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Focused Ion Beam: A Versatile Technique for the Fabrication of Nano-Devices

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Published/Copyright: May 5, 2013
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Received: 2008-9-1
Accepted: 2008-12-5
Published Online: 2013-05-05
Published in Print: 2009-03-01

© 2009, Carl Hanser Verlag, München

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