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New Ways of Revealing the Microstructures of SiC Materials

  • K. Sempf , M. Herrmann and U. Sydow
Published/Copyright: June 11, 2013
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Abstract

In order to understand the relationships which exist between the microstructures and mechanical properties of ceramic materials and to clarify their respective mechanisms of corrosion, a detailed picture of their microstructures is of particular importance. The examination of such structures using field emission scanning electron microscopy in combination with EDX analysis as well as the FIB technique are demonstrated on polished and electrochemically corroded LPS (liquid phase sintered SiC) and SSiC materials. The possibilities for revealing the diffusion zones in semi-conducting SiC grains are presented. These methods also help to explain the core-shell structures caused by electrochemical corrosion.

Kurzfassung

Für das Verständnis von Gefüge-Eigenschaftsbeziehungen sowie zur Aufklärung von Korrosionsmechanismen sind die detaillierten Gefügedarstellungen an keramischen Werkstoffen von großer Bedeutung. Die Möglichkeiten der detailierten Gefügedarstellung mittels hochauflösender Feldemissionsrasterelektronenmikroskopie in Kombination mit der EDX-Analyse sowie der FIB-Technik werden an polierten und elektrochemisch korrodierten LPS- (liquid phase sintered SiC) und SSiC-Werkstoffen demonstriert. Möglichkeiten der Darstellung von Diffusionszonen in halbleitenden SiC-Körnern werden vorgestellt. Diese Methoden erlauben auch die durch elektrochemische Korrosion beobachteten Kern-Hülle-Strukturen zu erklären.


Translation: P. Tate


References / Literatur

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Received: 2011-2-3
Accepted: 2011-8-30
Published Online: 2013-06-11
Published in Print: 2012-02-01

© 2012, Carl Hanser Verlag, München

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