annealing texture evolution in thin films and interconnects
  11. Articles Applied
  12. The effect of zirconium on corrosion behavior of NiAl intermetallic compound in molten carbonate salt
  13. Effects of annealing temperature and time on the microstructural evolution and corresponding mechanical properties of 5083 Al alloy deformed at cryogenic and room temperatures
  14. Microstructure of MoSi2-base nanocomposite coatings formed on Mo substrates by chemical vapor deposition
  15. Regular Articles Applied
  16. In-situ hot pressing/solid-liquid reaction synthesis of bulk Cr2AlC
  17. Wear of conventional and experimental aluminium bearing alloys sliding under lubrication
  18. Observations and analysis of the peritectic reaction for Fe–Co Alloys
  19. Notifications/Mitteilungen
  20. Personal/Personelles
  21. News/Aktuelles
  22. Conferences
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