Development of a Non-uniform Heating System for Micro Hot Embossing
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C.-H. Yang
Abstract
In recent years, many replication methods of microstructures on large-area substrates have been reported. The plate-to-plate hot embossing process is a low cost, fast, high throughput and the most possibility of mass production method for replication of micro/nano structures with high precision and high quality. However, micro hot embossing is not practical to use in mass production due to the many difficulties. This paper reports a innovative non-uniform heating hot embossing system for fabrication of large-size, high precise and high brightness light guide plate. Steam is used as heating medium, and water of 12°C is used for cooling. The v-groove patterns in the stamper have been replicated to the light guide plates (LGPs) with an area of 488 mm by 277 mm. The experimental results show that the non-uniform heating system could achieve a transcription rate of over 99%, compared with 95% using conventional uniform heating system. Furthermore, less warpage, the less thickness variation, the higher average luminance and the higher brightness field distribution have been found. The results indicate that non-uniform heating system is likely to be a promising technique for the fabrication of optical elements.
References
Chang, J. H., Yang, S. Y., “Gas Pressurized Hot Embossing for Transcription of Micro-features” Microsyst. Technol., 10, 76–80 (2003), http://dx.doi.org/10.1007/s00542-003-0311-1Search in Google Scholar
Chang, J. H., Yang, S. Y., “Development of Fluid-Based Heating and Pressing Systems for Micro Hot Embossing” Microsyst. Technol., 11, 396–403 (2005), http://dx.doi.org/10.1007/s00542-004-0481-5Search in Google Scholar
Glinsner, T., Veres, T., Kreindl, G., Roy, E., Morton, K., Wieser, T., Thanner, C., Treiblmayr, D., Miller, R., Lindner, P., “Fully Automated Hot Embossing Processes Utilizing High Resolution Working Stamps” Microelectron. Eng., 87, 1037–1040 (2010), http://dx.doi.org/10.1016/j.mee.2009.11.098Search in Google Scholar
Heydermana, L. J., Schift, H., David, C., Gobrecht, J., Schweizer, T., “Flow Behaviour of Thin Polymer Films Used for Hot Embossing Lithography” Microelectron. Eng., 54, 229–245 (2000), http://dx.doi.org/10.1016/S0167-9317(00)00414-7Search in Google Scholar
Huang, C. F., Shen, Y. K., Lin, Y., Yang, J. C., Wu, C. W., “Luminance and Brightness Field Distribution of Light Guiding Plate for Backlight Panel (BLP) by Micro Molding” Polym. Adv. Technol., 19, 1887–1893 (2008), http://dx.doi.org/10.1002/pat.1224Search in Google Scholar
Huang, P. H., Huang, T. C., Sun, Y. T., Yang, S. Y., “Fabrication of Large Area Resin Microlens Arrays Using Gas-assisted Ultraviolet Embossing” Opt. Express, 16, 3041–3048 (2008), http://dx.doi.org/10.1364/OE.16.003041, PMid:18542390Search in Google Scholar
Huang, P. H., Huang, T. C., Sun, Y. T., Yang, S. Y., “Large-Area and Thin Light Guide Plate Fabricated Using UV Base Imprinting” Opt. Express, 16, 15033–15038 (2008), http://dx.doi.org/10.1364/OE.16.015033, PMid:18795040Search in Google Scholar
Juang, Y. J., “Hot Embossing in Microfabrication. Part I: Experimental” Polym. Eng. Sci., 42, 539–550 (2002), http://dx.doi.org/10.1002/pen.10970Search in Google Scholar
Kimerling, T. E., Liu, W., Kim, B. H., Yao, D., “Rapid Hot Embossing of Polymer Microfeatures” Microsyst. Technol., 12, 730–735 (2006), http://dx.doi.org/10.1007/s00542-006-0098-ySearch in Google Scholar
Liu, C. J., Li, J. M., Liu, J. S., Wang, L. D., “Deformation Behavior of Solid Polymer during Hot Embossing Process” Microelectron. Eng., 87, 200–207 (2010), http://dx.doi.org/10.1016/j.mee.2009.07.014Search in Google Scholar
Nian, S. C., Yang, S. Y., “Flow Visualization of Filling Process during Micro-injection” Int. Polym. Proc., 17, 354–360 (2002)Search in Google Scholar
Nian, S. C., Yang, S. Y., “Flow Visualization of Filling with Aid of Colored Billets during Impact Micro-injection Molding” Int. Polym. Proc., 19, 402–407 (2004)Search in Google Scholar
Peroz, C., Dhuey, S., Volger, M., Wu, Y., Olynick, D., Cabrini, S., “Step and Repeat UV Nanoimprint Lithography on Pre-spin Coated Resist Film: A Promising Route for Fabricating Nanodevices” Nanotechnol., 21, 445301–445306 (2010), http://dx.doi.org/10.1088/0957-4484/21/44/445301, PMid:20921594Search in Google Scholar
Weng, Y. J., Weng, Y. C., Yang, S. Y., Wong, J. L., “ Study on the Formation Defect of Nano Imprinted Optical Waveguide Devices and Nano-indentation Detection” Polym. Adv. Technol., 19, 1704–1709 (2008), http://dx.doi.org/10.1002/pat.1164Search in Google Scholar
