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Deposition temperature dependence on the bonding structure and mechanical properties of laser ablated boron-carbonitride thin films

  • Zhuo Chen , Haixia Liu and Chuanbin Wang
Published/Copyright: December 4, 2019
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 110 Issue 12

Abstract

Boron-carbonitride thin films were synthesized on Si (100) substrates by laser ablation, and the effect of deposition temperatures on the bonding structure and mechanical properties were studied to enhance the mechanical properties. The results of Fourier-transform infrared spectroscopy and X-ray photoelectron spectroscopy demonstrated that B–N, B–C, N–C and N=C bonds coexisted in the thin films with the ternary B–C–N hybridization structure. The deposition rate decreased as deposition temperatures increased, and the hardness and modulus fluctuated between 14.5 and 27.2 GPa and 146 and 246 GPa, respectively. The law of evaluation of the mechanical properties with deposition temperatures was found to be related to the changes in the bonding structure, and the maximum hardness and modulus were 27.2 GPa and 246 GP, respectively, when deposition temperature reached 400°C.

Keywords: Boron-carbonitride thin films; Deposition temperature; Mechanical properties; Bonding structure; Laser ablation
∗Correspondence address, Chuanbin Wang, State Key Lab of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, 122 Luoshi Road, Wuhan 430070, P.R. China, E-mail:

References

[1] R.Gago, I.Jiménez, J.M.Albella: Appl. Phys. Lett.78 (2001) 3430–3432. 10.1063/1.1376428Search in Google Scholar

[2] A.Essafti, E.Ech-chamikh: J. Mater. Sci.46 (2011) 5847–5850. 10.1007/s10853-011-5541-5Search in Google Scholar

[3] B.J.Matsoso, K.Ranganathan, B.K.Mutuma, T.Lerotholi, G.Jones, N.J.Coville: Nanotechnology28 (2017) 105602. 28054509 10.1088/1361-6528/aa56dfSearch in Google Scholar PubMed

[4] M.L.Kosinova, Yu. M.Rumyantsev, A.N.Golubenko, N.I.Fainer, B.M.Ayupov, I.P.Dolgovesova, B.A.Kolesov, V.V.Kaichev, F.A.Kuznetsov: Inorg. Mater.39 (2003) 366–373. 10.1023/A:1023227716045Search in Google Scholar

[5] V.S.Sulyaeva, M.L.Kosinov, Y.M.Rumyantsev, F.A.Kuznetsov, V.G.Kesler, V.V.Kirienko: Thin Solid Films558 (2014) 112–117. 10.1016/j.tsf.2014.02.082Search in Google Scholar

[6] F.Zhou, Q.Z.Wang, B.Yue, X.M.Wu, L.J.Zhuge, X.N.Cheng: Mater. Chem. Phys.138 (2013) 215–224. 10.1016/j.matchemphys.2012.11.049Search in Google Scholar

[7] M.A.Meeker, S.Kundu, D.Maurya, M.G.Kang, A.Sosa, R.R.Mudiyanselage, G.A.Khodaparast: Opt. Mater.73 (2017) 793–798. 10.1016/j.optmat.2017.09.040Search in Google Scholar

[8] E.Byon, J.K.Kim, S.Lee, J.H.Hah, K.Sugimoto: Surf. Coat. Technol.169–170 (2003) 340–343. 10.1016/S0257-8972(03)00102-6Search in Google Scholar

[9] E.Salas, R.J.Jiménez Ribóo, J.Sánhez-Marcos, F.Jiménez-Villacorta, A.Muoz-Martín, J.E.Prieto, V.Joco, C.Prieto: J. Appl. Phys.114 (2013) 213508–213514. 10.1063/1.4837655Search in Google Scholar

[10] H.S.Kim, I.H.Choi, Y.J.Baik: Surf. Coat. Technol.133–134 (2000) 473–477. 10.1016/S0257-8972(00)00924-5Search in Google Scholar

