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Determination of the Composition of TiNx and TiBxNy Films by AES

  • M. A. Baker , J. Haupt and W. Gissler
Published/Copyright: June 2, 2014

Received: 1994-12-9
Published Online: 2014-6-2
Published in Print: 1995-7-1

© 1946 – 2014: Verlag der Zeitschrift für Naturforschung

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