Worgull, M., Heckele, M., Schomburg, W. K., “Large-scale Hot Embossing” Microsyst. Technol., 12, 110–115 (2005), http://dx.doi.org/10.1007/s00542-005-0012-zSearch in Google Scholar
Wu, C. H., Lu, C. H., “Fabrication of an LCD Light Guide Plate Using Closed-die Hot Embossing” J. Micromech. Microeng., 18, 035006–035015 (2008), http://dx.doi.org/10.1088/0960-1317/18/3/035006Search in Google Scholar
Wu, J. T., Yang, S. Y., “A Gasbag-roller-assisted UV Imprinting Technique for Fabrication of a Microlens Array on a PMMA Substrate” J. Micromech. Microeng., 20, 085038–085044 (2010), http://dx.doi.org/10.1088/0960-1317/20/8/085038Search in Google Scholar
Yang, J. C., Huang, C. C., “Using UV Roll-to-Plate Imprint Lithography to Fabricate Light Guide Plates with Microdot Patterns” Micro. Nano Lett., 7, 244–247 (2012), http://dx.doi.org/10.1049/mnl.2012.0097Search in Google Scholar
© 2013, Carl Hanser Verlag, München
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- Recent Research Progress on Polymer Grafted Carbon Black and Its Novel Applications
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- Fabrication of Electrospun Chitosan and Chitosan/Poly(ethylene oxide) Nanofiber Webs and Assessment of Their Antimicrobial Activity
- Effect of Nano-Particles on Flow and Recovery of Polymer Nano-Composites in the Melt State
- Differential Molding System for Micro Injection Molding of Thermoplastics
- The Effect of Shear Strain Amplitude and Loading Cycle on the Horizontal Characteristics of Fiber Reinforced Nanocomposite Elastomeric Seismic Isolators
- The Effect of Feeding Method and Compatibilizer on Nanoclay Partitioning and Microfibrillar Morphology Development in PP/PBT/Organoclay Blend Nanocomposite Fibers
- Effect of Hot Water and Water-carrying Agent on the Properties of Silane-water Crosslinked Linear Low Density Polyethylene
- Preparation and Characterization of Melamine Modified Urea-Formaldehyde Foam
- The Role of Organoclay on In-situ Microfibril Formation of Epoxy in Poly(butylene terephtalate) Nanocomposites
- Evaluation of Thermo-Mechanical and Wear Behavior of Short Carbon Fibre Vinyl-Ester Filled Homogenous and Their Functionally Graded Composites
- Factors Influencing the Warpage in In-Mold Decoration Injection Molded Composites
- Preparation and Characterization of CaCO3/High Density Polyethylene Composites with Various Shapes and Size of CaCO3
- Development of a Non-uniform Heating System for Micro Hot Embossing
- Processing of Thermally Stable Polymer Nanocomposites Reinforced Silicate Nanoparticles Based on N-trimellitylimido-L-phenyl alanine
- PPS-News
- PPS-News
- Seikei Kakou Abstracts
- Seikei Kakou Abstracts
Articles in the same Issue
- Contents
- Contents
- Review Paper
- Recent Research Progress on Polymer Grafted Carbon Black and Its Novel Applications
- Regular Contributed Articles
- Fabrication of Electrospun Chitosan and Chitosan/Poly(ethylene oxide) Nanofiber Webs and Assessment of Their Antimicrobial Activity
- Effect of Nano-Particles on Flow and Recovery of Polymer Nano-Composites in the Melt State
- Differential Molding System for Micro Injection Molding of Thermoplastics
- The Effect of Shear Strain Amplitude and Loading Cycle on the Horizontal Characteristics of Fiber Reinforced Nanocomposite Elastomeric Seismic Isolators
- The Effect of Feeding Method and Compatibilizer on Nanoclay Partitioning and Microfibrillar Morphology Development in PP/PBT/Organoclay Blend Nanocomposite Fibers
- Effect of Hot Water and Water-carrying Agent on the Properties of Silane-water Crosslinked Linear Low Density Polyethylene
- Preparation and Characterization of Melamine Modified Urea-Formaldehyde Foam
- The Role of Organoclay on In-situ Microfibril Formation of Epoxy in Poly(butylene terephtalate) Nanocomposites
- Evaluation of Thermo-Mechanical and Wear Behavior of Short Carbon Fibre Vinyl-Ester Filled Homogenous and Their Functionally Graded Composites
- Factors Influencing the Warpage in In-Mold Decoration Injection Molded Composites
- Preparation and Characterization of CaCO3/High Density Polyethylene Composites with Various Shapes and Size of CaCO3
- Development of a Non-uniform Heating System for Micro Hot Embossing
- Processing of Thermally Stable Polymer Nanocomposites Reinforced Silicate Nanoparticles Based on N-trimellitylimido-L-phenyl alanine
- PPS-News
- PPS-News
- Seikei Kakou Abstracts
- Seikei Kakou Abstracts