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DC/Microwave Driven Micro-Plasmas for Ozone Generation

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Published/Copyright: November 30, 2016
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Abstract

Atmospheric micro-plasmas were formed by DC or 2.45 GHz microwave source for generating ozone and other radicals. Oxygen at a pressure higher than atmospheric pressure passed through a small cavity of 0.2 - 0.5 mm in diameter where micro-plasmas were generated. The residence time of feed gas within the plasma region was microsecond order. Therefore, the plasma formation can be separated from the radical formation such as ozone and consequently the generated radicals are not dissociated by electron impacts in the micro-plasmas. Ozone gas of 14 g/Nm3 at 97 g/kWh was obtained by the DC driven micro- plasmas without a cooling system. The plasma characteristics and the ozone generation efficiency were compared between DC and microwave systems.

Received: 2004-2-15
Revised: 2004-3-31
Accepted: 2004-4-21
Published Online: 2016-11-30
Published in Print: 2004-7-1

© 2016 by Walter de Gruyter Berlin/Boston

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