Home Kinetic Rate Expression for längsten Chemical Vapor Deposition in Different WF6 Flow Regimes from Step Coverage Measurements
Article
Licensed
Unlicensed Requires Authentication

Kinetic Rate Expression for längsten Chemical Vapor Deposition in Different WF6 Flow Regimes from Step Coverage Measurements

  • E. J. McInerney , E. Srinivasan , D. C. Smith and G. Ramanath
Published/Copyright: October 24, 2023
Become an author with De Gruyter Brill
Author Information
International Journal of Materials Research
From the journal International Journal of Materials Research Volume 91 Issue 7

Published Online: 2023-10-24
Published in Print: 2000-07-01

© 2023 by Walter de Gruyter Berlin/Boston

Articles in the same Issue

  1. Inhalt
  2. Aufsätze
  3. Classification of the Solute Concentration Profiles in the Discontinuous Solid State Phase Transformations
  4. Mikrotribologische Untersuchungen an einkristallinem SiC nach thermischer Oxidationsbehandlung
  5. Non-Contact Method for the Measurement of the Enthalpy of Fusion Applied to Binary Zr Alloys
  6. On Properties of Point Defects in Fee Alloys
  7. Kinetic Rate Expression for längsten Chemical Vapor Deposition in Different WF6 Flow Regimes from Step Coverage Measurements
  8. On the Fatigue Threshold Behaviour of Two Ferrite-Pearlite Microalloyed Steels
  9. Mechanical Properties of Ti3SiC2 Dispersionstrengthened Copper
  10. Intrinsic Reduction Kinetics of MoO3 by Hydrogen
  11. A Thermodynamic Study of Liquid Cu-Cr Alloys and Metastable Liquid Immiscibility
  12. Aging an Fe-Ni-Co-Nb-Ti-Si Superalloy under Tensile Stress
  13. Experimental and Predicted Phase Equilibria in Fe-Cr-Mn-Ni-N Alloys
  14. Evaluation of Low Temperature Superplastic Formability for Zn-22Al Thin Sheets
  15. Mitteilungen der Deutschen Gesellschaft für Materialkunde e. V.
  16. Personen
  17. Buchbesprechungen
  18. DGM Tagungen. DGM Fortbildung
  19. Konferenzkalender. Impressum
https://doi.org/10.1515/ijmr-2000-910706

Articles in the same Issue

  1. Inhalt
  2. Aufsätze
  3. Classification of the Solute Concentration Profiles in the Discontinuous Solid State Phase Transformations
  4. Mikrotribologische Untersuchungen an einkristallinem SiC nach thermischer Oxidationsbehandlung
  5. Non-Contact Method for the Measurement of the Enthalpy of Fusion Applied to Binary Zr Alloys
  6. On Properties of Point Defects in Fee Alloys
  7. Kinetic Rate Expression for längsten Chemical Vapor Deposition in Different WF6 Flow Regimes from Step Coverage Measurements
  8. On the Fatigue Threshold Behaviour of Two Ferrite-Pearlite Microalloyed Steels
  9. Mechanical Properties of Ti3SiC2 Dispersionstrengthened Copper
  10. Intrinsic Reduction Kinetics of MoO3 by Hydrogen
  11. A Thermodynamic Study of Liquid Cu-Cr Alloys and Metastable Liquid Immiscibility
  12. Aging an Fe-Ni-Co-Nb-Ti-Si Superalloy under Tensile Stress
  13. Experimental and Predicted Phase Equilibria in Fe-Cr-Mn-Ni-N Alloys
  14. Evaluation of Low Temperature Superplastic Formability for Zn-22Al Thin Sheets
  15. Mitteilungen der Deutschen Gesellschaft für Materialkunde e. V.
  16. Personen
  17. Buchbesprechungen
  18. DGM Tagungen. DGM Fortbildung
  19. Konferenzkalender. Impressum
Sign up now to receive a 20% welcome discount
Institutional Access
How does access work?
Have an idea on how to improve our website?
Please write us.
© 2025 De Gruyter Brill
Downloaded on 29.10.2025 from https://www.degruyterbrill.com/document/doi/10.1515/ijmr-2000-910706/html
Scroll to top button