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The Quality of Prepared Specimens of Si-Wafers for Raman Spectroscopy

  • F. Kolb

    Franziska Kolb was a former member of the Chair for Ferrous Metallurgy at the Montan University of Leoben. Her task was to prepare iron ores and reduced materials in co-operation with the chair of Geology and Economic Geology. In 2013 she joined the Materials Center Leoben Forschung GmbH in the field of Micro-electronics.

    , M. Deluca

    Marco Deluca obtained his PhD in Materials Science from the Kyoto Institute of Technology (Japan) in 2009. He then joined the Materials Center Leoben Forschung GmbH, where he is presently in charge of Raman Spectroscopy, mainly for the study of structural-property relationships in electro-ceramic and semi-conductor materials.

    and G. A. Maier
Published/Copyright: February 24, 2022
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Abstract

In order to be able to carry out reliable measurements using a Raman Spectrometer it is important to know what stresses and localised changes have been induced in the specimen by the preparation process. To investigate this, a trial was set up to investigate the changes which occur in the structure of the material as a result of the specimen preparation process, thus leading to an optimum method of preparation for Raman Spectroscopy.

Kurzfassung

Um gute Messungen am Raman-Spektrometer durchführen zu können, ist es wichtig zu wissen, welche Spannungen bzw. lokale Änderungen in der Probe erst durch die Präparation entstanden sind. Hierfür wurde ein Versuchsaufbau erstellt, der über die entstandenen Veränderungen der Materialstruktur Aufschluss gibt und somit eine optimale Schliffpräparation für die Raman-Spektroskopie ermöglicht.


Translation: P. Tate


About the authors

F. Kolb

Franziska Kolb was a former member of the Chair for Ferrous Metallurgy at the Montan University of Leoben. Her task was to prepare iron ores and reduced materials in co-operation with the chair of Geology and Economic Geology. In 2013 she joined the Materials Center Leoben Forschung GmbH in the field of Micro-electronics.

M. Deluca

Marco Deluca obtained his PhD in Materials Science from the Kyoto Institute of Technology (Japan) in 2009. He then joined the Materials Center Leoben Forschung GmbH, where he is presently in charge of Raman Spectroscopy, mainly for the study of structural-property relationships in electro-ceramic and semi-conductor materials.

Acknowledgement

The financial support from the Austrian Federal Government (and in particular from the Bundesministerium für Verkehr, Innovation und Technologie and the Bundesministerium für Wissenschaft, Forschung und Wirtschaft) represented by the Österreichische Forschungsförderungsgesellschaft mbH and the Styrian and Tyrolean Provincial Government, represented by the Steirische Wirtschaftsförderungsgesellschaft mbH and the Standortagentur Tirol, within the framework of the COMET Funding Programme, is gratefully acknowledged.

Danksagung

Der österreichischen Bundesregierung (insbesondere dem Bundesministerium für Verkehr, Innovation und Technologie und dem Bundesministerium für Wissenschaft, Forschung und Wirtschaft) vertreten durch die Österreichische Forschungsförderungsgesellschaft mbH (FFG), und den Ländern Steiermark und Tirol, vertreten durch die Steirische Wirtschaftsförderungsgesellschaft mbH (SFG) sowie die Standortagentur Tirol, wird für die Förderung im Rahmen des COMET Förderprogramms herzlich gedankt.

References / Literatur

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Received: 2015-03-30
Accepted: 2015-04-10
Published Online: 2022-02-24

© 2015 Walter de Gruyter GmbH, Berlin/Boston, Germany

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