[11] Y.Etou, T.Tai, T.Sugiyama, T.Sugino: Diamond Relat. Mater.11 (2002) 985–988. 10.1016/S0925-9635(01)00593-3Search in Google Scholar

[12] C.Q.Zhuang, J.J.Zhao, F.C.Jia, C.Y.Guan, Z.L.Wu, Y.Z.Bai, X.Jiang: Surf. Coat. Technol.204 (2009) 713–717. 10.1016/j.surfcoat.2009.09.031Search in Google Scholar

[13] S.C.Chien, S.Chattopadhyay, L.C.Chen, S.T.Lin, K.H.Chen: Diamond Relat. Mater.12 (2003) 1463–1471. 10.1016/S0925-9635(03)00175-4Search in Google Scholar

[14] F.C.Jia, C.Q.Zhuang, C.Y.Guan, J.J.Zhao, Y.Z.Bai, X.Jiang: Vacuum85 (2011) 887–891. 10.1016/j.vacuum.2011.01.004Search in Google Scholar

[15] M.A.Mannan, H.Noguchi, T.Kida, M.Nagano, N.Hirao, Y.Baba: Thin Solid Films518 (2010) 4163–4169. 10.1016/j.tsf.2009.11.086Search in Google Scholar

[16] M. AbdulMannan, M.Nagano, T.Kida, N.Hirao, Y.Baba: J. Phys. Chem. Solids70 (2009) 20–25. 10.1016/j.jpcs.2008.08.013Search in Google Scholar

[17] Q.Yang, C.B.Wang, S.Zhang, D.M.Zhang, Q.Shen, L.M.Zhang: Surf. Coat. Technol.204 (2010) 1863–1867. 10.1016/j.surfcoat.2009.11.033Search in Google Scholar

[18] H.A.Castillo, P.J.Arango, J.M.Vélez, E.Restrepo-Parra, G.Soto, W.De la Cruz: Surf. Coat. Technol.204 (2010) 4051–4056. 10.1016/j.surfcoat.2010.05.025Search in Google Scholar

[19] Y.Wada, Y.K.Yap, M.Yoshimura, Y.Mori, T.Sasaki: Diamond Relat. Mater.9 (2000) 620–624. 10.1016/S0925-9635(00)00204-1Search in Google Scholar

[20] X.Y.Chen, Z.H.Wang, S.L.Ma, V.Ji, P.K.Chu: Diamond Relat. Mater.19 (2010) 1225–1229. 10.1016/j.diamond.2010.06.013Search in Google Scholar

[21] W.C.Oliver, G.M.Pharr: J. Mater. Res.7 (1992) 1564–1583. 10.1557/JMR.1992.1564Search in Google Scholar

[22] R.Gago, I.Jimenez, J.M.Albella, Z.Czigany, L.Hultman: J. Appl. Phys.92 (2002) 5177–5182. 10.1063/1.1512317Search in Google Scholar

[23] I.Caretti, I.Jimenez, R.Gago, D.Caceres, B.Abendroth, J.M.Albella: Diamond Relat. Mater.13 (2004) 1532–1537. 10.1016/j.diamond.2003.09.011Search in Google Scholar

[24] H.Aoki, T.Masuzumi, D.Watanabe, M.K.Mazumder, H.Sota, C.Kimura, T.Sugino: Appl. Surf. Sci.255 (2009) 3635–3638. 10.1016/j.apsusc.2008.10.045Search in Google Scholar

[25] H.Künzli, P.Gantenbein, R.Steiner, P.Oelhafen: Fresenius J. Anal. Chem.346 (1993) 41–44. 10.1007/BF00321379Search in Google Scholar

[26] S.Z.Bai, B.Yao, G.Z.Xing, K.Zhang, W.H.Su: Physica B396 (2007) 214–219. 10.1016/j.physb.2007.04.007Search in Google Scholar

