Article
Open Access
Nitrogen as a carrier gas for regime control in focused electron beam induced deposition
-
Stefan Wachter
,
Mostafa M. Shawrav
Published/Copyright:
May 27, 2014
Received: 2014-3-12
Accepted: 2014-4-11
Published Online: 2014-5-27
Published in Print: 2014-1-1
© 2014 Stefan Wachter et al.
Articles in the same Issue
- 10.2478/nanofab-2013-0001
- Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers
- Nitrogen as a carrier gas for regime control in focused electron beam induced deposition
- FEBID fabrication and magnetic characterization of individual nano-scale and micro-scale Co structures
- Focused Ion Beam nano-patterning from traditional applications to single ion implantation perspectives
- Focused Ion Beam Processing of Superconducting Junctions and SQUID Based Devices
- Mechanical magnetometry of Cobalt nanospheres deposited by focused electron beam at the tip of ultra-soft cantilevers
- Practical precursor aspects for electron beam induced deposition
Keywords for this article
FEBID;
carrier gas;
cobalt;
dicobalt octacarbonyl;
gas injection system;
GIS;
SEM;
nitrogen;
electron limited regime;
precursor limited regime
Creative Commons
BY-NC-ND 3.0
Articles in the same Issue
- 10.2478/nanofab-2013-0001
- Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers
- Nitrogen as a carrier gas for regime control in focused electron beam induced deposition
- FEBID fabrication and magnetic characterization of individual nano-scale and micro-scale Co structures
- Focused Ion Beam nano-patterning from traditional applications to single ion implantation perspectives
- Focused Ion Beam Processing of Superconducting Junctions and SQUID Based Devices
- Mechanical magnetometry of Cobalt nanospheres deposited by focused electron beam at the tip of ultra-soft cantilevers
- Practical precursor aspects for electron beam induced deposition
