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Review of the Thermal and Mechanical Stability of TiN-based Thin Films

  • Lars Hultman , Carolina Engström , Jens Birch , Mats P. Johansson , Magnus Oden , Lennart Karlsson and Henrik Ljungcrantz
Published/Copyright: October 24, 2023

Published Online: 2023-10-24
Published in Print: 1999-10-01

© 2023 by Walter de Gruyter Berlin/Boston

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