[27] M.N.Oliveira, A.M. Botelhodo Rego, O.Conde: Surf. Coat. Technol.100–101 (1998) 398–403. 10.1016/S0257-8972(97)00656-7Search in Google Scholar

[28] I.Jiménez, D.G.J.Sutherland, T.Van Buuren, J.A.Carlisle, L.J.Terminello: Phys. Rev. B57 (1998) 13167–13174. 10.1103/PhysRevB.57.13167Search in Google Scholar

[29] E.Riedo, F.Comin, J.Chevrier, A.M.Bonnot: J. Appl. Phys.88 (2000) 4365–4370. 10.1063/1.1309041Search in Google Scholar

[30] F.Zhou, K.Adachi, K.Kato: Thin Solid Films497 (2006) 210–217. 10.1016/j.tsf.2005.10.070Search in Google Scholar

[31] J.Wei, P.Hing: J. Appl. Phys.91 (2002) 2812–2817. 10.1063/1.1446224Search in Google Scholar

[32] A.Perrone, A.P.Caricate, A.Luches: Appl. Surf. Sci.133 (1998) 239–242. 10.1016/S0169-4332(98)00207-4Search in Google Scholar

[33] M.Dinescu, A.Perrone, A.P.Caricato, L.Mirenghi, C.Gerardi, C.Ghica, L.Frunza: Appl. Surf. Sci.127–129 (1998) 692–696. 10.1016/S0169-4332(97)00727-7Search in Google Scholar

[34] C.B.Wang, X.S.Luo, S.Zhang, Q.Shen, L.M.Zhang: Vacuum103 (2014) 68–71. 10.1016/j.vacuum.2013.12.009Search in Google Scholar

[35] M.Krausea, L.Bedel, An. Taupeau, U.Kreissig, F.Munnik, G.Abrasonis, A.Kolitsch, G.Radnoczi, Z.Czigány, A.Vanhulsel: Thin Solid Films518 (2009) 77–83. 10.1016/j.tsf.2009.06.030Search in Google Scholar

[36] X.M.Yang, X.M.Wu, L.J.Zhuge, F.Zhou: Appl. Surf. Sci.255 (2009) 4279–4282. 10.1016/j.apsusc.2008.11.025Search in Google Scholar

Received: 2018-10-12
Accepted: 2019-06-27
Published Online: 2019-12-04
Published in Print: 2019-12-10

© 2019, Carl Hanser Verlag, München

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https://doi.org/10.3139/146.111848
Keywords for this article
Boron-carbonitride thin films; Deposition temperature; Mechanical properties; Bonding structure; Laser ablation

Articles in the same Issue

  1. Contents
  2. Contents
  3. Editorial
  4. Editorial
  5. Original Contributions
  6. Effect of Cr and Ni on the microstructural evolution in Co–Re–Cr–Ni alloys
  7. Review
  8. Dynamic mechanical behavior of magnesium alloys: a review
  9. Original Contributions
  10. Composition dependence of the glass-forming ability and soft magnetic properties of Fe-rich Fe–Nb–B ternary alloys
  11. Deposition temperature dependence on the bonding structure and mechanical properties of laser ablated boron-carbonitride thin films
  12. Preparation of high-performance soft magnetic Fe-0.8% P alloy by powder metallurgy
  13. Preparations of superhydrophobic surfaces using the one-step spin coating method and characterizations of their anti-icing behavior
  14. Atomistic study of fracture behavior of metallic glass fiber reinforced metal-matrix nanocomposite during bending creep deformation process
  15. Development and characterization of eutectic Sn-Zn, Sn-Ag, Sn-Bi and Sn-Cu solder alloys
  16. Effect of current density and deposition time on the corrosion and wear resistance of Ni–W alloy coatings
  17. Short Communications
  18. Synthesis and characterization of layered perovskite cathode materials for SOFC application
  19. People
  20. Professor Elazar Gutmanas (28.10.1939 – 26.10.2019)
  21. DGM News
  22. DGM News
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